JPH01127244U - - Google Patents
Info
- Publication number
- JPH01127244U JPH01127244U JP2261888U JP2261888U JPH01127244U JP H01127244 U JPH01127244 U JP H01127244U JP 2261888 U JP2261888 U JP 2261888U JP 2261888 U JP2261888 U JP 2261888U JP H01127244 U JPH01127244 U JP H01127244U
- Authority
- JP
- Japan
- Prior art keywords
- shelves
- view
- cassette
- shelf
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の第１実施例構成を示すウエー
ハカセツト要部斜視図、第２図は第１図に示す棚
の平面図、第３図は本考案の第２実施例構成を示
す棚の歯部の斜視図、第４図は本考案の第３実施
例構成を示す棚の平面図、第５図は本考案の第４
実施例構成を示す棚の一部斜視図、第６図は従来
例構成を示すウエーハカセツトの斜視図である。
図中、１０はフレーム、１２，２２，４２，５
２は棚、１４はウエーハ、１５は前面フランジ、
１６は天板、２２ａは切欠、２２ｂ，３２ｂは歯
部、４２ａ，５２ａは孔。
FIG. 1 is a perspective view of the main parts of a wafer cassette showing the configuration of a first embodiment of the present invention, FIG. 2 is a plan view of the shelf shown in FIG. 1, and FIG. 3 is a shelf showing the configuration of a second embodiment of the present invention. 4 is a plan view of the shelf showing the configuration of the third embodiment of the present invention, and FIG. 5 is a perspective view of the tooth portion of the present invention.
FIG. 6 is a partial perspective view of a shelf showing the structure of an embodiment, and FIG. 6 is a perspective view of a wafer cassette showing a conventional structure. In the figure, 10 is a frame, 12, 22, 42, 5
2 is a shelf, 14 is a wafer, 15 is a front flange,
16 is a top plate, 22a is a notch, 22b, 32b are teeth, and 42a, 52a are holes.
Claims (1)
ム１０に複数段形成されたウエーハカセツトにお
いて、 該棚２２に複数の孔４２ａまたは切欠２２ａを
設けたことを特徴とするウエーハカセツト。[Claims for Utility Model Registration] A wafer cassette in which a plurality of shelves 22 for holding the periphery of wafers 14 are formed in a frame 10, characterized in that the shelves 22 are provided with a plurality of holes 42a or notches 22a. Cassette.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022618U JPH0617301Y2 (en) | 1988-02-23 | 1988-02-23 | Waha cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988022618U JPH0617301Y2 (en) | 1988-02-23 | 1988-02-23 | Waha cassette |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01127244U true JPH01127244U (en) | 1989-08-31 |
| JPH0617301Y2 JPH0617301Y2 (en) | 1994-05-02 |
Family
ID=31240891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988022618U Expired - Lifetime JPH0617301Y2 (en) | 1988-02-23 | 1988-02-23 | Waha cassette |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617301Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6133968A (en) * | 1984-07-11 | 1986-02-18 | 株式会社日立製作所 | Transport tool |
| JPS6167242A (en) * | 1984-09-10 | 1986-04-07 | Mitsubishi Electric Corp | Wafer accommodating jig |
-
1988
- 1988-02-23 JP JP1988022618U patent/JPH0617301Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6133968A (en) * | 1984-07-11 | 1986-02-18 | 株式会社日立製作所 | Transport tool |
| JPS6167242A (en) * | 1984-09-10 | 1986-04-07 | Mitsubishi Electric Corp | Wafer accommodating jig |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617301Y2 (en) | 1994-05-02 |