JPH0519090B2 - - Google Patents

Info

Publication number
JPH0519090B2
JPH0519090B2 JP28627487A JP28627487A JPH0519090B2 JP H0519090 B2 JPH0519090 B2 JP H0519090B2 JP 28627487 A JP28627487 A JP 28627487A JP 28627487 A JP28627487 A JP 28627487A JP H0519090 B2 JPH0519090 B2 JP H0519090B2
Authority
JP
Japan
Prior art keywords
vibrating
pressure
differential pressure
substrate
epitaxial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28627487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01127929A (ja
Inventor
Kinji Harada
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Sunao Nishikawa
Takashi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP28627487A priority Critical patent/JPH01127929A/ja
Publication of JPH01127929A publication Critical patent/JPH01127929A/ja
Publication of JPH0519090B2 publication Critical patent/JPH0519090B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP28627487A 1987-11-12 1987-11-12 振動形差圧センサ Granted JPH01127929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28627487A JPH01127929A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28627487A JPH01127929A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01127929A JPH01127929A (ja) 1989-05-19
JPH0519090B2 true JPH0519090B2 (enrdf_load_html_response) 1993-03-15

Family

ID=17702243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28627487A Granted JPH01127929A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH01127929A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4862797B2 (ja) * 2007-10-01 2012-01-25 マツダ株式会社 ロータリピストンエンジンの燃料噴射装置
JP6465097B2 (ja) 2016-11-21 2019-02-06 横河電機株式会社 振動式トランスデューサ

Also Published As

Publication number Publication date
JPH01127929A (ja) 1989-05-19

Similar Documents

Publication Publication Date Title
US11226251B2 (en) Method of making a dual-cavity pressure sensor die
US5188983A (en) Polysilicon resonating beam transducers and method of producing the same
EP0451992B1 (en) Detection of vibrations of a microbeam through a shell
EP0400939B1 (en) Semiconductor sensor with vibrating element
US5473944A (en) Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture
US11255740B2 (en) Pressure gauge chip and manufacturing process thereof
JPH07104217B2 (ja) 振動式トランスデューサとその製造方法
JPH0519090B2 (enrdf_load_html_response)
JPH0519091B2 (enrdf_load_html_response)
US20060010981A1 (en) Vibration type pressure sensor
JPH0778460B2 (ja) 振動形差圧センサ
JPH0557532B2 (enrdf_load_html_response)
JPH0468575B2 (enrdf_load_html_response)
JPH0468576B2 (enrdf_load_html_response)
JPS60186725A (ja) 圧力センサ
JPH0468574B2 (enrdf_load_html_response)
JPH0519088B2 (enrdf_load_html_response)
JPH04304679A (ja) 圧力センサ
JPH01297521A (ja) 振動形トランスデューサの製造方法
JP2007170843A (ja) 振動式トランスデューサおよびその製造方法
JPH0810169B2 (ja) 振動形差圧センサ
JP2822596B2 (ja) 振動形トランスデュサ
JPH0519089B2 (enrdf_load_html_response)
JP5849663B2 (ja) 振動式トランスデューサの製造方法
JP2007078406A (ja) 振動式圧力センサ及び振動式圧力センサの製造方法