JPS6384507U

JPS6384507U -

Info

Publication number: JPS6384507U
Application number: JP17919086U
Authority: JP
Priority date: 1986-11-21
Filing date: 1986-11-21
Publication date: 1988-06-02

Description

[Brief explanation of drawings]

第１図、第２図及び第３図はこの考案のそれぞ
れ第１、第２及び第３の実施例の要部の構成を示
す原理図、第４図は従来提案されている表面三次
元形状測定装置の側面図、第５図は第４図の測定
装置の測定原理の説明に供するための原理図、第
６図は第４図の測定装置で使用される電子回路部
のブロツク図、第７図は第６図の要部の動作波形
図、第８図は第４図の測定装置において検出器の
光軸上の所要な被写界深度の説明に供するための
原理図、第９図は第４図の測定装置で測定したと
き、被測定点からの反射光が被測定体の一部で遮
られて検出できない場合の説明に供するための原
理図である。 Figures 1, 2, and 3 are principle diagrams showing the configuration of the main parts of the first, second, and third embodiments of this invention, respectively, and Figure 4 is a three-dimensional surface shape that has been proposed in the past. 5 is a principle diagram for explaining the measurement principle of the measuring device shown in FIG. 4, and FIG. 6 is a block diagram of the electronic circuit used in the measuring device shown in FIG. 4. Figure 7 is an operational waveform diagram of the main part of Figure 6, Figure 8 is a principle diagram for explaining the required depth of field on the optical axis of the detector in the measuring device of Figure 4, and Figure 9. 4 is a principle diagram for explaining a case where reflected light from a point to be measured cannot be detected because it is blocked by a part of the object to be measured when measuring with the measuring device shown in FIG. 4. FIG.

Claims

[Claims for Utility Model Registration] A light emitting source that irradiates light waves toward a plurality of positions on the reference axis of an object to be measured, which is positioned with the reference axis as the axis, is a rotating surface with the reference axis as the axis. the object to be measured and the light emitting source are mounted so as to be relatively rotatable around the reference axis, and the light emitting source rotates in response to the irradiation of light waves to the plurality of positions. located on a line substantially parallel to the reference axis on the surface, the reflected light from the irradiation position of the object to be measured is received and detected by a detector, and based on the detection output of this detector, from the reference axis to the A three-dimensional surface shape measuring device, wherein a distance to an irradiation position on a surface of a measured object is measured, and an optical axis of the light emitting source is oblique to the reference axis.