JPH01129611U

JPH01129611U -

Info

Publication number: JPH01129611U
Application number: JP2002088U
Authority: JP
Priority date: 1988-02-19
Filing date: 1988-02-19
Publication date: 1989-09-04

Description

[Brief explanation of the drawing]

第１図は接触型計測装置の外観図、第２図は面
幅測定におけるプローブの移動軌跡を示す説明図
、第３図は従来の計測装置の移動速度の時間的変
化を示すグラフ、第４図は本考案による計測装置
の移動速度の時間的変化を示すグラフ、第５図は
接触検出部の拡大図、第６図は第５図中の―
線断面図、第７図は移動方向、振動方向及び誤差
の関係を説明するための説明図、第８図は左右方
向の速度制御のブロツク図、第９図は歪量検出装
置の回路図、第１０図、第１１図はそれぞれ演算
回路１０，１１の具体的なブロツク図、第１２図
は演算回路１０，１１の具体的なブロツク図、第
１３図は選択比較回路を示すブロツク図である。図面中、１はプローブ、２はアーバ、３，４，
５はモータ、６，７は歪ゲージ、８は支持台、９
は歪量検出装置、１０，１１は演算回路、１２は
選択比較回路、１３〜２０，３２，３３は接続端
子である。 Fig. 1 is an external view of the contact-type measuring device, Fig. 2 is an explanatory diagram showing the movement locus of the probe in surface width measurement, Fig. 3 is a graph showing temporal changes in the moving speed of the conventional measuring device, and Fig. 4 The figure is a graph showing the temporal change in the moving speed of the measuring device according to the present invention, Figure 5 is an enlarged view of the contact detection section, and Figure 6 is the graph shown in Figure 5.
A line sectional view, FIG. 7 is an explanatory diagram for explaining the relationship between the moving direction, vibration direction, and error, FIG. 8 is a block diagram of speed control in the left and right direction, and FIG. 9 is a circuit diagram of the strain amount detection device. 10 and 11 are specific block diagrams of the arithmetic circuits 10 and 11, respectively. FIG. 12 is a specific block diagram of the arithmetic circuits 10 and 11. FIG. 13 is a block diagram showing the selection comparison circuit. . In the drawing, 1 is a probe, 2 is an arbor, 3, 4,
5 is a motor, 6 and 7 are strain gauges, 8 is a support stand, 9
1 is a distortion amount detection device, 10 and 11 are arithmetic circuits, 12 is a selection comparison circuit, and 13 to 20, 32, and 33 are connection terminals.

Claims

[Scope of utility model registration request]

In a measuring machine in which a probe is attached to the tip of an arbor installed upright in the measurement head, a strain gauge is attached to the base of the arbor in horizontal and vertical directions, and the strain amount signal from the strain gauge is used for the measurement. The measuring machine is characterized in that vibration suppression control of the arbor tip is performed by selectively changing the gain depending on the speed of the head part during measurement or non-measuring time and providing negative feedback to the feed rate control signal. Measuring head feeding speed control device.