JPH01133729U - - Google Patents
Info
- Publication number
- JPH01133729U JPH01133729U JP3056188U JP3056188U JPH01133729U JP H01133729 U JPH01133729 U JP H01133729U JP 3056188 U JP3056188 U JP 3056188U JP 3056188 U JP3056188 U JP 3056188U JP H01133729 U JPH01133729 U JP H01133729U
- Authority
- JP
- Japan
- Prior art keywords
- baking
- baking chamber
- infrared heater
- far
- processing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Description
図面は本考案の実施例を示すベーキング処理装
置の斜視図である。
１…ベーキング処理装置、２…半導体ウエハ、
４…ベーキング室、６…遠赤外線ヒータ。
The drawing is a perspective view of a baking treatment apparatus showing an embodiment of the present invention. 1...Baking treatment equipment, 2...Semiconductor wafer,
4... Baking room, 6... Far infrared heater.
Claims (1)
キング処理する装置であつて、 多数の半導体ウエハが挿入配置されるベーキン
グ室を備え、このベーキング室の内壁面に遠赤外
線ヒータを配設したことを特徴とするベーキング
処理装置。[Claims for Utility Model Registration] An apparatus for baking resist applied to the surface of a semiconductor wafer, which is equipped with a baking chamber into which a large number of semiconductor wafers are inserted, and a far-infrared heater is installed on the inner wall of the baking chamber. A baking processing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3056188U JPH01133729U (en) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3056188U JPH01133729U (en) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133729U true JPH01133729U (en) | 1989-09-12 |
Family
ID=31255724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3056188U Pending JPH01133729U (en) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133729U (en) |
-
1988
- 1988-03-08 JP JP3056188U patent/JPH01133729U/ja active Pending