JPH01129610U - - Google Patents

Info

Publication number
JPH01129610U
JPH01129610U JP2044388U JP2044388U JPH01129610U JP H01129610 U JPH01129610 U JP H01129610U JP 2044388 U JP2044388 U JP 2044388U JP 2044388 U JP2044388 U JP 2044388U JP H01129610 U JPH01129610 U JP H01129610U
Authority
JP
Japan
Prior art keywords
measurement surface
sensor
inspection
pressed against
traveling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2044388U
Other languages
English (en)
Other versions
JPH0547366Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988020443U priority Critical patent/JPH0547366Y2/ja
Publication of JPH01129610U publication Critical patent/JPH01129610U/ja
Application granted granted Critical
Publication of JPH0547366Y2 publication Critical patent/JPH0547366Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【図面の簡単な説明】
第１図〜第５図は本考案の一実施例を示すもの
で、第１図は検査ヘツドの走行装置への取り付け
状態を示す説明図、第２図は走行装置が傾斜した
状態の説明図、第３図は検査ヘツドの側面図、第
４図は平面図、第５図は縦断面図、第６図及び第
７図は従来の走行式検査装置の検査ヘツドの走行
装置への取り付け状態及び走行装置が傾斜した状
態の説明図である。 １……走行装置、１１……検査ヘツド、１３…
…シリンダ、１４……フレキシブルジヨイント、
２１……ヘツド本体、２２……ローラ、２３，３
１……センサ、２６，３４……バネ、２８，２９
，４１……スクレーパ、３５，４５……ブラシ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 検査ヘツドは、ヘツド本体の４隅部に設けられ
    た測定面に転接するローラと、バネにより測定面
    に押圧されるセンサと、上記測定面及びセンサに
    付着する付着物を除去するブラシ及びスクレーパ
    とを備えてなり、上記検査ヘツドは、シリンダに
    よりフレキシブルジヨイントを介して測定面に押
    圧されるように走行装置に取り付けられている走
    行式検査装置。
JP1988020443U 1988-02-18 1988-02-18 Expired - Lifetime JPH0547366Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988020443U JPH0547366Y2 (ja) 1988-02-18 1988-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988020443U JPH0547366Y2 (ja) 1988-02-18 1988-02-18

Publications (2)

Publication Number Publication Date
JPH01129610U true JPH01129610U (ja) 1989-09-04
JPH0547366Y2 JPH0547366Y2 (ja) 1993-12-14

Family

ID=31236814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988020443U Expired - Lifetime JPH0547366Y2 (ja) 1988-02-18 1988-02-18

Country Status (1)

Country Link
JP (1) JPH0547366Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011518325A (ja) * 2008-04-17 2011-06-23 エアバス オペレーションズ リミテッド スキャナ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938187U (ja) * 1982-09-03 1984-03-10 株式会社クボタ 管内面検査装置の走行装置
JPS61137059A (ja) * 1984-12-08 1986-06-24 Kawasaki Steel Corp 表面疵検査装置
JPS61119709U (ja) * 1985-01-14 1986-07-28
JPS61167508U (ja) * 1985-04-08 1986-10-17

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938187B2 (ja) * 1981-01-30 1984-09-14 日立電線株式会社 ３−５族化合物半導体単結晶の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938187U (ja) * 1982-09-03 1984-03-10 株式会社クボタ 管内面検査装置の走行装置
JPS61137059A (ja) * 1984-12-08 1986-06-24 Kawasaki Steel Corp 表面疵検査装置
JPS61119709U (ja) * 1985-01-14 1986-07-28
JPS61167508U (ja) * 1985-04-08 1986-10-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011518325A (ja) * 2008-04-17 2011-06-23 エアバス オペレーションズ リミテッド スキャナ
US9010187B2 (en) 2008-04-17 2015-04-21 Airbus Operations Limited Scanner

Also Published As

Publication number Publication date
JPH0547366Y2 (ja) 1993-12-14

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