JPH0167554U - - Google Patents
Info
- Publication number
- JPH0167554U JPH0167554U JP1987163206U JP16320687U JPH0167554U JP H0167554 U JPH0167554 U JP H0167554U JP 1987163206 U JP1987163206 U JP 1987163206U JP 16320687 U JP16320687 U JP 16320687U JP H0167554 U JPH0167554 U JP H0167554U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- detector
- line
- output
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案実施例の平面図、並びに装置の
構成を示した図、第２図は第１図のＡ―Ａ断面拡
大図である。
なお、図において、１はゴニオメータ、２は試
料装着台、３は試料、４は光線およびＸ線の通過
孔、５は光源、１１はＸ線源である。
FIG. 1 is a plan view of an embodiment of the present invention and a diagram showing the configuration of the device, and FIG. 2 is an enlarged cross-sectional view taken along line AA in FIG. 1. In the figure, 1 is a goniometer, 2 is a sample mounting table, 3 is a sample, 4 is a hole through which light beams and X-rays pass, 5 is a light source, and 11 is an X-ray source.
Claims (1)
うに取り付ける試料装着台を具備した線回折ゴ
ニオメータと、上記ゴニオメータの回折角に対応
した信号を送出する回転角検出器と、前記ゴニオ
メータに取り付けられて前記試料の表面に細い光
線を投射する光源並びに試料表面による反射光線
の位置検出器と、前記試料の表面に線ビームを
入射させる線源と、上記試料の表面で回折した
線の検出器と、上記検出器が出力を送出した状
態における前記回転角検出器の出力に前記位置検
出器の出力と対応した補正を加える演算回路とよ
りなる結晶方位角測定装置。 a line diffraction goniometer equipped with a sample mounting stage for mounting a sample so that at least a portion of its surface is in close contact; a rotation angle detector that transmits a signal corresponding to the diffraction angle of the goniometer; a light source that projects a narrow beam of light onto the surface of the sample; a position detector for the reflected beam of light by the sample surface; a line source that makes the line beam incident on the surface of the sample; a detector for the line that is diffracted on the surface of the sample; A crystal azimuth measurement device comprising: an arithmetic circuit that applies a correction corresponding to the output of the position detector to the output of the rotation angle detector in a state in which the detector sends out an output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163206U JPH0723733Y2 (en) | 1987-10-27 | 1987-10-27 | Crystal azimuth measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163206U JPH0723733Y2 (en) | 1987-10-27 | 1987-10-27 | Crystal azimuth measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0167554U true JPH0167554U (en) | 1989-05-01 |
| JPH0723733Y2 JPH0723733Y2 (en) | 1995-05-31 |
Family
ID=31447723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987163206U Expired - Lifetime JPH0723733Y2 (en) | 1987-10-27 | 1987-10-27 | Crystal azimuth measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0723733Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006177842A (en) * | 2004-12-24 | 2006-07-06 | Pioneer Electronic Corp | Cut face inspection device and cut face inspection method |
-
1987
- 1987-10-27 JP JP1987163206U patent/JPH0723733Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006177842A (en) * | 2004-12-24 | 2006-07-06 | Pioneer Electronic Corp | Cut face inspection device and cut face inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0723733Y2 (en) | 1995-05-31 |
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