JPH01132177A - Electrode for superconducting element - Google Patents
Electrode for superconducting elementInfo
- Publication number
- JPH01132177A JPH01132177A JP87310085A JP31008587A JPH01132177A JP H01132177 A JPH01132177 A JP H01132177A JP 87310085 A JP87310085 A JP 87310085A JP 31008587 A JP31008587 A JP 31008587A JP H01132177 A JPH01132177 A JP H01132177A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ceramic superconductor
- superconductor
- ceramic
- hours
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 claims abstract description 35
- 239000000919 ceramic Substances 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 6
- 239000010936 titanium Substances 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 8
- 239000000843 powder Substances 0.000 abstract description 5
- 239000010419 fine particle Substances 0.000 abstract description 3
- 238000005566 electron beam evaporation Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 1
- 239000010931 gold Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明はセラεツク超電導体を電子デバイスとして用い
る際にオーミック性よく電流、電圧を制御することが可
能であり、かつ密着性、安定性に優れた超電導素子用電
極に関するものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention makes it possible to control current and voltage with good ohmic properties when using a ceramic superconductor as an electronic device, and to improve adhesion and stability. The present invention relates to an electrode for superconducting elements that has excellent properties.
〈従来の技術〉
従来、セラミック超電導体の電気的特性、磁気的特性を
測定する際や、電子デバイスとして用いようとする際、
セラミック超電導体上に形成する電流あるいは電圧端子
用の電極材料として、Ｉｎ（インジウム）、Ａｕ（金）
あるいはＡｇペースト等が用いられている。<Conventional technology> Conventionally, when measuring the electrical and magnetic properties of ceramic superconductors or when trying to use them as electronic devices,
In (indium) and Au (gold) are used as electrode materials for current or voltage terminals formed on ceramic superconductors.
Alternatively, Ag paste or the like is used.
セラミック超電導体としてＹ−Ｂａ−Ｃｕ−０系を用い
、電流・電圧端子用電極として上記したＩｎ。The Y-Ba-Cu-0 system was used as the ceramic superconductor, and the above-mentioned In was used as the current/voltage terminal electrode.
Ａｕ、Ａｇペーストのそれぞれを用いた場合の電流−電
圧特性を第４図、第５図及び第６図にそれぞれ示してお
り、またその測定方法を第３図に示している。なお第３
図において、３１はセラミック超電導体、３２は電極、
３３は定電流源、３４は電圧計である。The current-voltage characteristics when using Au and Ag pastes are shown in FIGS. 4, 5, and 6, respectively, and the method for measuring them is shown in FIG. 3. Furthermore, the third
In the figure, 31 is a ceramic superconductor, 32 is an electrode,
33 is a constant current source, and 34 is a voltmeter.
〈発明が解決しようとする問題点〉
第３図に示すようにセラミック超電導体３１０両端に従
来より用いられているＩｎ（インジウム）。<Problems to be Solved by the Invention> As shown in FIG. 3, In (indium) has been conventionally used at both ends of a ceramic superconductor 310.
Ａｕ（金）あるいはＡｇペーストよりなる電極３２を形
成して、その電気的特性を測定したところ、第４図及び
第６図に示すように、ＩｎやＡｇペーストではオーミッ
クコンタクトがとれず、接触抵抗も高かった。またＡｕ
は第５図に示すようにオーピンク性の点ではよいが、セ
ラミック超電導体３１七の密着性が悪く、更には強度、
固ざが弱く取扱いが難しい、コストが高い等の欠点があ
った。When electrodes 32 made of Au (gold) or Ag paste were formed and their electrical characteristics were measured, as shown in FIGS. 4 and 6, ohmic contact could not be established with In or Ag paste, and the contact resistance was low. It was also expensive. Also, Au
As shown in FIG. 5, although good in terms of openness, the adhesion of the ceramic superconductor 317 is poor, and furthermore, the strength and
It has drawbacks such as weak hardness, difficulty in handling, and high cost.
本発明は上記の点に鑑みて創案されたものであリ、セラ
ミック超電導体に対してオーミック性。The present invention was devised in view of the above points, and has ohmic properties with respect to ceramic superconductors.
密着性及び安定性に優れた超電導素子用電極を提供する
ことを目的としている。The purpose of this invention is to provide an electrode for a superconducting element with excellent adhesion and stability.
く問題点を解決するための手段〉
上記の目的を達成するため、本発明の超電導素子用電極
は、セラミック超電導体と接する部分の電極の材料をＴ
ｉ（チタン）で構成するように成している。Means for Solving the Problems> In order to achieve the above object, the electrode for a superconducting element of the present invention has a material of the electrode in the portion in contact with the ceramic superconductor.
It is made of titanium (titanium).
〈作 用〉
超電導素子用電極として、セラミック超電導体と接する
部分の電極材料にＴ ｉを用いることにより、セラミッ
ク超電導体とのオーミックコンタクトが良好で、かつ密
着性が良く、強度的にも充分である電極が得られる。<Function> As an electrode for a superconducting element, by using Ti as the electrode material of the part that comes into contact with the ceramic superconductor, it has good ohmic contact with the ceramic superconductor, has good adhesion, and has sufficient strength. A certain electrode is obtained.
〈実施例〉 以下、本発明を実施例を挙げて詳細に説明する。<Example> Hereinafter, the present invention will be explained in detail by giving examples.
第１図に本発明を用いて作製した超電導素子用電極（２
端子）の構成図を示しており、同図において１１はセラ
ミック超電導体、１２はセラミック超電導体１１に接し
て形成されたＴｉ（チタン）よりなる電極である。Figure 1 shows an electrode (2) for a superconducting element produced using the present invention.
In this figure, 11 is a ceramic superconductor, and 12 is an electrode made of Ti (titanium) formed in contact with the ceramic superconductor 11.
セラミック超電導体１１は、例えばＢａ２ＹＩＣｕ３０
ｚ系の一温超電導体よりなり、その具体的な作製方法の
一例を示すと、酸化イツトリウムｙ２ｏ３ 、炭酸バリ
ウムＢａＣ０ａ、酸化第二銅ＣｕＯの微粉末をＹ：Ｂａ
：Ｃｕ＝１ ： ２ ： ３のモル比に秤量して、充分
に混合、粉砕した微粒子を大気中で９００℃。The ceramic superconductor 11 is, for example, Ba2YICu30.
It is made of a Z-based one-temperature superconductor, and one example of its production method is as follows.
:Cu = 1 : 2 : 3 molar ratio weighed, thoroughly mixed and pulverized fine particles were heated at 900°C in the atmosphere.
５時間仮焼成し、次に再び粉砕２分散させペロブスカイ
ト型酸化物超電導体の均一な微粒子（１μｍ−以下）か
らなる粉体を作製し、次に例えば加圧力１ｔｏｎ／ｃｊ
にて最適な形にプレス成型した後、本焼成として大気中
で１０００℃、３時間保持し、２００℃まで５時間で降
温させる熱処理を施してセラミック超電導体１１を作製
した。次ＫＴｉを電子ビーム蒸着法により蒸発速度５〜
１０λ／Ｓで電極を設ける必要のない部分をマスキング
した室温のセラミック超電導体１２の上に約１μｍの厚
さに蒸着し、電極１２を形成した。Calcined for 5 hours, then crushed and dispersed again to produce a powder consisting of uniform fine particles (1 μm or less) of perovskite oxide superconductor, and then applied with a pressing force of 1 ton/cj, for example.
After press-molding into an optimal shape, a heat treatment was performed in which the ceramic superconductor 11 was held in the air at 1000° C. for 3 hours and lowered to 200° C. over 5 hours as main firing. Next, KTi is evaporated at a rate of 5~ by electron beam evaporation method.
The electrode 12 was formed by vapor deposition to a thickness of about 1 μm on the ceramic superconductor 12 at room temperature, which had masked the portion where no electrode was required at 10λ/S.
また、この電極１２に銀ペーストにてリード線を固定し
て電極１２の電気的特性を測定した。Further, a lead wire was fixed to this electrode 12 with silver paste, and the electrical characteristics of the electrode 12 were measured.
上記によって作製した超電導素子の電流・電圧特性を第
２図に示す。この第２図に示す通り、この素子は良好な
オーミック性を示し接触抵抗もＩｎやＡｇペーストと比
べても１／１００以下であった。FIG. 2 shows the current/voltage characteristics of the superconducting element produced as described above. As shown in FIG. 2, this element exhibited good ohmic properties and the contact resistance was less than 1/100 compared to In or Ag paste.
また機械的にも密着性が良く安定性の面でも数ケ月間以
上初期特性を保持している。It also has good mechanical adhesion and stability, retaining its initial properties for several months or more.
なお、上記の実施例において超電導素子の材料としてＹ
−Ｂａ系セラミック超電導体を用いたがＹのかわりにＬ
ａ、Ｅｕ、Ｇｄ、Ｈｏ、Ｅｒ、Ｙｂ 等の超電導体とな
るランタノイド元素や、ＢａのかわりにＳｒを用いて作
製したセラばツク超電導体の場合にも同様に良好なオー
ミック性を示した。In addition, in the above examples, Y was used as the material of the superconducting element.
-Ba-based ceramic superconductor was used, but L was used instead of Y.
Similar good ohmic properties were also shown in the case of ceramic superconductors made using lanthanide elements such as a, Eu, Gd, Ho, Er, Yb, etc., which serve as superconductors, and Sr instead of Ba.
また上記の電極形成は電子ビーム法を用いたがスパッタ
法等を用いてＴｉを蒸着してもよい。また電極パターン
の形成も、マスキングによる方法以外に、ｒ ｉはＴ
ｓｕｂ が低くても密着性が優れるため、１Ｊ７トオ７
法を用いれば、セラミック超電導体を電極のエツチング
液に接触させずに微細な電極パターンの形成も容易であ
る。また実施例では２端子電極の場合を示したが、これ
に限らずＴｉがセラミック超電導体との密着性、安定性
が優れている点を用いれば、オーミックコンタクトを必
要としない多端子の超電導素子にも充分適用可能である
。Furthermore, although the electron beam method was used to form the electrodes described above, Ti may also be deposited using a sputtering method or the like. In addition, the electrode pattern can be formed using a method other than masking, where r i is T
Even if the sub is low, the adhesion is excellent, so 1J7 Too 7
By using this method, it is easy to form fine electrode patterns without bringing the ceramic superconductor into contact with the electrode etching solution. In addition, although the example shows the case of a two-terminal electrode, the excellent adhesion and stability of Ti with ceramic superconductors can be used to create a multi-terminal superconducting element that does not require ohmic contact. It is also fully applicable.
つまりセラミック超電導体を利用する電子デバイス、例
えば超電導磁気抵抗素子、５ＱＵＩＤ 、ジッセ７ソン
素子やセラミック超電導体の物性を応用した種々のセン
サーの電極として用いることができるため、その応用範
囲は非常に広い。In other words, it can be used as an electrode in electronic devices that utilize ceramic superconductors, such as superconducting magnetoresistive elements, 5QUIDs, Gissen elements, and various sensors that apply the physical properties of ceramic superconductors, so the range of applications is extremely wide. .
〈発明の効果〉
以上のように、本発明はセラミック超電導体上に接して
設けられた電極の材料としてＴｉを用いることにより、
オーミック性や密着性、安定性の面でも優れた電流ある
いは電圧を入出力するための電極を容易に得ることが可
能となる。<Effects of the Invention> As described above, the present invention achieves the following effects by using Ti as the material of the electrode provided in contact with the ceramic superconductor.
It becomes possible to easily obtain electrodes for inputting and outputting current or voltage that are excellent in terms of ohmic properties, adhesion, and stability.
第１図は本発明の超電導素子用電極の一実施例を示す図
、第２図は本発明の一実施例において用いた電極の電流
−電圧特性を示す図、第３図はセラミック超電導体と電
極との電流−電圧特性の測定方法を示す図、第４図乃至
第６図はそれぞれ従来の電極の電流−電圧特性を示す図
である。
１１・・・セラミック超電導体、１２・・・Ｔｉ電極、
３１・・・セラミック超電導体、３２・・・電極、３３
・・・定電流源、３４・・・電圧計。
代理人 弁理士 杉 山 毅 至（他１名）第１図
電−ｉ／Ａ
第２８
−５２′
劃υＶFIG. 1 is a diagram showing an example of the electrode for a superconducting element of the present invention, FIG. 2 is a diagram showing the current-voltage characteristics of the electrode used in an example of the present invention, and FIG. A diagram showing a method of measuring current-voltage characteristics with an electrode, and FIGS. 4 to 6 are diagrams showing current-voltage characteristics of conventional electrodes, respectively. 11... Ceramic superconductor, 12... Ti electrode,
31... Ceramic superconductor, 32... Electrode, 33
... Constant current source, 34... Voltmeter. Agent Patent attorney Takeshi Sugiyama (1 other person) Figure 1 Den-i/A No. 28-52' 劃υV
Claims (1)
ｉ（チタン）で構成してなることを特徴とする超電導素
子用電極。1. The material of the electrode in contact with the ceramic superconductor is T.
An electrode for a superconducting element characterized by being composed of i (titanium).
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP87310085A JPH01132177A (en) | 1987-08-01 | 1987-12-08 | Electrode for superconducting element |
| AT88307044T ATE95316T1 (en) | 1987-07-29 | 1988-07-29 | METHOD AND ARRANGEMENT FOR DETECTING A MAGNETIC FIELD BY MEANS OF MAGNETORESISTANCE PROPERTIES OF A SUPERCONDUCTING MATERIAL. |
| DE88307044T DE3884514T2 (en) | 1987-07-29 | 1988-07-29 | Method and arrangement for detecting a magnetic field using the magnetoresistance properties of a superconducting material. |
| US07/226,067 US5011818A (en) | 1987-07-29 | 1988-07-29 | Sensing a magnetic field with a super conductive material that exhibits magneto resistive properties |
| EP88307044A EP0301902B1 (en) | 1987-07-29 | 1988-07-29 | Method and device for sensing a magnetic field with use of a magneto-resistive property of a superconductive material |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-193014 | 1987-08-01 | ||
| JP19301487 | 1987-08-01 | ||
| JP87310085A JPH01132177A (en) | 1987-08-01 | 1987-12-08 | Electrode for superconducting element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01132177A true JPH01132177A (en) | 1989-05-24 |
Family
ID=16300753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP87310085A Pending JPH01132177A (en) | 1987-07-29 | 1987-12-08 | Electrode for superconducting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01132177A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190139297A (en) * | 2017-05-03 | 2019-12-17 | 엘지전자 주식회사 | Method for receiving reference signal in wireless communication system and apparatus therefor |
-
1987
- 1987-12-08 JP JP87310085A patent/JPH01132177A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190139297A (en) * | 2017-05-03 | 2019-12-17 | 엘지전자 주식회사 | Method for receiving reference signal in wireless communication system and apparatus therefor |
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