JPH0635152Y2 - Linear motor test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a linear motor testing device for measuring the thrust (static thrust) of a linear motor for driving an ultra-precision processing machine, a semiconductor manufacturing device, or the like.

[Conventional technology]

In the above-described processing machine and manufacturing apparatus using a linear motor, it is necessary to measure the thrust of the linear motor in advance and perform highly accurate control based on the measurement result.

FIG. 3 shows the configuration of a conventional example of this thrust measuring test apparatus. The fixed portion 2 and the movable portion 3 form a linear motor 1. A magnet and a winding (both not shown) are arranged to face the fixed portion 2 and the movable portion 3, and the movable portion 3 moves in the thrust direction (arrow direction) of the linear motor 1 by feeding power to the winding. To do. This movable part 3 has a feed screw
A feed mechanism 17 composed of 15 and a handle 16 is connected in a straight line, and a head 8 that moves in the thrust direction by the rotation of the feed screw 15 is attached. A scale 7 is arranged so as to face the head 8, and the head 8 and the scale 7 constitute a position detector 6. In addition, the moving part 3 of the linear motor 1 and the feed screw 15
A load converter 5 is provided between and to measure the thrust of the linear motor 1. The measurement data of the load converter 5 is input to the Y-axis terminal of the XY recorder 19 via the amplifier 18, while the head movement data of the position detector 5 is input to the X-axis terminal of the XY recorder 19, XY recorder 19 records data by input. 20 is the movable part 3
Is a power supply that supplies current to the.

A method of measuring the thrust of the linear motor 1 using the above test device will be described.

A predetermined current is supplied to the winding of the linear motor 1. This feeding may not be performed depending on the measurement conditions.

The movable portion 3 of the linear motor 1 is moved by operating the handle 16 to arbitrarily change the relative position between the movable portion 3 and the fixed portion 2.

While the movement of the movable part 3 is measured by the position detector 6 including the head 8 and the scale 7, the thrust force of the linear motor 1 is measured by the load converter 5, and these measurement data are recorded by the XY recorder.

In the above measurement procedure, the position detector 6 is connected to a computer (not shown), and the output of the power source 20 is controlled by the computer based on the output of the detector 6 so that the position of the movable part 3 is changed. It is also possible to supply a current corresponding to.

[Problems to be solved by the device]

However, the conventional test apparatus has the following problems when the size of the linear motor 1 and the support mechanism thereof are different.

In the conventional device, since the linear motor 1 and the feed mechanism 17 are arranged in a straight line in the thrust direction, the feed direction of the feed mechanism 17, the thrust detection direction of the load converter 5, and the linear motor 1
It is difficult to feed the thrust force of the above-mentioned method on the same axis, and if these three directions do not match, an error will occur in the measured thrust force. In addition, it is necessary to lengthen the entire test device by at least twice the effective stroke of the linear motor 1,
There is a limit to downsizing.

Every time the size and support mechanism of the linear motor 1 is different,
It is necessary to adjust the height between the load converter 5 and the feed mechanism 17,
The operation becomes troublesome.

With the arrangement of the head 8 of the position detector 6 as shown in FIG. 3, it is not possible to detect a position change in the force detection direction due to the strain of the load converter 5. Therefore, the relative position between the fixed portion 2 and the movable portion 3 of the linear motor 1 cannot be accurately detected.

Here, the present invention provides a linear motor testing device capable of easily and highly accurately measuring the position and thrust even for linear motors having different sizes and supporting mechanisms, and being compact and capable of automatic measurement. With the goal.

[Means for Solving the Problems]

The present invention, which achieves the above object, has a structure in which a moving table and a measuring table are overlapped with each other, and the measuring table and the linear guide serve as a linear motor supporting mechanism, and can move in the same direction as the thrust direction of the linear motor. A moving table with a friction force of almost zero is installed on the moving table via a linear guide, and a load converter is installed between the measuring table and the moving table. One of the parts is supported. In this case, a position detector that detects the amount of movement of the measurement table is attached to the table.

[Action]

In the above structure, the moving table is used as the feed mechanism, and the measurement table and the linear guide are used as the support mechanism, whereby these mechanisms are arranged in parallel. Therefore, the feed direction of the feed mechanism,
3 of force detector of load converter and thrust direction of linear motor
The direction can be easily adjusted.

〔Example〕

 Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 shows an embodiment of the present invention. A moving table 11 and a measuring table 13 are provided on the base 4. The moving table 11 is a ball screw rotated by the servo motor 9.
10 is screwed to the lower end portion and is adapted to move in a fixed direction by rotation of the ball screw 10. Therefore, the servomotor 9 and the ball screw 10 form a feed mechanism. In this case, the feed direction of the moving table 11 by the feed mechanisms 9 and 10 is the same as the thrust direction of the linear motor 1.

The measuring table 13 is a linear guide on this moving table 11.
It is provided via 12 and is attached so that the frictional force with the moving table 11 becomes substantially zero. The movable portion 3 of the linear motor 1 to be measured is fixed on the measurement table 13. The fixed portion 2 of the linear motor 1 is fixed to the support portion 14 of the base 4 so as to be located on the movable portion 3. Therefore, the driving of the linear motor 1 causes the measurement table 13 to receive the force in the thrust direction. In such a configuration, the measurement table 13 and the linear guide 12 serve as a support mechanism for the linear motor 1. By providing the measurement table 13 on the moving table 11, the support mechanism and the feed mechanism are positioned in parallel. . The head 8 of the position detector 6 is attached to one end of the measurement table 13, while the scale 7 of the position detector 6 is provided on the base 4 side so that the movement amount of the measurement table 13 can be detected. Has become. Further, the load converter 5 is attached between the measurement table 13 and the moving table 11.

In the above configuration, the measuring table 13 and the linear guide 12 which are the supporting mechanism of the linear motor 1 are provided on the moving table 11 which is moved by the feeding mechanism, and the load converter 5 is provided between these tables 11 and 13. Is attached, the feed mechanism and the support mechanism are in parallel,
It becomes easy to match the feed direction of the feed mechanism, the force detection direction of the load converter, and the thrust direction of the linear motor 1, and the entire device becomes shorter. Also, since the linear motor 1 is supported by the measurement table 13 and the linear guide 12,
It is not necessary to adjust the height between the load converter 5 and the feed mechanisms 9 and 10. Further, since the displacement position of the force detection direction due to the strain of the load converter 5 can also be detected, the relative position between the fixed portion 2 and the movable portion 3 of the linear motor 1 can be accurately detected.

FIG. 2 shows another embodiment of the present invention, in which the same elements as in the above embodiment are designated by the same reference numerals and correspond to each other. In this embodiment, a pole on the base 4 on one end surface side of the measurement table 13 is used.
23 is provided, and the gap sensor 21 is attached to the pole 23 and the measurement table 13. The gap sensor 21 detects the amount of movement of the measurement table 13 and performs the same operation as the position detector 6 in the above embodiment. Also,
A pole 23 is erected on the base 4 on the other end surface side of the measurement table 13, and a spring 22 is provided between the pole 23 and the measurement table 13.
Is attached to the load transducer 5 so that the load transducer 5 is preloaded. Further, a rotary encoder 24 is attached to the servo motor 9 which is a feed mechanism of the moving table 11 to detect the rotation of the servo motor 9.

In such a configuration, the fixed portion 2 and the movable portion of the linear motor 1 are determined by the sum of the displacement signals output from the rotary encoder 24 and the displacement table 11 and the measurement table 13 output from the gap sensor 21. An accurate relative position of 3 can be detected. Further, since the load converter 5 is preloaded by the spring 22, the force detection error at the zero point of the thrust of the linear motor 1 can be removed.

[Effect of device]

As described above, according to the present invention, since the measuring table and the linear guide, which are the supporting mechanism of the linear motor, are provided on the moving table fed by the feeding mechanism, the position and thrust can be easily adjusted even for linear motors of different sizes. In addition, it can be measured with high accuracy and is compact. Further, it is easy to control the movement of the moving table and the power source of the linear motor by the computer, and the automatic measurement can be performed.

[Brief description of drawings]

1 (a) and 1 (b) are a front view and a side view showing an embodiment of the present invention, and FIG. 2 is a front view showing another embodiment of the present invention.
The figure is a front view showing a conventional device. 1 ... Linear motor, 2 ... Fixed part, 3 ... Movable part, 5
…… Load converter, 6 …… Position detector, 7 …… Scale,
8 ... Head, 9 ... Servo motor, 10 ... Ball screw, 11 ... Moving table, 12 ... Linear guide, 13 ...
Measurement table, 21 ... Gap sensor, 24 ... Rotary encoder.

Claims (3)

[Scope of utility model registration request] 1. A moving table, which is controlled in position and speed and is movable in the same direction as the thrust direction of a linear motor, and a linear table on the same table via a linear guide so that the frictional force with the moving table becomes substantially zero. And a measurement table movable in the thrust direction of the linear motor, wherein either the movable portion or the fixed portion of the linear motor is supported on the measurement table. Test equipment. 2. The linear motor testing device according to claim 1, wherein the measurement table includes a position detector for detecting movement in the thrust direction. 3. The linear motor testing device according to claim 1, wherein the measurement table is provided with a gap sensor for detecting movement in the thrust direction.