JPH0519091B2 - - Google Patents

Info

Publication number
JPH0519091B2
JPH0519091B2 JP28627587A JP28627587A JPH0519091B2 JP H0519091 B2 JPH0519091 B2 JP H0519091B2 JP 28627587 A JP28627587 A JP 28627587A JP 28627587 A JP28627587 A JP 28627587A JP H0519091 B2 JPH0519091 B2 JP H0519091B2
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
vibrating
differential pressure
epitaxial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP28627587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01127930A (ja
Inventor
Kinji Harada
Kyoichi Ikeda
Hideki Kuwayama
Takashi Kobayashi
Tetsuya Watanabe
Sunao Nishikawa
Takashi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP28627587A priority Critical patent/JPH01127930A/ja
Publication of JPH01127930A publication Critical patent/JPH01127930A/ja
Publication of JPH0519091B2 publication Critical patent/JPH0519091B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP28627587A 1987-11-12 1987-11-12 振動形差圧センサ Granted JPH01127930A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28627587A JPH01127930A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28627587A JPH01127930A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01127930A JPH01127930A (ja) 1989-05-19
JPH0519091B2 true JPH0519091B2 (enrdf_load_html_response) 1993-03-15

Family

ID=17702258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28627587A Granted JPH01127930A (ja) 1987-11-12 1987-11-12 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH01127930A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431728A (ja) * 1990-05-28 1992-02-03 Yokogawa Electric Corp 半導体圧力計
JP5880499B2 (ja) * 2013-08-19 2016-03-09 横河電機株式会社 振動式圧力センサ及びその製造方法

Also Published As

Publication number Publication date
JPH01127930A (ja) 1989-05-19

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees