JPH01124271U - - Google Patents
Info
- Publication number
- JPH01124271U JPH01124271U JP1988021398U JP2139888U JPH01124271U JP H01124271 U JPH01124271 U JP H01124271U JP 1988021398 U JP1988021398 U JP 1988021398U JP 2139888 U JP2139888 U JP 2139888U JP H01124271 U JPH01124271 U JP H01124271U
- Authority
- JP
- Japan
- Prior art keywords
- coating liquid
- substrate
- spin coater
- scattering
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988021398U JPH01124271U (enExample) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988021398U JPH01124271U (enExample) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01124271U true JPH01124271U (enExample) | 1989-08-24 |
Family
ID=31238605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988021398U Pending JPH01124271U (enExample) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124271U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1119565A (ja) * | 1997-05-07 | 1999-01-26 | Tokyo Electron Ltd | 塗布膜形成方法および塗布装置 |
-
1988
- 1988-02-19 JP JP1988021398U patent/JPH01124271U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1119565A (ja) * | 1997-05-07 | 1999-01-26 | Tokyo Electron Ltd | 塗布膜形成方法および塗布装置 |