JPH01128155U - - Google Patents
Info
- Publication number
- JPH01128155U JPH01128155U JP2478488U JP2478488U JPH01128155U JP H01128155 U JPH01128155 U JP H01128155U JP 2478488 U JP2478488 U JP 2478488U JP 2478488 U JP2478488 U JP 2478488U JP H01128155 U JPH01128155 U JP H01128155U
- Authority
- JP
- Japan
- Prior art keywords
- light
- pellet
- amount
- light amount
- receiving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Description
第１図は本考案の実施例１を示す構成図、第２
図は主要部側面拡大図、第３図は本考案の実施例
２を示す主要部平面拡大図である。
１……ペレツト、２……基板、３……ワークス
トツカ、４……搬送機構、５……位置決め機構、
６……投光装置、７……受光装置、８……入射光
、９……反射光、１０……光量測定器。
Figure 1 is a configuration diagram showing the first embodiment of the present invention;
The figure is an enlarged side view of the main part, and FIG. 3 is an enlarged plan view of the main part showing Embodiment 2 of the present invention. 1...Pellet, 2...Substrate, 3...Work stocker, 4...Transport mechanism, 5...Positioning mechanism,
6... Light projecting device, 7... Light receiving device, 8... Incident light, 9... Reflected light, 10... Light amount measuring device.
Claims (1)
にて反射した光を受光する受光装置と、該受光装
置にて受光した光量を基準光量と比較しその光量
の変化量によりペレツトの姿勢を検査する光量測
定器とを有することを特徴とするペレツト検出装
置。 A light projecting device that irradiates light onto the pellet, a light receiving device that receives the light reflected by the pellet, and a light amount received by the light receiving device is compared with a reference light amount, and the posture of the pellet is inspected based on the amount of change in the light amount. 1. A pellet detection device comprising: a light amount measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2478488U JPH01128155U (en) | 1988-02-26 | 1988-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2478488U JPH01128155U (en) | 1988-02-26 | 1988-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01128155U true JPH01128155U (en) | 1989-09-01 |
Family
ID=31244941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2478488U Pending JPH01128155U (en) | 1988-02-26 | 1988-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01128155U (en) |
-
1988
- 1988-02-26 JP JP2478488U patent/JPH01128155U/ja active Pending