JP3013598B2 - Magnetic recording media - Google Patents
Magnetic recording mediaInfo
- Publication number
- JP3013598B2 JP3013598B2 JP4121036A JP12103692A JP3013598B2 JP 3013598 B2 JP3013598 B2 JP 3013598B2 JP 4121036 A JP4121036 A JP 4121036A JP 12103692 A JP12103692 A JP 12103692A JP 3013598 B2 JP3013598 B2 JP 3013598B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- medium
- magnetic
- coercive force
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Record Carriers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ハード磁気ディスク用
の長手薄膜媒体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a longitudinal thin film medium for a hard magnetic disk.
【０００２】[0002]
【従来の技術】ハード磁気ディスク用の高密度記録媒体
として、塗布媒体に代わりスパッタ法による金属薄膜媒
体が現在主流となってきている。この薄膜媒体において
は高密度記録を実現するため、高出力、高記録密度特性
および高Ｓ／Ｎ等が要求され、媒体の磁気特性として保
磁力が高く、かつ保磁力の角形比が小さい必要がある。
そこで、上記のような良好な特性を得るため、従来、Ｃ
ｏＮｉＣｒ／Ｃｒ媒体においてはＣｒ下地膜の膜厚を厚
くしたり（IEEE Trans. Magn.，24，p2727-，1988）、
ＣｏＰｔＣｒ／Ｃｒ媒体においてＣｏＰｔＣｒ膜を高Ａ
ｒガス圧で作製すること（IEEE Trans. Magn.，26，p15
78-，1990）が行われてきた。2. Description of the Related Art As a high-density recording medium for a hard magnetic disk, a metal thin-film medium formed by a sputtering method has become mainstream instead of a coating medium. In order to realize high-density recording in this thin-film medium, high output, high recording density characteristics, high S / N, and the like are required. is there.
Therefore, in order to obtain good characteristics as described above, conventionally, C
In oNiCr / Cr media, the thickness of the Cr underlayer may be increased (IEEE Trans. Magn., 24 , p2727-, 1988),
CoPtCr film in CoPtCr / Cr medium has a high A
Production at r gas pressure (IEEE Trans. Magn., 26 , p15
78-, 1990).
【０００３】[0003]
【発明が解決しようとする課題】上記の従来のスパッタ
法による薄膜媒体作製技術において、媒体の保磁力、保
磁力の角形比は良好なレベルにあるが、更に超高記録密
度の実現のためにそれらを改善する必要がある。本発明
の目的は、更に超高記録密度実現のため、媒体の保磁力
が高く、かつ保磁力の角形比が低い磁気記録媒体を提供
することにある。In the above-mentioned conventional thin film medium manufacturing technology by sputtering, the coercive force of the medium and the squareness ratio of the coercive force are at a good level. They need to be improved. It is another object of the present invention to provide a magnetic recording medium having a high coercive force and a low coercive force square ratio for realizing an ultra-high recording density.
【０００４】[0004]
【課題を解決するための手段】本発明は、基板上にＣｒ
よりなる下地膜とＣｏ系合金膜よりなる磁性膜とが形成
された長手薄膜媒体において、磁性膜がＣｏＣｒＴａ合
金膜に第４元素としてＭｏを添加したものよりなること
を特徴とする磁気記録媒体である。ここで、Ｍｏの添加
量は、１ａｔ％以上，９ａｔ％以下であることを好適と
する。SUMMARY OF THE INVENTION The present invention provides a method for forming a substrate on a substrate, comprising the steps of:
A longitudinal thin film medium having a base film made of Co and a magnetic film made of a Co-based alloy film, wherein the magnetic film is made of a CoCrTa alloy film to which Mo is added as a fourth element. is there. Here, it is preferable that the addition amount of Mo is 1 at% or more and 9 at% or less.
【０００５】[0005]
【作用】本発明によれば、ＣｏＣｒＴａ合金膜に第４元
素としてＭｏを添加することにより、高保磁力でかつ保
磁力の角形比の低い磁気記録媒体が得られる。According to the present invention, a magnetic recording medium having a high coercive force and a low coercive force squareness ratio can be obtained by adding Mo as the fourth element to the CoCrTa alloy film.
【０００６】[0006]
【実施例】以下に、本発明の実施例について説明する。
本実施例の磁気記録媒体の成膜は、ＲＦマグネトロン方
式のスパッタ装置にて行った。タ−ゲットは下地膜用と
して３ＮのＣｒタ−ゲット、磁性膜用としてＣｏＣｒＴ
ａ（１２ａｔ％Ｃｒ，２ａｔ％Ｔａ）合金タ−ゲット上
にＭｏチップを置く複合タ−ゲットをそれぞれ用いた。
また、基板はテクスチャ溝つき（表面粗さＲmax＝４０
０オングストロ―ム）のＮｉＰ／Ａｌ基板を用いた。ま
ず、本実施例のスパッタ条件を表１に示す。ここで、磁
性膜でＭｏの添加量はＣｏＣｒＴａ合金タ−ゲット上に
置くＭｏチップの個数により変化させた。このようにし
て作製した種々のＭｏ組成のＣｏＣｒＴａＭｏ／Ｃｒ媒
体について、ＶＳＭにより磁気特性を測定した。その結
果を図１に示す。なお、組成はＥＰＭＡにより分析を行
った。図１から１〜９ａｔ％のＭｏ添加により、Ｍｏ添
加なしの従来媒体と比較して保磁力（Ｈｃ）がほぼ同等
または多少高めの約１，５００〜１，７００ Ｏｅ の高
い値で、保磁力の角形比（Ｓ*）が約０．１〜０．３低
い値となることがわかった。Embodiments of the present invention will be described below.
The film formation of the magnetic recording medium of this example was performed by an RF magnetron type sputtering apparatus. The target is a 3N Cr target for the base film and CoCrT for the magnetic film.
a (12 at% Cr, 2 at% Ta) alloy targets each having a Mo chip placed on an alloy target were used.
The substrate has a texture groove (surface roughness R max = 40).
(0 angstrom) NiP / Al substrate was used. First, Table 1 shows the sputtering conditions of this embodiment. Here, the amount of Mo added in the magnetic film was changed according to the number of Mo chips placed on the CoCrTa alloy target. The magnetic characteristics of the CoCrTaMo / Cr media of various Mo compositions thus produced were measured by VSM. The result is shown in FIG. The composition was analyzed by EPMA. 1 to 9 at% of Mo, the coercive force (Hc) is almost equal to or slightly higher than that of the conventional medium without Mo, and is maintained at a high value of about 1,500 to 1,700 Oe. It was found that the squareness ratio (S * ) of the magnetic force was about 0.1 to 0.3 lower.
【０００７】[0007]
【表１】 [Table 1]
【０００８】次に、本発明媒体の記録再生特性について
述べる。本発明の媒体はＭｏ添加量を８ａｔ％とし、比
較のためＭｏ添加なしの従来媒体も作製した。なお、こ
れら記録再生用の媒体は、ＣｏＣｒＴａＭｏ成膜後に保
護膜として３００オングストロ―ム厚のカ―ボンを成膜
した。表２に磁気特性および記録再生特性の評価結果を
示す。ここで、Ｖは孤立波再生出力、Ｄは記録密度を示
す。これから本発明の媒体は従来媒体と比較して記録再
生特性で特にＳ／Ｎが改善されていることがわかる。Next, the recording / reproducing characteristics of the medium of the present invention will be described. For the medium of the present invention, the amount of Mo added was 8 at%, and a conventional medium without Mo was also prepared for comparison. For these recording / reproducing media, a 300 Å thick carbon film was formed as a protective film after forming the CoCrTaMo film. Table 2 shows the evaluation results of the magnetic characteristics and the recording and reproducing characteristics. Here, V indicates solitary wave reproduction output, and D indicates recording density. This shows that the medium of the present invention has particularly improved S / N in recording / reproducing characteristics as compared with the conventional medium.
【０００９】[0009]
【表２】 [Table 2]
【００１０】[0010]
【発明の効果】以上説明したように、本発明のＭｏ添加
媒体は、従来媒体と比較して磁気特性で高保磁力を保ち
つつ保磁力の角形比を低くすることが可能となり、記録
再生特性で特にＳ／Ｎが改善された。As described above, the Mo-added medium of the present invention makes it possible to reduce the coercive force squareness while maintaining a high coercive force in the magnetic characteristics as compared with the conventional medium, and to improve the recording and reproducing characteristics. In particular, the S / N was improved.
【図１】磁気特性で、保磁力（Ｈｃ）および保磁力の角
形比（Ｓ*）についてＣｏＣｒＴａ膜のＭｏ添加量依存
性を示した図である。FIG. 1 is a diagram showing the dependence of the coercive force (Hc) and the squareness ratio (S * ) of the coercive force on the amount of Mo added to a CoCrTa film.
Claims (1)
膜よりなる磁性膜とが形成された長手薄膜媒体におい
て、磁性膜がＣｏＣｒＴａ合金膜に第４元素として１ａ
ｔ％以上、９ａｔ％以下のＭｏを添加したものよりなる
ことを特徴とする磁気記録媒体。In a longitudinal thin film medium in which a base film made of Cr and a magnetic film made of a Co-based alloy film are formed on a substrate, the magnetic film is made of a CoCrTa alloy film and 1a as a fourth element.
A magnetic recording medium comprising a material to which Mo of t% or more and 9 at% or less is added.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4121036A JP3013598B2 (en) | 1992-04-16 | 1992-04-16 | Magnetic recording media |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4121036A JP3013598B2 (en) | 1992-04-16 | 1992-04-16 | Magnetic recording media |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05298650A JPH05298650A (en) | 1993-11-12 |
| JP3013598B2 true JP3013598B2 (en) | 2000-02-28 |
Family
ID=14801235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4121036A Expired - Fee Related JP3013598B2 (en) | 1992-04-16 | 1992-04-16 | Magnetic recording media |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3013598B2 (en) |
-
1992
- 1992-04-16 JP JP4121036A patent/JP3013598B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05298650A (en) | 1993-11-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5736262A (en) | Magnetic recording medium | |
| US20030082407A1 (en) | Magnetic recording medium, production process thereof, and magnetic recording and reproducing apparatus | |
| US6844046B2 (en) | Magnetic recording medium, production process thereof, magnetic recording and reproducing apparatus, and sputtering target | |
| JPH0714142A (en) | Thin film magnetic recording medium | |
| JP4716534B2 (en) | Magnetic recording medium | |
| JPH0750008A (en) | Magnetic recording medium | |
| JP3013598B2 (en) | Magnetic recording media | |
| JP2990975B2 (en) | Magnetic recording media | |
| JPH05114128A (en) | Metallic thin film type magnetic disk medium and production thereof | |
| JP2920723B2 (en) | Magnetic recording media | |
| JPH05151553A (en) | Magnetic recording medium | |
| JP2725502B2 (en) | Magnetic recording media | |
| JP2964596B2 (en) | Manufacturing method of magnetic recording medium | |
| JPH05109042A (en) | Magnetic recording medium | |
| JP2906480B2 (en) | Magnetic recording medium | |
| JPH04245016A (en) | Magnetic recording medium | |
| JP3098245B2 (en) | Manufacturing method of magnetic recording medium | |
| JP2725506B2 (en) | Magnetic recording media | |
| JP2527616B2 (en) | Metal thin film magnetic recording medium | |
| JPH07118418B2 (en) | Magnetic recording medium | |
| JPH06215348A (en) | Magnetic recording medium | |
| JPH0831639A (en) | Vertical magnetic recording medium | |
| JPH0684159A (en) | Magnetic recording medium | |
| JPH0536054A (en) | Magnetic recording medium and production thereof | |
| JPH05217144A (en) | Magnetic recording medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071217 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081217 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091217 Year of fee payment: 10 |
|
| LAPS | Cancellation because of no payment of annual fees |