JPH01129830U - - Google Patents
Info
- Publication number
- JPH01129830U JPH01129830U JP2560488U JP2560488U JPH01129830U JP H01129830 U JPH01129830 U JP H01129830U JP 2560488 U JP2560488 U JP 2560488U JP 2560488 U JP2560488 U JP 2560488U JP H01129830 U JPH01129830 U JP H01129830U
- Authority
- JP
- Japan
- Prior art keywords
- support
- semiconductor wafer
- support plate
- moves
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2560488U JPH01129830U (de) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2560488U JPH01129830U (de) | 1988-02-26 | 1988-02-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01129830U true JPH01129830U (de) | 1989-09-04 |
Family
ID=31246483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2560488U Pending JPH01129830U (de) | 1988-02-26 | 1988-02-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01129830U (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6146971A (ja) * | 1984-08-13 | 1986-03-07 | Mita Ind Co Ltd | 感光体ドラムの除電方法 |
-
1988
- 1988-02-26 JP JP2560488U patent/JPH01129830U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6146971A (ja) * | 1984-08-13 | 1986-03-07 | Mita Ind Co Ltd | 感光体ドラムの除電方法 |