JPH01130538U - - Google Patents

Info

Publication number
JPH01130538U
JPH01130538U JP2700488U JP2700488U JPH01130538U JP H01130538 U JPH01130538 U JP H01130538U JP 2700488 U JP2700488 U JP 2700488U JP 2700488 U JP2700488 U JP 2700488U JP H01130538 U JPH01130538 U JP H01130538U
Authority
JP
Japan
Prior art keywords
boat
wafer
semiconductor wafer
semiconductor
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2700488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249717Y2 (US06633600-20031014-M00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2700488U priority Critical patent/JPH0249717Y2/ja
Publication of JPH01130538U publication Critical patent/JPH01130538U/ja
Application granted granted Critical
Publication of JPH0249717Y2 publication Critical patent/JPH0249717Y2/ja
Expired legal-status Critical Current

Links

JP2700488U 1988-02-29 1988-02-29 Expired JPH0249717Y2 (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2700488U JPH0249717Y2 (US06633600-20031014-M00021.png) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2700488U JPH0249717Y2 (US06633600-20031014-M00021.png) 1988-02-29 1988-02-29

Publications (2)

Publication Number Publication Date
JPH01130538U true JPH01130538U (US06633600-20031014-M00021.png) 1989-09-05
JPH0249717Y2 JPH0249717Y2 (US06633600-20031014-M00021.png) 1990-12-27

Family

ID=31249133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2700488U Expired JPH0249717Y2 (US06633600-20031014-M00021.png) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH0249717Y2 (US06633600-20031014-M00021.png)

Also Published As

Publication number Publication date
JPH0249717Y2 (US06633600-20031014-M00021.png) 1990-12-27

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