JPH01133217A - Magnetic recording body - Google Patents
Magnetic recording bodyInfo
- Publication number
- JPH01133217A JPH01133217A JP29151987A JP29151987A JPH01133217A JP H01133217 A JPH01133217 A JP H01133217A JP 29151987 A JP29151987 A JP 29151987A JP 29151987 A JP29151987 A JP 29151987A JP H01133217 A JPH01133217 A JP H01133217A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- magnetic recording
- metal layer
- coercive force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 8
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000002474 experimental method Methods 0.000 description 15
- 239000010408 film Substances 0.000 description 12
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 8
- 239000010952 cobalt-chrome Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- SUBDBMMJDZJVOS-UHFFFAOYSA-N 5-methoxy-2-{[(4-methoxy-3,5-dimethylpyridin-2-yl)methyl]sulfinyl}-1H-benzimidazole Chemical compound N=1C2=CC(OC)=CC=C2NC=1S(=O)CC1=NC=C(C)C(OC)=C1C SUBDBMMJDZJVOS-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000006249 magnetic particle Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910002441 CoNi Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、例えば、ディスク状の磁気記録体に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to, for example, a disk-shaped magnetic recording body.
従来、この種の磁気記録体、特に薄膜磁気記録体は高密
度記録用として用いられている。この薄膜磁気記録体の
製法には、蒸着法、メツキ法等がある。最近では、特に
スパッタリング法による製法が用いられる。このスパッ
タリング法による薄膜磁気記録体は第８図に示すように
ＮｉＰからなる非磁性基材１上にＣｒ／Ｃｏ、Ｎ ｉ系
あるいはＣｒ／Ｃｏ、Ｎｉ、Ｃｒ系の下層２上層３の二
層構造が多くとられている。即ち、下層２は数１００人
から数１ 、０００人のＣｒからなり、上Ｎ３はＣ。Conventionally, this type of magnetic recording medium, particularly a thin film magnetic recording medium, has been used for high-density recording. Methods for manufacturing this thin film magnetic recording material include vapor deposition, plating, and the like. Recently, a manufacturing method using a sputtering method is particularly used. As shown in FIG. 8, the thin film magnetic recording material produced by this sputtering method is made of two layers: a lower layer 2 and an upper layer 3 based on Cr/Co, Ni, or Cr/Co, Ni, Cr on a nonmagnetic base material 1 made of NiP. It has a lot of structure. That is, the lower layer 2 consists of several hundred to several thousand Cr people, and the upper layer N3 consists of C.
系合金からなっている。その他、この種の磁気記録体と
しては、特開昭６１−１９０７１６号公報、特開昭６１
．−２０４８３６号公報、で示すものがある。It is made of alloys. In addition, as this type of magnetic recording medium, JP-A-61-190716, JP-A-61
．． There is one shown in Japanese Patent No.-204836.
しかしながら、最近の磁気記録分野では、ますます高記
録密度化の傾向が高まり、高い保磁力、低ノイズ化の磁
気記録体が要求されており、従来の技術によっては、望
ましい高い保持力を得ることができず、又変調ノイズも
まだ高い値であるという問題点があった。However, in recent years in the field of magnetic recording, there has been a growing trend toward higher recording densities, and magnetic recording media with high coercive force and low noise are required, and it is not possible to obtain the desired high coercive force depending on conventional technology. However, there were problems in that the modulation noise was still high.
そこで、本発明は上記問題点に鑑みなされたものであっ
て、高保持力、低ノイズの磁気記録体を提供することを
目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a magnetic recording medium with high coercivity and low noise.
本発明における上記目的を達成させるための手段は、非
磁性基材面上にＣｒ層を介して磁性金属層を形成してな
る磁気記録体において、前記磁性金属層は、Ｘ、Ｙを原
子％としたときＧｏｌｏ。−（Ｘ＋Ｖ）ＣｒＸＴａ、で
表され１≦×≦１８．２≦Ｙ≦９の組成比をもち面内方
向に磁気異方性を有することを特徴とする磁気記録体に
係るものである。Means for achieving the above object in the present invention is a magnetic recording body formed by forming a magnetic metal layer on a non-magnetic base material surface via a Cr layer, in which the magnetic metal layer contains atomic percent of X and Y. When you say Golo. -(X+V)CrXTa, having a composition ratio of 1≦×≦18.2≦Y≦9, and having magnetic anisotropy in the in-plane direction.
上記構成において、磁性金属層をＸ、Ｙを原子％とした
ときにＣＯ＋ｏｏ−＋＊＊ｙ＋ ＣｒＸＴａ、で表わ
され１≦×≦１８．２≦Ｙ≦９の組成比で成膜し、これ
により面内方向に磁気異方性を有する記録媒体となるこ
とによって保磁力の向上とノイズの低減を図っている。In the above structure, the magnetic metal layer is expressed as CO+oo-+**y+ CrXTa, where X and Y are atomic %, and is formed at a composition ratio of 1≦×≦18.2≦Y≦9. This results in a recording medium having magnetic anisotropy in the in-plane direction, thereby improving coercive force and reducing noise.
以下、図面によって本発明の一実施例を説明する。本発
明者は以下に説明する各種の実験の結果、第１図で示す
ような磁気記録体を得た。これは非磁性基材１の面上に
０１層４を形成し、その上に磁性金属層５を形成したも
のである。そして、磁性金属層５は、Ｘ、Ｙを原子％と
したときＣｏ１００−ｔｘ−ｖ、ｃｒＸＴａｙで表され
１≦×≦１８，２≦Ｙ≦９の組成比をもつものである。An embodiment of the present invention will be described below with reference to the drawings. As a result of various experiments described below, the inventor obtained a magnetic recording body as shown in FIG. This has an 01 layer 4 formed on the surface of a non-magnetic base material 1, and a magnetic metal layer 5 formed thereon. The magnetic metal layer 5 is expressed by Co100-tx-v and crXTay, where X and Y are expressed as atomic %, and has a composition ratio of 1≦×≦18, 2≦Y≦9.
まず、第１の実験について説明する。First, the first experiment will be explained.
これは、１５ ｃｍ （６１ｎｃｈ）のターゲットを用
いたＤＣマグネトロンスパンタリング法により磁気記録
体を形成したものである。この磁気記録体はＮｉＰ非磁
非磁性基材面上に下地層として１ 、０００人の０１層
４を形成し、その上に、ＣｏＣｒ、□原子％にＴａチッ
プ（５ｍｘ５ｍｍ）の個数を変化させてＴａの添加量を
変化させながら６００人のるｎ性金屈層５を成膜する。This is a magnetic recording medium formed by a DC magnetron sputtering method using a 15 cm (61 nch) target. This magnetic recording body is made by forming an 01 layer 4 of 1,000 layers as an underlayer on a NiP non-magnetic base material surface, and on top of this, the number of CoCr, Ta chips (5 m x 5 mm) is varied to □ atomic %. An n-type gold-converting layer 5 of 600 layers was formed while changing the amount of Ta added.
このときの他の条件はバックグランド気圧として２．４
Ｘ １０−６Ｔｏ ｒ ｒ、 Ａ ｒガス圧５ｍＴｏ
ｒｒ、基板温度１７０℃である。この条件におけるＴａ
添加量と面内方向における保磁力Ｈｃとの関係を第２図
によって表わすと、Ｔａが約６％で保磁力が約１，２０
０ （Ｏｅ ）の最大値となり、ＣｏＣｒ、□原子％だ
けで成膜を形成した場合に比しＴａの添加による成膜の
方が保６■力を高（できる。Ｔａの添加ＩＹは２≦Ｙ≦
９の範囲内で保磁力の優位性が現われてくることが判明
された。またこれらの膜はすべて面内方向に磁気異方性
を有していることがｌｉ！認されている。これはＶＳＭ
を用い膜面に平行及び垂直方向に磁界を印加し、ヒステ
リシスカーブより判断したものである。Other conditions at this time are 2.4 as background pressure.
X 10-6Torr, Ar gas pressure 5mTo
rr, and the substrate temperature is 170°C. Ta under this condition
The relationship between the amount added and the coercive force Hc in the in-plane direction is shown in Figure 2. When Ta is about 6%, the coercive force is about 1.20
0 (Oe), and compared to the case of forming a film with only CoCr, □ atomic %, the film formed by adding Ta has a higher holding power (IY of Ta addition is 2≦ Y≦
It was found that the superiority of coercive force appears within the range of 9. Furthermore, all of these films have magnetic anisotropy in the in-plane direction li! It has been certified. This is VSM
A magnetic field was applied in parallel and perpendicular directions to the film surface using a 3D film, and the results were determined based on the hysteresis curve.
次に、第２の実験について説明する。Next, the second experiment will be explained.
Ｃｒ ｆｆｉ ４を１ 、０００人としＣｏ Ｃｒ ＋
ｂＴ ａ ｂ原子％で６００人の磁性金属層５を成膜し
たものと、０１層４を同じ＜ １．０００人としＴａ
を取り除いたＣｏＣｒ、□原子％で６００人の磁性金属
層５を比較した。このときの条件は、両者共に第１の実
験と同一である。その結果、保磁力はＣｏ Ｃｒ Ｈｂ
Ｔ ａ ｂ原子％の方が８５００ｅでＣｏＣｒ＋を原子
％の方が５２００ｅであった。従って、Ｔａを添加する
ことによって保磁力が高くなることが判明された。If Cr ffi 4 is 1,000 people, then Co Cr +
The magnetic metal layer 5 was formed with bT a b atomic % of 600 people, and the 01 layer 4 was formed with the same < 1.000 people Ta
The magnetic metal layer 5 of 600 people was compared in terms of CoCr and □ atomic %. The conditions at this time were the same as in the first experiment. As a result, the coercive force is Co Cr Hb
The T a b atomic % was 8500e, and the CoCr+ atomic % was 5200e. Therefore, it was found that the addition of Ta increases the coercive force.
次に、第３の実験について説明する。Next, a third experiment will be explained.
実施例１と同様に６”Ｔａｒｇｅｔを用いＤＣマグネト
ロン法により、ＮｉＰ基板上に、Ｃｒを１ 、０００人
成膜する。次にＣｏＣｒｘＴａｂになる様にＣｒ添加４
］Ｘを変化させながら６００人の磁性膜を成膜しディス
クとした。As in Example 1, 1,000 Cr films are formed on a NiP substrate by the DC magnetron method using a 6" target. Next, 4 layers of Cr are added to form CoCrxTab.
] 600 magnetic films were formed by varying X to form disks.
このディスクにおいてＣｒ添加量と保磁力Ｈｃとの関係
について調べた結果を第３図に示す。Ｃｒの添加量の増
加とともにＨｃは増大し約１１ａｔ％程度で極大となる
。その後添加量が増えるとＨｃは低下していく傾向をも
つ。この図よりＣｒ添加量は１≦×≦１８ａｔ％になる
ことが望ましいことがわかる。FIG. 3 shows the results of investigating the relationship between the amount of Cr added and the coercive force Hc in this disk. As the amount of Cr added increases, Hc increases and reaches a maximum at about 11 at%. Thereafter, as the amount added increases, Hc tends to decrease. From this figure, it can be seen that it is desirable that the amount of Cr added be 1≦×≦18 at%.
次に、第４の実験について説明する。Next, a fourth experiment will be explained.
これは、１５ ｃｍ （６１ｎｃｈ）のターゲットを用
いてＮｉＰを基板としてＣ１を４．０００人の厚さにし
たＣｒ層層上上ＣＯＣｒ ＋ｏ、 ｓＴ ａ ６．３の
磁性金属層５を６００人の厚さに成膜したものと、０１
層４を同じくしてａｌ性金属層５をＣｏＮｆ＋ａＣｒｑ
の６００人の厚さに成膜したものとを比較した。このと
きの条件は、両者共にバンクグランド気圧２×１０−’
Ｔｏ ｒ ｒ、 Ａ ｒガス圧５ｍＴｏｒｒ、基板温度
１７０℃である。この両者の結果は、磁性金属層５の表
面を走査電子顕微鏡で同一倍率の状態で観察してみると
、第４図（Ａ）、 （Ｂ）で示すように第４図（Ａ）
のＣＯＣｒ ＋ｏ、ｓＴ ａ ｂ、ｙの方がＣＯＮ ｉ
１ｓＣｒ ｑよりも粒子サイズが微細化され高密度記
録に適していることが判明された。This was done by using a 15 cm (61 nch) target, using a NiP substrate as a substrate, and depositing a magnetic metal layer 5 of COCr+o, sTa 6.3, on a Cr layer with a thickness of 4,000 nm, and a magnetic metal layer 5 of 600 nm. The film formed to a thickness of 01
Al metal layer 5 of layer 4 is made of CoNf+aCrq.
A comparison was made with a film formed to a thickness of 600 people. The conditions at this time are bank ground pressure 2×10-' for both
Torr, Ar gas pressure was 5 mTorr, and substrate temperature was 170°C. When the surface of the magnetic metal layer 5 is observed at the same magnification using a scanning electron microscope, both results are as shown in FIG. 4(A) and (B).
COCr +o, sT a b, y is CON i
It was found that the grain size was finer than that of 1sCr q and that it was suitable for high-density recording.
次に第５の実験について説明する。Next, the fifth experiment will be explained.
これは、２０ ｃｍ （８１ｎｃｈ）のターゲットを用
いてＮ ｉ Ｐ％板としてＣｒを６００人の厚さにした
Ｃｒ層４上にＣｏＣｒ、、、、Ｔａ、の磁性金属層５を
３５０人〜８６０人まで変化させて成膜したものと、磁
性金属層５の素材のみをＣｏＮｉ＋５Ｃｒｑに変更し厚
さを２５０人〜７５０人まで変化させて成膜したものと
を比較した。このときの他の条件は、両者共にバンクグ
ランド気圧Ｉ Ｘ Ｉ Ｏ−’Ｔｏ ｒ ｒ。This is done by using a 20 cm (81 nch) target and depositing a magnetic metal layer 5 of CoCr, ..., Ta, on a Cr layer 4 with a thickness of 350 to 860 nm using Cr as a NiP% plate. A comparison was made between a film formed by changing the number of people and a film formed by changing only the material of the magnetic metal layer 5 to CoNi+5Crq and changing the thickness from 250 to 750 people. The other conditions at this time are bank ground pressure IXIO-'Torr for both.
Ａｒガス圧１０ｍＴｏ ｒ ｒ、基板温度２２０℃であ
る。この第５の実験における上記２例について磁性金属
層５の厚さと変調ノイズの最大値との関係をみると第５
図に示すように前者のＣｏＣｒ、、、。The Ar gas pressure was 10 mTorr, and the substrate temperature was 220°C. Looking at the relationship between the thickness of the magnetic metal layer 5 and the maximum value of modulation noise for the above two examples in this fifth experiment, the fifth
As shown in the figure, the former CoCr...
Ｔａ４の方が最大ノイズの少ないことが判明された。こ
の測定方法は、第６図に示すように再生出力レベルの基
準マーカと２．５ＭＨ２の再生出力信号以外が変調ノイ
ズであって、Ａ点がノイズの最大値である。更に、２．
５ＭＩＩＺの再生出力信号のレベルと変調ノイズの最大
値との関係を測定してみると第７図に示す結果が得られ
た。この測定方法５は、得られた磁気記録体をディスク
状とし、これを２．５９７ ｒｐｍで回転させ、半径２
５ｍｍの位置でトラック幅２０μｍの測定用磁気ヘッド
を用いフライング高さ０．２５μｍの条件で行なったも
のである。即ち、同一膜厚６００人ならば、Ｃｏ Ｃｒ
、、、Ｓ’Ｔ’ ａ ａの方がＣＯＮ ！ ＋ｅＣｒ
ｑよりも約３ｄＢノイズが少ないことが判明された。又
、同一出力でもＣｏ Ｃｒ ｚ、５Ｔａ４の方がＣｏＮ
ｉ、、Ｃｒ、よりも約１．５ｄｌｌノイズが少ないこと
が判明された。It was found that Ta4 had less maximum noise. In this measurement method, as shown in FIG. 6, the signals other than the reproduction output level reference marker and the 2.5 MH2 reproduction output signal are modulation noise, and point A is the maximum value of the noise. Furthermore, 2.
When the relationship between the level of the reproduced output signal of 5MIIZ and the maximum value of modulation noise was measured, the results shown in FIG. 7 were obtained. In this measurement method 5, the obtained magnetic recording medium is formed into a disk shape, and this is rotated at 2.597 rpm, and the radius is 2.
The measurement was carried out using a measuring magnetic head with a track width of 20 .mu.m at a position of 5 mm and a flying height of 0.25 .mu.m. That is, if the film thickness is the same for 600 people, CoCr
,,,S'T' a a is more CON! +eCr
It was found that the noise was about 3 dB lower than that of q. Also, even with the same output, CoCr z, 5Ta4 has more CoN
It was found that the noise was about 1.5 dll less than that of i,,Cr,.
以上の実験結果から、磁性金属層５はＣｒの添加量が１
８原子％以内であることが望ましく、かつＴａを添加す
る必要性があることが判明される。From the above experimental results, it is clear that the magnetic metal layer 5 has an additive amount of Cr of 1
It has been found that it is desirable that the content be within 8 atomic %, and that it is necessary to add Ta.
そして、これらの実験結果によりｔｎ性金属層５は１≦
×≦１８．２≦Ｙ≦９の組成比のＣＯ＋ ｏｏ−（Ｘ＊
ｙ）ＣｒＸＴａｙから形成することにより磁性体粒子を
微粒子化して保磁力とノイズの低減を図ることができる
。According to these experimental results, the tn metal layer 5 is 1≦
CO+ oo-(X*
y) By forming the magnetic material from CrXTay, it is possible to make the magnetic particles finer and reduce the coercive force and noise.
以上のように本発明によれば、磁性金属層は磁性体粒子
が微粒子化し、そして保磁力とノイズの低減を図ること
によって高密度記録に好適な磁気記録媒体を提供するこ
とができる。As described above, according to the present invention, the magnetic particles in the magnetic metal layer are finely divided, and coercive force and noise are reduced, thereby providing a magnetic recording medium suitable for high-density recording.
第１図は本発明の一実施例における磁気記録体を示す断
面図、第２図は本発明における第１の実験結果を示す特
性回、第３図は本発明における第３の実験結果を示す特
性図、第４図（Ａ）、（Ｂ）は本発明における第４の実
験結果を示す磁性金属層の表面を観察した写真、第５図
は本発明における第５の実験結果を示す特性図、第６図
は第５の実験における測定時の特性を示す特性図、第７
図は本発明における第５の実験の他の結果を示す特性図
、第８図は従来の磁気記録体を示す断面図である。
１・・・非磁性基材
４・・・Ｃｒ層
５・・・磁気記録体
第１図
第２図
Ｔａ Ｊ≦殉ｔ（Ｊ船Ｖム）
０ ５ １０ Ｉｓ
２０Ｃｒ（Ｘｌ ： Ｃｏｎｔｅｎｔ ＣＬＪ
ｐ乞第４間
第４図 （８）
に１
第５図
盾颯剥６ネ厚（入） −
第６図FIG. 1 is a cross-sectional view showing a magnetic recording medium in an embodiment of the present invention, FIG. 2 is a characteristic diagram showing the results of a first experiment in the present invention, and FIG. 3 is a diagram showing the results of a third experiment in the present invention. Characteristic diagrams, Figures 4 (A) and (B) are photographs of the surface of the magnetic metal layer showing the results of the fourth experiment in the present invention, and Figure 5 is a characteristic diagram showing the results of the fifth experiment in the present invention. , Figure 6 is a characteristic diagram showing the characteristics during measurement in the fifth experiment, and Figure 7 is a characteristic diagram showing the characteristics during measurement in the fifth experiment.
The figure is a characteristic diagram showing other results of the fifth experiment in the present invention, and FIG. 8 is a cross-sectional view showing a conventional magnetic recording body. 1...Nonmagnetic base material 4...Cr layer 5...Magnetic recording body Fig. 1 Fig. 2 Ta J≦T (J ship V) 0 5 10 Is
20Cr(Xl: Content CLJ
Figure 4 (8) 1 Figure 5 Shield 6th thickness (included) - Figure 6
Claims (1)
なる磁気記録体において、前記磁性金属層は、Ｘ、Ｙを
原子％としたときＣｏ＿１＿０＿０＿−＿（＿Ｘ＿＋＿
Ｙ＿）Ｃｒ＿ｘＴａ＿ｙで表され１≦Ｘ≦１８、２≦Ｙ
≦９の組成比をもち面内方向に磁気異方性を有すること
を特徴とする磁気記録体。In a magnetic recording body formed by forming a magnetic metal layer on a non-magnetic base material surface via a Cr layer, the magnetic metal layer has Co_1_0_0_-_(_X_+_
Y_) Cr_xTa_y, 1≦X≦18, 2≦Y
A magnetic recording body characterized by having a composition ratio of ≦9 and having magnetic anisotropy in an in-plane direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29151987A JPH01133217A (en) | 1987-11-18 | 1987-11-18 | Magnetic recording body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29151987A JPH01133217A (en) | 1987-11-18 | 1987-11-18 | Magnetic recording body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01133217A true JPH01133217A (en) | 1989-05-25 |
Family
ID=17769946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29151987A Pending JPH01133217A (en) | 1987-11-18 | 1987-11-18 | Magnetic recording body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01133217A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0349020A (en) * | 1989-04-26 | 1991-03-01 | Hitachi Metals Ltd | Magnetic recording medium |
| JPH03237613A (en) * | 1990-02-13 | 1991-10-23 | Fuji Electric Co Ltd | Magnetic recording medium and its production |
-
1987
- 1987-11-18 JP JP29151987A patent/JPH01133217A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0349020A (en) * | 1989-04-26 | 1991-03-01 | Hitachi Metals Ltd | Magnetic recording medium |
| JPH03237613A (en) * | 1990-02-13 | 1991-10-23 | Fuji Electric Co Ltd | Magnetic recording medium and its production |
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