JPH01128499A - Substrate carrier device - Google Patents

Abstract

PURPOSE:To enable a substrate positioning device to be held to be in light weight and the entire line to be executed at a time by connecting the connecting construction body of an actuator drive to the movable guide rail construction of a substrate positioning device and by shifting the movable guide rail construction with a movable beam construction. CONSTITUTION:The bottom part of a stage part 45 nearly consists of a substrate carrier belt 46 except a slight area which is closer to the entrance of an unloading bridge 7. A block 47 is fixed to the inner surface of a beam construction 40 and a movable beam construction 41 and a pin 48 protrudes from here toward a loading bridge 5. The center of axis of a pin 48 agrees with that of a pressing rod 23 which is located at the same side. The pin 48 is free to be slided for the block 47 and can be moved by the beam construction 40 and an actuator 49 which was mounted to the inner surface of the movable beam construction 41. An air cylinder is used as an actuator 49 here. With the actuator 49, the tip of the pin 48 is normally located at a position closer to the edge of the unloading bridge 7.

Description

DETAILED DESCRIPTION OF THE INVENTION B) Industrial Application Field The present invention relates to a substrate transport device used in the process of processing a substrate such as an electronic circuit board.

(b) In the conventional technology board processing process, for example, the process of mounting electronic components on an electronic circuit board, the board is fixed to a board positioning device such as an XY table, and a processing tool ( For example, the configuration is often such that it is placed opposite to a vacuum chuck for electronic/component mounting. These days, the work of mounting a board on a board positioning device or removing a board therefrom is almost automated.

A loading bridge and an unloading bridge are used in connection with this task. loading bridge,
The substrate positioning device and the unloading bridge are arranged in this order and transfer the substrates. Examples of such devices are, for example, Japanese Patent Publication Nos. 59-12565 and 62.
It can be seen in the publication No.-13837. In these examples, the three parties gather only when transferring the substrate, and at other times the loading bridge and unloading bridge widen the distance between each other to secure movement space for the substrate positioning device. In some cases, the mutual positions remain unchanged, the substrate processing work is performed at a location away from both bridges, and the substrate positioning device returns between the two bridges only when transferring the substrate.

The substrate transport device as described above is capable of adjusting the width of the transport section so that substrates of different sizes can be handled. Changing the width of the loading bridge and the width of the unloading bridge in synchronization was introduced in
Although this method is disclosed in Japanese Patent No. 7213, it is actually widely used. However, there is no appropriate means to adjust the width of the substrate positioning device in synchronization with the loading bridge and unloading bridge (if the loading bridge, unloading bridge, and substrate positioning device are all width-adjusted by electric motors, 3 Of course, synchronized adjustment by the operator is possible, but this increases the mass of the board positioning device and impedes its speedup, so this structure is rarely considered). was forced to do so.

(c) Problems to be Solved by the Invention The present invention can adjust the substrate transport width of the substrate positioning device in conjunction with the adjustment of the substrate withdrawal width of the loading bridge/unloading bridge, and also saves the purchase of the substrate positioning device. It is an object of the present invention to provide a substrate transport device with a new configuration that does not further increase the number of power supply lines to a substrate positioning device.

(d) Means for solving the problem In the present invention, low day>g bridge and unlow
The sliding bridges are installed with a constant distance between them, and both have a movable girder structure, and the substrate conveyance width is adjusted by opening and closing the movable girder structure relative to the girder structure parallel to the movable girder structure. One or both of these movable girder structures is provided with a connecting structure that is driven by an actuator. The substrate positioning device also has a movable guide rail structure to adjust the substrate transfer width, but this movable guide rail structure
A motion transmitting body connected to the connecting structure is provided. A brake mechanism is installed in the board positioning device to maintain braking of the movable guide rail structure without power supply. The brake release device of the brake mechanism is placed outside the board positioning device.

(e) When the working substrate processing work is completed, the substrate positioning device returns between the loading bridge and the unloading bridge. When the actuator is actuated here, the coupling structure is coupled to the motion transmitting body. When the movable girder structure opens and closes, the movable guide rail structure also opens and closes accordingly. At this time, the brake release device has placed the brake mechanism in a brake release state, and the 6th floor guide rail structure is in a state where it can move freely. When the movable girder structure stops moving, the movable guide rail structure also acquires a new position. Here, the brake release device stops the brake release movement, thereby fixing the movable guide rail structure at that position.

(^,) Example First, the outline of the apparatus will be explained based on FIG. In the figure, (1) is the substrate to be processed, and (3) is the substrate (1).
) is a substrate positioning device that moves the substrate to the processing position, (5) is a loading bridge that feeds the unprocessed substrate (1) to the substrate positioning device (3), and (7) is a substrate positioning device (
This is an unloading bridge that receives processed substrates from 3). The mutual distance between the loading bridge (5) and the unloading bridge (7) remains unchanged. The board processing work is done on the sides of both bridges (5) and (7), and when the work is finished, the board positioning device (3)
) (7), and the substrate (1) is transferred.

Next, the structure of the loading bridge (5) will be explained. The loading bridge (5) consists of a pair of parallel girder structures (
10) Constructed by (11). One digit structure (11
) can be opened and closed relative to the girder structure (10), that is, the distance from the girder structure (10) can be changed. The opening/closing movement is caused by an electric motor (12) schematically shown in Fig. 12 and a screw shaft (12) rotated by the electric motor (12).
3), in the following description, the girder structure (11) will be particularly referred to as the movable girder structure.

The edge of the girder structure (10) and the movable girder structure (11) facing each other is provided with a step (14) into which the side edge of the board (1) is inserted and supports the zero step part (14). Most of the bottom part is made up of the substrate conveyance belt (15) (FIG. 6), except for a small area near the exit of the loading bridge (5). The inner surfaces of the girder structure (10) and the movable girder structure (11) are provided with a substrate conveying belt (15).
) A stopper (16) is installed to prevent the board (1) carried by the board (1) from overrunning.

The stopper on the side of the girder structure (10) <16) is also movable girder structure <
The basic mechanism of the stopper (16) on the side of 11) is the same, so here, the stopper (16) on the movable girder tank ff1 (11) is
Regarding 6), its operating mechanism will be explained. Stopper (16
) itself is a plate-shaped member 1 that stands in the way of the board (1), and is fixed to the swinging end of a sheet metal lever (18). The lever (18) forms a ring of the stopper retracting mechanism (17), and is attached to the movable girder structure (11) with a shaft (19) so that it can swing in a vertical plane. (18) is given a counterclockwise rotational force in Fig. 6 by a tension fill spring (20) stretched between it and the movable girder structure (11). The rotation of the lever (18) is stopped by a bearing block 21) fixed to the inner surface, but at this time, the stopper (16) is a part of the lever (18) whose head extends slightly above the support height of the board (1). Axis (19)
A roller (22) is attached to a portion near the. (23) is a pressing rod that horizontally penetrates the bearing block (21) so as to face the roller (22).

The pressing rod (23) is pushed to the right in FIG. 6 by the compressed fill spring (24) and normally maintains the position shown in FIG. The side of the suppression rod (23) facing the roller (22> is a flat head (25) with a large area. (26) is a walking beam for feeding the substrate (1), and three The claws (27), (28), and (29) are made to protrude downward. The claw (27) is the board positioning device (3)
A device for extruding processed substrates from 1).

The claws (28) and (29) are used to pinch and feed the unprocessed substrate (1) from the front and back from the loading bridge (5) to the substrate positioning device e (3).

The unloading bridge (7) also consists of a pair of parallel girder structures (40) (41), and the girder structure (41) located on the same side as the movable girder structure (11) is also the girder structure (4).
0) can be opened and closed. Therefore, the digit structure (
41) is also called a movable girder structure.The electric motor (41) shown schematically in Fig. 12 causes the movable girder structure (41) to open and close.
42) and a screw shaft (43
). The electric motors (12) (42) have a movable girder structure (1
1) (41) are controlled by the control device (44) so that they simultaneously move in the same direction, at the same speed, and by the same distance.

A step part (45) is formed on the mutually facing edges of the girder structure (40> and the movable girder structure (41), into which the side edge of the board (1) is dropped and supported. The bottom part, except for a small area near the entrance of the unloading bridge (7), is mostly composed of the substrate conveyance belt (46) and the movable digit structure (41).
) is fixed to the inner surface of the block (47), from which a bottle (48) is fixed toward the loading bridge (5).
stands out. The axis of the bottle (48) coincides with the axis of the suppression rod (23) on the same side.

The bin (48) is slidable relative to the block (47) and is given movement by an actuator (49) (FIG. 13) attached to the inner surface of the spar structure (40) and the movable spar structure (41). As an actuator <49),
An air cylinder is used here. The actuator (49) normally places the tip of the bottle (48) in a position that is in close contact with the end of the unloading bridge (7).

The structure of the substrate positioning device (3) is as follows. The base (50) is a so-called XY table, with 2
Dimensional movement is possible. A frame (51) is installed on top of this, and on the top of the frame (51), a pair of guide rail structures (52) are arranged in line with the girder structures of the loading bridge (5) and the unloading bridge (7).
(53) is installed. The guide rail structure (53) can be opened and closed relative to the guide rail structure (52), and will be referred to as a movable guide rail structure. The rail plate (54) of the guide rail structure (52) and the rail plate (55) of the movable guide rail structure (53) have opposing steps (
56) are formed here to support the side edges of the substrate (1). As shown in Figure 2, the rail plate (5
4) is provided with a hollow 11-1 (57), in which a bell crank-shaped lever (58) is pivotally supported by a shaft (59) so as to be rotatable within a horizontal plane. Lever (58)
When the board (1) reaches the board positioning device f(3), which is pushed by the compression coil spring (60) and has one end slightly protruding into the step (56), the lever (58) moves the board (1) )
The movement of the lever <58) at this time when it is pushed and retracted into the cavity (57) is detected by a sensor (not shown, for example, a limit switch, a phototube), and a signal indicating the arrival of the substrate is obtained. Regarding the rail plate (55), the stepped part (56)
A large number of rollers (61) are arranged at the location. The rollers (61) are arranged in a line to guide the edge of the substrate (1), and each roller (61) is supported by one slide block (62) and can move forward and backward independently of each other. As shown in FIG. 4, each slide block (62) can move forward and backward a certain distance, and is supported by a compression coil spring (63).
The roller (61) has been pushed out to the maximum position.

The movable guide rail structure (53) will be described in more detail. The rail plate (55) has a pair of left and right slide blocks (
70). Therefore, hereinafter, the rail plate (55) will be referred to as a movable rail plate. Slide block (7
0) is a rail fixed to the top surface of the frame (51) <71
) so that only linear movement is possible. The rail (71) and the upper horizontal beam (72) of the frame (51) that supports it extend in a direction perpendicular to the rail board 55). (75) is a slide base supported in a suspended state by the upper horizontal beam (72). The slide base (75) has a pair of side plates (
76), between the pair of side plates (76), two blocks (77) (78) are fixed as shown in FIG. 4, and two rollers (79) are fixed. Support, block (
77) and (78) are placed on the rails (71) to support their weight, and the rollers (79) are brought into contact with the lower surface of the upper horizontal beam (72) to stop their upward movement.

The blocks (77) and (78) are widely spaced, and the slide block (70) is located here. The slide pro 7 block 70) and the slide base (75) are connected by a rod (80) protruding from the slide block (70). That is, the rod (80) is connected to the block (7
8), and a retaining nut (81) is fixed to the tip thereof. There is a rod (8) between the slide block (70) and the block (78).
A compression coil spring (82) is inserted to surround the slide plate (70) and the movable rail plate (55).
54).

(85) is a transmission rod passing through the left and right slide bases (75). The transmission rod (85) is located in a straight line with the suppression rod (23) and pin (48) when the loading bridge (5), substrate positioning device (3), and unloading bridge (7) are aligned. The transmission rod (85) has the same diameter as the pressing rod (23) and the pin (48).The length of the transmission rod (85) is equal to the distance between the outer surfaces of the left and right slide bases (75).

The transmission rod (85) has a stopper (86) provided in the middle.
The unloading bridge (75) is moved by the force of the compression fill spring (87) until it hits the slide base (75) located on the unloading bridge (7) side.
By pushing to the side, the state in which the entire body is immersed in the substrate positioning device (3) is maintained at all times.

A similar transmission rod is also provided on the side of the guide rail structure (52). A wedge-shaped cam (88) is fixed to the transmission rod (85) on the side of the movable guide rail structure (53). This cam (88) is connected to a roller (89) attached to the center of the movable rail plate (55) (Fig. 5,
0 and 11), when the transmission rod (85) moves toward the loading bridge (5), it pushes the roller (89) and moves the movable rail plate (55).
) and slide block (70〉) with a compression coil spring (
82) in a direction away from the rail plate (54).

The movable guide rail structure (53) is a brake mechanism (95)
has. The brake mechanism (95) is a slide base (7
5) is used to stop the movement of slide block 7.
The rod (9) is supported vertically freely on the bearing part (96) of (5).
7) is the main body, and a brake pad (98) and a flange (99) are fixed to the upper and lower ends of a rod (97), which are urged upward by a compression fill spring (100). The brake pad (98) presses against the lower surface of the upper horizontal beam (72), thereby fixing the slide base (75) in that position. The brake mechanism (95) is provided on both the slide base (75) on the loading bridge (5) side and the slide base (75) on the unloading bridge (7) side.

Brake release devices t (105) (106) are installed on the movable girder structures (11) (41>) of the loading bridge (5) and unloading bridge (7). It also consists of an air cylinder (110) supported with the rod (11) facing downward, and a suppression plate (112) fixed to the tip of the rod (111). (113) is the installation of the air cylinder (110). A guide rod that hangs down from a location passes through a through hole (114) in the press plate (112) and prevents the press plate (112) from rotating.

(120) is an elevator that supports the substrate (1) sent into the substrate positioning device (3) from below. The elevator (120) is raised by an air cylinder (121) to a position where it supports the substrate (1). In addition, the board positioning device it<3> is
As in Publication No. 7, the rail plate and movable rail plate (
Positioning claws that clamp the substrate (1) from a direction perpendicular to 54>(55) can be installed, but are not shown here.

The device of the present invention operates as follows. Board positioning device (
3) While the upper substrate (1) is being processed, the unprocessed substrate (1) is carried by the substrate conveyor belt (15) to the loading bridge (5) and is stopped by the stopper (16).
) is waiting. After the substrate processing is completed, the substrate positioning device (3) returns to between the loading bridge (5) and the unloading bridge (7) as shown in FIG. When the substrate positioning device (3) is aligned with the loading bridge (5) and the unloading bridge (7) and becomes stationary, the actuator (49) operates,
The pin (48) is made to protrude towards the substrate positioning device (3). As shown in FIG. 7, the protruding pin (48) enters the slide base (75) and compresses the fill spring (
The pushed transmission rod (85) pushes the transmission rod (85) against the elastic force of the substrate positioning device (3) in FIG. 7 and FIG. ), the pressing rod (23) pushes the roller (22) of the lever (18), and the lever (18) moves clockwise in Fig. 7 against the tension of the tension fill spring (20). The stopper (16
) leaves the waiting board (1). At the same time, the cam (88) pushes the roller (89) of the movable rail plate (55) and releases the clamping of the board (1) by the rail plate and the movable rail plates (54) and (55). Of course, at this time, the positioning claws (not shown) that clamp the board (1) from the direction perpendicular to the rail plate and movable rail plates (54) and (55), and the elevator (105) are also completely separated from the board (1). . Here, the walking beam (26) moves and pushes the processed substrate (1) from the substrate positioning device fl (3) to the unloading bridge (7), and also pushes the unprocessed substrate (1) from the loading bridge (5) to the substrate. Positioning equipment! During the operation of the walking beam (26), which is transferred to step 1(3), the substrate conveyance belt (15)<46) is stationary. After the board (1) has been transferred, the actuator (49) returns to its original state and retracts the pin (48), the transmission rod (85) returns to its previous position and the movable rail [(55) The force of the compression coil spring (82) causes the roller (
61) and press the board (1) against the rail plate (54). In the loading bridge (5), the stopper (16) is restored to its old position, and the substrate conveyance belt (15) carries the substrate (1) toward this stopper (16). At the unloading bridge (7), as soon as the oaking beam (26) finishes transferring the processed substrate (1), the substrate withdrawal belt (46) starts to operate and carries away the processed substrate (1).

The width adjustment of the substrate transfer section is performed with the loading bridge (5), substrate positioning device (3), and unloading bridge (7) lined up in a straight line as shown in Fig. 12. A connecting structure extends from the girder structure (41) and connects to the motion transmitting body of the movable guide rail structure (53). In this case, the pin (48) is the connecting structure,
The slide base 75) that receives this is the motion transmitter. The transmission rod (85) pushed out by the pin (48) enters the bearing block (21), and the connection between the movable girder structure (11) and the movable guide rail structure (53) also occurs here. In this way, the movable girder structure (4
1> After connecting (11) and the movable guide rail structure 53), the brake release devices (105) and (106) are activated. Loading bridge 5), board positioning device (
3) When the unloading bridge (7) is close to each other, the press plate (112) of the brake release device (105) (106) is pressed against the flange (99) of the brake mechanism (95).
overlaps above. When the air cylinder (110) is operated, the brake pad (98) is separated from the upper horizontal beam (72〉) as shown in Fig. 7, and the movable guide rail structure (
53) becomes movable. In this state, the electric motor (12
) (42) to change the positions of the movable girder structures (11) (41) and the movable guide rail structure (53). After the 0 position change is completed, the operation of the brake release devices (105) (106) is terminated. Then, the press plate (112) is pulled up, the movable guide rail structure (53) is braked again by the brake mechanism (95), and processing of the substrate (1) with a width corresponding to the new transport width is started.

In addition, in the example, the brake mechanism (95) was supported by the movable guide rail structure (53), but if the positions were changed,
The frame (51) supports the brake mechanism (95),
Brake pads (98) are attached to the movable guide rail structure (53).
) may be pressed against the brake release device f (105) (106).
).

(G) Effects of the Invention In the present invention, in adjusting the substrate transport width, an actuator-driven connecting structure provided on one or both of the loading bridge side movable girder structure or the unloading bridge side movable girder structure is used as a substrate positioning device. Since the movable guide rail structure is connected to the movable guide rail structure and the movable guide rail structure is moved using the movable girder structure, the board positioning device is simply provided with a brake mechanism to prevent the movable guide rail structure from moving inadvertently. It gets better,
While keeping the substrate positioning device lightweight, it is now possible to adjust the width of the substrate transport section for the entire line at once. In addition, the brake mechanism is of a type that maintains braking without power supply, and the brake is released by a brake release device outside the board positioning device, so a power supply line for the brake mechanism is added to the board positioning device, which has a large amount of movement. This increases the reliability of the device.

The figures show one embodiment of the present invention, in which Fig. 1 is a perspective view showing the schematic configuration of the device, Fig. 2 is a partially cutaway top view of the substrate positioning device, and Fig. 3 is a partial perspective view of the substrate positioning device. 4 is a partial vertical sectional view of the board positioning device, FIG. 5 is a partial vertical sectional view of the movable rail plate, and FIGS. 6 and 7 are partial vertical sectional views of the device of the present invention in different operating states. Figure 8 is a partial horizontal sectional view of the loading bridge, Figure 9 is a partial perspective view of the loading bridge, and Figures 10 and 11 are top views for explaining the board transfer operation. Figure 12 is a top view for explaining the operation of changing the board withdrawal width, Figure 13 is a partially sectional partial front view showing the actuator installation situation, and Figure 14 is a 9th
It is a partial perspective view of the loading bridge seen from the direction different from the figure.

(1)... Board, (3)... Board positioning device, (
5)... Loading bridge, (7)... Unloading bridge, (10) (40>... Girder structure,
(11) (41>...Movable girder structure, (48)...Bin constituting the connecting structure, (49)...Actuator, (51)...Frame, (52)...Guide Rail structure, (53)...Movable guide rail structure, (7
5) ...Slide base constituting the motion transmitting body, (9
5) Brake mechanism, (105) (106)...
Brake release device.

Figure 2 Figure 3 Figure 4 mlO Figure Moth diagram Figure B Procedure amendment (method) 1. Display of the case 1986 Patent Application No. 286219 Z Name of the invention Substrate transport device 3, Person making the amendment Relationship to the case Name of the patent applicant (188) Sanyo Electric Co., Ltd. 4, Agent Address Keihan Hondori, Moriguchi City 2-18 (1 other person) Contact: Telephone (Tokyo) 835-1111 Stationed at Patent Center Nakashu 5, Date of amendment order (@Sendichi) February 23, 1988, 2-Chome-6, A column for a brief explanation of the drawings in the specification subject to amendment.

7. Contents of correction Page 21, line 18 of the specification is amended as follows.

Record

[Brief explanation of the drawing]

Claims (1)

[Claims] 1) A substrate positioning device that supports and moves the substrate to a desired position for substrate processing, a loading bridge that feeds unprocessed substrates to this substrate positioning device, and a processed substrate that is transferred from the substrate positioning device to the substrate positioning device. and an unloading bridge that receives the loading bridge and the unloading bridge, the loading bridge and the unloading bridge are installed so that the distance between them remains unchanged, and the board positioning device enters between the two bridges when transferring the board, wherein the loading bridge and the unloading bridge Each bridge is constituted by a pair of parallel girder structures, and among these girder structures, the one located on one side of the substrate transfer line is movable to open and close relative to the girder structure parallel to this, and such movable girder structure A connecting structure driven by an actuator is provided on the loading bridge side, the unloading bridge side, or both, and in the substrate positioning device, a pair of guides that support the substrate are provided. One of the rail structures is attached to the device frame so as to be able to open and close with respect to the other, and the movable guide rail structure includes a motion transmitting body that is connected to the connecting structure and transmits the opening and closing motion of the movable girder structure. A substrate transport device comprising: a brake mechanism for maintaining braking of a movable guide rail structure without power supply; a brake mechanism installed in a substrate positioning device; and a brake release device for the brake mechanism installed outside the substrate positioning device.