JPH01121863U - - Google Patents

Info

Publication number
JPH01121863U
JPH01121863U JP19482987U JP19482987U JPH01121863U JP H01121863 U JPH01121863 U JP H01121863U JP 19482987 U JP19482987 U JP 19482987U JP 19482987 U JP19482987 U JP 19482987U JP H01121863 U JPH01121863 U JP H01121863U
Authority
JP
Japan
Prior art keywords
weight part
stopper
fixed
distorted
beam portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19482987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0624773Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19482987U priority Critical patent/JPH0624773Y2/ja
Priority to US07/285,696 priority patent/US5121633A/en
Publication of JPH01121863U publication Critical patent/JPH01121863U/ja
Application granted granted Critical
Publication of JPH0624773Y2 publication Critical patent/JPH0624773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP19482987U 1987-12-18 1987-12-24 半導体加速度センサ Expired - Lifetime JPH0624773Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP19482987U JPH0624773Y2 (ja) 1987-12-24 1987-12-24 半導体加速度センサ
US07/285,696 US5121633A (en) 1987-12-18 1988-12-16 Semiconductor accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19482987U JPH0624773Y2 (ja) 1987-12-24 1987-12-24 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPH01121863U true JPH01121863U (US06521211-20030218-C00004.png) 1989-08-18
JPH0624773Y2 JPH0624773Y2 (ja) 1994-06-29

Family

ID=31485536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19482987U Expired - Lifetime JPH0624773Y2 (ja) 1987-12-18 1987-12-24 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPH0624773Y2 (US06521211-20030218-C00004.png)

Also Published As

Publication number Publication date
JPH0624773Y2 (ja) 1994-06-29

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