JPH01131009A - 電気半導体用りん酸の精製法 - Google Patents

電気半導体用りん酸の精製法

Info

Publication number
JPH01131009A
JPH01131009A JP63256079A JP25607988A JPH01131009A JP H01131009 A JPH01131009 A JP H01131009A JP 63256079 A JP63256079 A JP 63256079A JP 25607988 A JP25607988 A JP 25607988A JP H01131009 A JPH01131009 A JP H01131009A
Authority
JP
Japan
Prior art keywords
phosphoric acid
hydrogen peroxide
acid
hydrogen sulfide
antimony
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63256079A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05327B2 (OSRAM
Inventor
Richard E Hall
リチャード　イー　ホール
Peter H Zeh
ピーター　エイチ　ジー
Frederic B Jueneman
フレデリツク　ビー　ジユネマン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FMC Corp
Original Assignee
FMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FMC Corp filed Critical FMC Corp
Publication of JPH01131009A publication Critical patent/JPH01131009A/ja
Publication of JPH05327B2 publication Critical patent/JPH05327B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • C01B25/16—Oxyacids of phosphorus; Salts thereof
    • C01B25/18—Phosphoric acid
    • C01B25/234—Purification; Stabilisation; Concentration
    • C01B25/237—Selective elimination of impurities
    • C01B25/238—Cationic impurities, e.g. arsenic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Removal Of Specific Substances (AREA)
  • Manufacture And Refinement Of Metals (AREA)
JP63256079A 1987-10-13 1988-10-13 電気半導体用りん酸の精製法 Granted JPH01131009A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/107,329 US4804526A (en) 1987-10-13 1987-10-13 Process for purifying phosphoric acid for electrical semiconductor use
US107329 1993-08-16

Publications (2)

Publication Number Publication Date
JPH01131009A true JPH01131009A (ja) 1989-05-23
JPH05327B2 JPH05327B2 (OSRAM) 1993-01-05

Family

ID=22316079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63256079A Granted JPH01131009A (ja) 1987-10-13 1988-10-13 電気半導体用りん酸の精製法

Country Status (3)

Country Link
US (1) US4804526A (OSRAM)
JP (1) JPH01131009A (OSRAM)
CA (1) CA1297266C (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005003026A1 (ja) * 2003-07-01 2005-01-13 Nippon Chemical Industrial Co.,Ltd. 高純度リン酸及びその製造方法
JP2006321677A (ja) * 2005-05-18 2006-11-30 Nippon Chem Ind Co Ltd 高純度リン酸、およびその製造方法
JP2009114064A (ja) * 2009-03-05 2009-05-28 Nippon Chem Ind Co Ltd 高純度リン酸及びその製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5501767A (en) 1992-11-13 1996-03-26 Micron Technology, Inc. Method for gettering noble metals from mineral acid solution
JP3242566B2 (ja) * 1995-04-27 2001-12-25 富士通株式会社 分析試料の調製方法、不純物の分析方法及び高純度燐酸の調製方法ならびに半導体装置の製造方法
US20050095222A1 (en) * 2003-10-29 2005-05-05 Taro Suzuki Allergen inhibitor, allergen-inhibiting method, allergen-inhibiting fiber and allergen-inhibiting sheet
CN108275669B (zh) * 2018-01-16 2021-12-03 湖北兴福电子材料有限公司 一种电子级磷酸脱除刺激性气味的方法
PL440852A1 (pl) 2022-04-04 2023-10-09 Alventa Spółka Akcyjna Sposób oczyszczania kwasu fosforowego(V) na potrzeby krystalizacji statycznej do otrzymywania kwasu jakości odpowiedniej dla branży półprzewodników

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1597984A (en) * 1923-09-13 1926-08-31 Bour Harry E La Method of concentrating and purification of phosphoric acid
US1777548A (en) * 1928-03-19 1930-10-07 Swann Res Inc Process for the treatment of phosphoric acid
DE593370C (de) * 1931-11-05 1934-02-24 Chem Fab Budenheim Akt Ges Reinigung der durch sauren Aufschluss von Rohphosphaten erhaltenen Rohphosphorsaeure
GB778810A (en) * 1954-02-09 1957-07-10 Fonte Electr S A Process for manufacturing crystallised pure and anhydrous phosphoric acid
US3297401A (en) * 1960-11-10 1967-01-10 Toyo Soda Mfg Co Ltd Process for refining phosphoric acid preparations
NL6606839A (OSRAM) * 1965-05-21 1966-11-22
JPS5297394A (en) * 1976-02-13 1977-08-16 Toyo Soda Mfg Co Ltd Removal of organic matter in phosphoric acid
US4294809A (en) * 1976-05-06 1981-10-13 W. R. Grace & Co. Aeration of phosphoric acid
DE2910711A1 (de) * 1979-03-19 1980-10-02 Hoechst Ag Verfahren zur entfernung von verunreinigungen organischer art aus phosphorsaeure
US4503022A (en) * 1982-08-23 1985-03-05 International Minerals & Chemical Corp. Process for oxidation of wet process phosphoric acid
DE3444975A1 (de) * 1984-12-10 1986-06-12 Hoechst Ag, 6230 Frankfurt Verfahren zur entarsenierung von phosphorsauren loesungen

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005003026A1 (ja) * 2003-07-01 2005-01-13 Nippon Chemical Industrial Co.,Ltd. 高純度リン酸及びその製造方法
KR100729320B1 (ko) * 2003-07-01 2007-06-15 니폰 가가쿠 고교 가부시키가이샤 고순도 인산 및 그 제조 방법
US7470414B2 (en) 2003-07-01 2008-12-30 Nippon Chemical Industrial Co., Ltd. High purity phosphoric acid and process of producing the same
JP2006321677A (ja) * 2005-05-18 2006-11-30 Nippon Chem Ind Co Ltd 高純度リン酸、およびその製造方法
JP2009114064A (ja) * 2009-03-05 2009-05-28 Nippon Chem Ind Co Ltd 高純度リン酸及びその製造方法

Also Published As

Publication number Publication date
CA1297266C (en) 1992-03-17
JPH05327B2 (OSRAM) 1993-01-05
US4804526A (en) 1989-02-14

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