JPH01125561U - - Google Patents
Info
- Publication number
- JPH01125561U JPH01125561U JP1988020455U JP2045588U JPH01125561U JP H01125561 U JPH01125561 U JP H01125561U JP 1988020455 U JP1988020455 U JP 1988020455U JP 2045588 U JP2045588 U JP 2045588U JP H01125561 U JPH01125561 U JP H01125561U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solid
- transfer electrode
- silicon nitride
- receiving window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- 230000001681 protective effect Effects 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988020455U JPH01125561U (en:Method) | 1988-02-18 | 1988-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988020455U JPH01125561U (en:Method) | 1988-02-18 | 1988-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125561U true JPH01125561U (en:Method) | 1989-08-28 |
Family
ID=31236837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988020455U Pending JPH01125561U (en:Method) | 1988-02-18 | 1988-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125561U (en:Method) |
-
1988
- 1988-02-18 JP JP1988020455U patent/JPH01125561U/ja active Pending
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