JPH01137526U - - Google Patents

Info

Publication number
JPH01137526U
JPH01137526U JP3264088U JP3264088U JPH01137526U JP H01137526 U JPH01137526 U JP H01137526U JP 3264088 U JP3264088 U JP 3264088U JP 3264088 U JP3264088 U JP 3264088U JP H01137526 U JPH01137526 U JP H01137526U
Authority
JP
Japan
Prior art keywords
core tube
furnace core
furnace
semiconductor substrates
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3264088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3264088U priority Critical patent/JPH01137526U/ja
Publication of JPH01137526U publication Critical patent/JPH01137526U/ja
Pending legal-status Critical Current

Links

JP3264088U 1988-03-14 1988-03-14 Pending JPH01137526U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3264088U JPH01137526U (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3264088U JPH01137526U (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Publications (1)

Publication Number Publication Date
JPH01137526U true JPH01137526U (enrdf_load_stackoverflow) 1989-09-20

Family

ID=31259189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3264088U Pending JPH01137526U (enrdf_load_stackoverflow) 1988-03-14 1988-03-14

Country Status (1)

Country Link
JP (1) JPH01137526U (enrdf_load_stackoverflow)

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