JPH0216011U - - Google Patents
Info
- Publication number
- JPH0216011U JPH0216011U JP9458888U JP9458888U JPH0216011U JP H0216011 U JPH0216011 U JP H0216011U JP 9458888 U JP9458888 U JP 9458888U JP 9458888 U JP9458888 U JP 9458888U JP H0216011 U JPH0216011 U JP H0216011U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- brightness
- optical system
- signal detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001427 coherent effect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000003746 surface roughness Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案表面粗さ測定装置の一実施例を
示す模式図、第２図は同上装置の作用原理の説明
図、第３図は同上装置の効果を示す具体例におけ
る測定結果の線図である。第４図は従来の表面粗
さ測定装置を示す模式図、第５図は同上装置によ
るスペツクルコントラストＣと表面粗さとの定性
的関係を示す線図である。
１……発光源、２……コヒーレント光ビーム、
３……逆望遠鏡型光学系、４……照射光ビーム、
５……集光レンズ、６……被測定物、７……反射
光、８……明暗信号検出器、９……演算処理器、
１０ａ，１０ｂ，１０ｃ……駆動系。
Fig. 1 is a schematic diagram showing an embodiment of the surface roughness measuring device of the present invention, Fig. 2 is an explanatory diagram of the working principle of the same device, and Fig. 3 is a line of measurement results in a specific example showing the effect of the above device. It is a diagram. FIG. 4 is a schematic diagram showing a conventional surface roughness measuring device, and FIG. 5 is a diagram showing the qualitative relationship between speckle contrast C and surface roughness using the same device. 1... Light emitting source, 2... Coherent light beam,
3... Inverted telescope type optical system, 4... Irradiation light beam,
5...Condenser lens, 6...Measurement object, 7...Reflected light, 8...Bright/dark signal detector, 9...Arithmetic processor,
10a, 10b, 10c... Drive system.
Claims (1)
から出力されたコヒーレント光を被測定表面に集
光照射し集光レンズの焦点近傍にフラウンホーフ
ア回折像を作る光学系と、上記コヒーレント光に
よつて照射された上記被測定表面からの反射光に
生ずるスペツクルパターンの明暗信号を検出する
明暗信号検出器と、同明暗信号検出器の測定値か
らスペツクルパターンのコントラストを算出する
演算器とからなる測定装置において、上記被測定
表面へのコヒーレント照射光入射角及び上記反射
光の上記被測定表面からの反射角を適宜大きさに
変えるべく、上記発光源及び光学系と、上記明暗
信号検出器と、上記被測定表面とのうち少なくと
も二つの向きを変える駆動手段を設けたことを特
徴とする表面粗さ測定装置。 a light emitting source that outputs coherent light; an optical system that collects and irradiates the surface to be measured with the coherent light output from the light source and creates a Fraunhofer diffraction image near the focal point of the condensing lens; A measurement system comprising a brightness signal detector that detects the brightness and darkness signals of the speckle pattern generated in the reflected light from the surface to be measured, and a calculation unit that calculates the contrast of the speckle pattern from the measured values of the brightness and darkness signal detector. In the apparatus, the light emitting source and optical system, the brightness signal detector, and the light emitting source and the optical system, in order to appropriately change the angle of incidence of the coherent irradiation light on the surface to be measured and the angle of reflection of the reflected light from the surface to be measured; A surface roughness measuring device characterized in that a driving means for changing the direction of at least two of the surfaces to be measured is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9458888U JPH0216011U (en) | 1988-07-19 | 1988-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9458888U JPH0216011U (en) | 1988-07-19 | 1988-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0216011U true JPH0216011U (en) | 1990-02-01 |
Family
ID=31319140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9458888U Pending JPH0216011U (en) | 1988-07-19 | 1988-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0216011U (en) |
-
1988
- 1988-07-19 JP JP9458888U patent/JPH0216011U/ja active Pending
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