JPH0451139U - - Google Patents
Info
- Publication number
- JPH0451139U JPH0451139U JP9265490U JP9265490U JPH0451139U JP H0451139 U JPH0451139 U JP H0451139U JP 9265490 U JP9265490 U JP 9265490U JP 9265490 U JP9265490 U JP 9265490U JP H0451139 U JPH0451139 U JP H0451139U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- opening
- wafer carrier
- groove
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図〜第３図は本考案の一実施例を示す図で
あつて、第１図はガイドアダプターの斜視図、第
２図はガイドアダプターの平面図、第３図はキヤ
リアにガイドアダプターを取り付けた状態を示す
側面図である。また、第４図はウエハーキヤリア
を示す斜視図である。
１……ウエハーキヤリア、２……溝、１０……
ガイドアダプター、１６，１７……ガイド溝。
Figures 1 to 3 are views showing one embodiment of the present invention, in which Figure 1 is a perspective view of the guide adapter, Figure 2 is a plan view of the guide adapter, and Figure 3 is a diagram showing how the guide adapter is attached to the carrier. FIG. 3 is a side view showing the attached state. Moreover, FIG. 4 is a perspective view showing the wafer carrier. 1...Wafer carrier, 2...Groove, 10...
Guide adapter, 16, 17...Guide groove.
Claims (1)
平行な溝が開口部に向かつて形成されて該溝にウ
エハーの両端を嵌め込むことにより複数のウエハ
ーを前記内側面間に並べて収納するようにしたウ
エハーキヤリアに取り付けられるガイドアダプタ
ーであつて、 ウエハーが出し入れされる前記開口部の周縁に
取付られた状態で前記溝に連続し前記溝を前記開
口部外方に延長するガイド溝が形成されたことを
特徴とするウエハーキヤリアのガイドアダプター
。[Claims for Utility Model Registration] A plurality of parallel grooves are formed on these inner surfaces facing toward the opening, and the plurality of wafers are inserted into the grooves by fitting the ends of the wafers into the grooves. A guide adapter that is attached to a wafer carrier arranged to be housed between inner surfaces thereof, the guide adapter being attached to the periphery of the opening through which wafers are taken in and taken out, continuous with the groove, and extending the groove outward from the opening. A guide adapter for a wafer carrier, characterized in that a guide groove is formed that extends into the wafer carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265490U JPH0451139U (en) | 1990-09-03 | 1990-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265490U JPH0451139U (en) | 1990-09-03 | 1990-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451139U true JPH0451139U (en) | 1992-04-30 |
Family
ID=31829292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9265490U Pending JPH0451139U (en) | 1990-09-03 | 1990-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451139U (en) |
-
1990
- 1990-09-03 JP JP9265490U patent/JPH0451139U/ja active Pending
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