JPH01127929A - 振動形差圧センサ - Google Patents

振動形差圧センサ

Info

Publication number
JPH01127929A
JPH01127929A JP28627487A JP28627487A JPH01127929A JP H01127929 A JPH01127929 A JP H01127929A JP 28627487 A JP28627487 A JP 28627487A JP 28627487 A JP28627487 A JP 28627487A JP H01127929 A JPH01127929 A JP H01127929A
Authority
JP
Japan
Prior art keywords
pressure
differential pressure
vibrating
substrate
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28627487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519090B2 (enrdf_load_html_response
Inventor
Kinji Harada
原田　謹爾
Kyoichi Ikeda
恭一 池田
Hideki Kuwayama
桑山　秀樹
Takashi Kobayashi
隆 小林
Tetsuya Watanabe
哲也 渡辺
Sunao Nishikawa
直 西川
Takashi Yoshida
隆司 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP28627487A priority Critical patent/JPH01127929A/ja
Publication of JPH01127929A publication Critical patent/JPH01127929A/ja
Publication of JPH0519090B2 publication Critical patent/JPH0519090B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP28627487A 1987-11-12 1987-11-12 振動形差圧センサ Granted JPH01127929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28627487A JPH01127929A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28627487A JPH01127929A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01127929A true JPH01127929A (ja) 1989-05-19
JPH0519090B2 JPH0519090B2 (enrdf_load_html_response) 1993-03-15

Family

ID=17702243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28627487A Granted JPH01127929A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH01127929A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085115A (ja) * 2007-10-01 2009-04-23 Mazda Motor Corp ロータリピストンエンジンの燃料噴射装置
DE102017010600A1 (de) 2016-11-21 2018-05-24 Yokogawa Electric Corporation Resonanzwandler

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085115A (ja) * 2007-10-01 2009-04-23 Mazda Motor Corp ロータリピストンエンジンの燃料噴射装置
DE102017010600A1 (de) 2016-11-21 2018-05-24 Yokogawa Electric Corporation Resonanzwandler
JP2018084441A (ja) * 2016-11-21 2018-05-31 横河電機株式会社 振動式トランスデューサ
US11211916B2 (en) 2016-11-21 2021-12-28 Yokogawa Electric Corporation Resonant transducer

Also Published As

Publication number Publication date
JPH0519090B2 (enrdf_load_html_response) 1993-03-15

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