JPH01133995A - 液相エピタキシャル成長装置 - Google Patents
液相エピタキシャル成長装置Info
- Publication number
- JPH01133995A JPH01133995A JP29184387A JP29184387A JPH01133995A JP H01133995 A JPH01133995 A JP H01133995A JP 29184387 A JP29184387 A JP 29184387A JP 29184387 A JP29184387 A JP 29184387A JP H01133995 A JPH01133995 A JP H01133995A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- substrate holder
- epitaxial growth
- liquid phase
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29184387A JPH01133995A (ja) | 1987-11-20 | 1987-11-20 | 液相エピタキシャル成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29184387A JPH01133995A (ja) | 1987-11-20 | 1987-11-20 | 液相エピタキシャル成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01133995A true JPH01133995A (ja) | 1989-05-26 |
| JPH0574560B2 JPH0574560B2 (enrdf_load_html_response) | 1993-10-18 |
Family
ID=17774137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29184387A Granted JPH01133995A (ja) | 1987-11-20 | 1987-11-20 | 液相エピタキシャル成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133995A (enrdf_load_html_response) |
-
1987
- 1987-11-20 JP JP29184387A patent/JPH01133995A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0574560B2 (enrdf_load_html_response) | 1993-10-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081018 Year of fee payment: 15 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081018 Year of fee payment: 15 |