JPH01121177A - Cutting blade - Google Patents

Cutting blade

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Publication number
JPH01121177A
JPH01121177A JP27984187A JP27984187A JPH01121177A JP H01121177 A JPH01121177 A JP H01121177A JP 27984187 A JP27984187 A JP 27984187A JP 27984187 A JP27984187 A JP 27984187A JP H01121177 A JPH01121177 A JP H01121177A
Authority
JP
Japan
Prior art keywords
layer
cutting blade
cutting
wear
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27984187A
Other languages
Japanese (ja)
Inventor
Manabu Ando
学 安藤
Takashi Kosakai
隆 小堺
Toshio Kashino
俊雄 樫野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP27984187A priority Critical patent/JPH01121177A/en
Publication of JPH01121177A publication Critical patent/JPH01121177A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To make one-sided wear in a cutting blade hard to occur as well as to abate the bend of a blade edge by laminating each second layer, easy to wear as compared with a first layer, at both sides of the first layer hard to be worn out into a thickness of less than 20% of thickness of the cutting blade. CONSTITUTION:A tip of a three-layer structural cutting blade 4 is worn out into an angular form making a first layer 1 hard to wear an apex, and cutting advances with this angular apex as a criterion. At this time, since the first layer coming to this angular apex is thinned as less than 20% in the whole thickness of the cutting blade 4, the angular apex always exists in a portion proximate to the center of the whole thickness of the cutting blade 4, therefore cutting rectilinearity comes so better. In addition, the tip of the cutting blade 4 is worn out as the first layer 1 hard to wear in the center of this cutting blade 4 and the second layers 2, 3 easy to wear at both sides are regulated with one another, so that one-sided wear becomes lessened. Moreover, since a portion, coming into contact with the cutting surface of a work material, consists of these second layers 2, 3 being relatively softened, any possible scratches, chipping and so on are hard to occur on the cutting surface.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、シリコン、フェライト、ガラス、セラミック
ス等の硬脆材料を精密に切断または溝加工するための切
断ブレードに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cutting blade for precisely cutting or grooving hard and brittle materials such as silicon, ferrite, glass, and ceramics.

〔従来の技術〕[Conventional technology]

従来、この種の硬脆材料を精密に切断する切断ブレード
としては、砥粒を含む板状材のみからなる切断ブレード
が用いられる。
Conventionally, as a cutting blade for precisely cutting this type of hard and brittle material, a cutting blade made only of a plate-shaped material containing abrasive grains has been used.

また、比較的厚い切断ブレードとしては、合金の外周部
に砥粒層チップを貼付けるなどして、合金外周部にのみ
砥粒層を有する切断ブレードも用いられる。
Further, as a relatively thick cutting blade, a cutting blade having an abrasive layer only on the outer periphery of the alloy, such as by pasting an abrasive layer chip on the outer periphery of the alloy, is also used.

これらの切断ブレードの砥粒層部は、いずれも−般的に
は一種類の組成のみからなる単層の切断ブレードが用い
られる。
The abrasive grain layer portion of these cutting blades is generally a single-layer cutting blade made of only one type of composition.

〔発明が解決しようとしている問題点〕一種類の組成の
みからなる単層の切断ブレードは第5図に示すように、
切断中に切断ブレード刃先が曲がるため、■被切断材料
の切断面が直角にならない、■切断方向における直進性
が悪いといった欠点がある。
[Problems to be solved by the invention] As shown in Fig. 5, a single-layer cutting blade consisting of only one type of composition
Since the cutting blade edge bends during cutting, there are disadvantages such as (1) the cut surface of the material to be cut is not at right angles, and (2) poor straightness in the cutting direction.

単層の切断ブレードは、 切断ブレードの成分が均一に分散していれば理想的には
切断ブレード刃先は第3図に示すように断(ユ 面が糖対称に摩耗してゆくが、実際にか切断ブレード成
分のわずかな不均一性などにより第4図に示すような偏
摩耗を起こし、偏摩耗したブレードにはブレード先端に
横方向の力が加わるため、切断ブレード刃先が第5図に
示すように曲がり易い。
Ideally, if the components of a single-layer cutting blade are uniformly dispersed, the cutting blade edge should be cut as shown in Figure 3. However, slight unevenness in the components of the cutting blade causes uneven wear as shown in Figure 4, and a lateral force is applied to the blade tip of the unevenly worn blade, causing the cutting blade edge to change as shown in Figure 5. It is easy to bend.

以上のような単層の切断ブレードの欠点は、特に切断ブ
レード厚みが薄いほど問題となる。
The above-mentioned drawbacks of a single-layer cutting blade become more problematic as the thickness of the cutting blade becomes thinner.

本発明は、従来の切断ブレードの上記欠点を解決して、
偏摩耗が生じに(<、切断面の垂直性に優れた切断ブレ
ードを提供することを主たる目的とする。
The present invention solves the above-mentioned drawbacks of conventional cutting blades, and
The main purpose is to provide a cutting blade with excellent perpendicularity of the cutting surface, without causing uneven wear.

〔問題点を解決するための手段(及び作用)〕本発明に
よる切断ブレードは、切断ブレード厚みの20%以下の
厚みの摩耗しにくい第1層の両側面に、第1層に比べ摩
耗し易い2層を積層した層構造を有することを特徴とす
る。
[Means (and effects) for solving the problem] The cutting blade according to the present invention has a first layer on both sides of the first layer, which is less likely to wear and has a thickness of 20% or less of the thickness of the cutting blade, and which is more easily worn than the first layer. It is characterized by having a layered structure in which two layers are laminated.

即ち、本発明は中層である切断ブレードの全厚みの20
%以下の厚みの摩耗しに(い第1層の両側面に、外層で
ある前記第1層よりも摩耗しやすい第2層を積層した構
造にすることで切断ブレード厚み方向に摩耗し易い部分
と摩耗しにくい部分を設けたものである。その結果、そ
れぞれが互いに規制し合いながら摩耗するため偏摩耗を
起こしに(い。
That is, in the present invention, the total thickness of the cutting blade, which is the middle layer, is 20
% or less (by creating a structure in which a second layer, which is more abrasive than the first layer, which is the outer layer, is laminated on both sides of the first layer, the part that is abrasive in the thickness direction of the cutting blade) As a result, each part wears while regulating the other, which prevents uneven wear.

即ち、第2図に示すように切断ブレード先端が摩耗しに
くい第1層に頂点を持った山形に摩耗はするが、切断の
方向を定めるこの先端は第−層、すなわち切断ブレード
の全厚みの20%以下の厚みの中心に近い部分にあるた
め切断の直進性が良いものである。
In other words, as shown in Figure 2, the tip of the cutting blade wears in a chevron shape with its apex in the first layer, which is less likely to wear, but this tip, which determines the direction of cutting, is in the second layer, which is the total thickness of the cutting blade. Since it is located close to the center of the thickness of 20% or less, straightness of cutting is good.

以下本発明を図示例に従って説明する。The present invention will be described below with reference to illustrated examples.

第1図は本発明による代表的な切断ブレードを表す図面
であり、中心層である切断ブレードの全厚みの20%以
下の厚みの摩耗しに(い第1層1の両側面に外側層であ
る前記第1層よりも摩耗し易い第2層2を積層した3層
構造の切断ブレードを示す。
FIG. 1 is a drawing showing a typical cutting blade according to the present invention. A cutting blade having a three-layer structure in which a second layer 2 is laminated, which is more easily worn than the first layer, is shown.

このような切断ブレードを使用して材料を切断すると、
摩耗しにくい第1層と摩耗し易い第2層が互いに規制し
合いながら切断ブレード先端が摩耗するため、切断ブレ
ード先端が偏摩耗しにくい。
When cutting the material using such a cutting blade,
Since the cutting blade tip wears out while the first layer that is hard to wear and the second layer that wears easily restrict each other, uneven wear of the cutting blade tip is less likely to occur.

また、切断ブレード先端が第2図に示すように、摩耗し
にくい第1層−を頂点とした山形に摩耗し、材料を切断
した場合、この山形の頂点を基準として切断が進行する
が、山形の頂点となる第1層が切断ブレードの全厚みの
20%以下と薄いため、山形の頂点は常に切断ブレード
の全厚みの中心に近い部分にあり、このため切断の直進
性が良い。
In addition, as shown in Figure 2, when the tip of the cutting blade is worn in a chevron shape with the apex of the first layer, which is less likely to wear, when cutting a material, the cutting progresses based on the apex of this chevron. Since the first layer, which is the apex of the cutting blade, is as thin as 20% or less of the total thickness of the cutting blade, the peak of the chevron is always located near the center of the total thickness of the cutting blade, and therefore the straightness of cutting is good.

また、第1図に示すような外側層として摩耗し易い層を
備えた切断ブレードは、被切断、材料の切断面と接触す
る部分が比較的軟らかいため、切断面にキズやチッピン
グが発生しにくいという効果も度とするために、硬度調
整剤としての微粉末を混(らべ高くする。
In addition, a cutting blade equipped with an outer layer that is easily worn as shown in Figure 1 has a relatively soft part that comes into contact with the cut surface of the material to be cut, so scratches and chipping are less likely to occur on the cut surface. In order to achieve this effect, fine powder as a hardness regulator is mixed in.

(2)第1層の砥粒粒径を第2層の砥粒粒径にくらべ大
きくする。
(2) The abrasive grain size of the first layer is made larger than the abrasive grain size of the second layer.

(3)各層に混入する硬度調整剤の含有率の差により摩
耗の難易に差をつける。
(3) Differences in the difficulty of wear are created by differences in the content of the hardness modifier mixed in each layer.

(4)第1層の結合剤を第2層の結合剤にくらべ硬いも
のを使用する。
(4) Use a harder binder for the first layer than the binder for the second layer.

(5)第1層の砥粒を第2層の砥粒にくらべ硬いものを
使用する。
(5) Use abrasive grains in the first layer that are harder than the abrasive grains in the second layer.

(6)これらの手段のうち2種類またはそれ以上を併用
する。
(6) Use two or more of these methods in combination.

また、第5図に示すように切断ブレード刃先が曲がる原
因の1つとして、特に極薄のレジノイドボンド切断ブレ
ードにおいては切断ブレード自体の強度が弱いというこ
とが考えられ、切断ブレード自体の強度を上げるために
SiCウィスカーを第1層のみ、あるいは第1層、第2
層の両方に混入することが望ましい。
Furthermore, as shown in Figure 5, one of the causes of the bending of the cutting blade edge is that the strength of the cutting blade itself is weak, especially in ultra-thin resinoid bond cutting blades, so the strength of the cutting blade itself is increased. Therefore, SiC whiskers can be applied only to the first layer, or both
It is desirable to mix it into both layers.

またこの場合、第1層、第2層それぞれに混入するSi
Cウィスカーの含有率の差から、第1層と第2層の摩耗
の難易に差をつけることもできる。
Moreover, in this case, Si mixed in each of the first layer and the second layer
It is also possible to differentiate the ease of abrasion between the first layer and the second layer based on the difference in the content of C whiskers.

〔実施例1〕 第1層及び第2層の成分を第1表に示したように配合し
、第1層の厚さ0 、04 m m 、全厚み0 、2
 m mの3層構造のレジノイドボンド切断ブレードを
作製した。
[Example 1] The components of the first layer and the second layer were blended as shown in Table 1, and the thickness of the first layer was 0.04 mm, and the total thickness was 0.2 mm.
A resinoid bond cutting blade having a three-layer structure of mm was prepared.

この3層構造のレジノイドボンド切断ブレードを使用し
てシリコンウェハーを繰り返し切断したところ、しだい
に切断ブレード先端が第2図に示すように、はぼ厚みの
中心に頂点を持った形状に摩耗した。この際、従来の単
層のレジノイドボンド切断ブレードでシリコンウェハー
を切断した場合にくらべて、切断面が歪曲せず、切断の
直進性にも優れ、また切断面に発生するキズやチッピン
グ等も減少した。
When silicon wafers were repeatedly cut using this three-layered resinoid bond cutting blade, the tip of the cutting blade gradually wore out into a shape with an apex at the center of the thickness, as shown in Figure 2. At this time, compared to cutting silicon wafers with a conventional single-layer resinoid bond cutting blade, the cut surface is not distorted, the cutting is superior in straightness, and there are fewer scratches and chippings that occur on the cut surface. did.

〔実施例2〕 第1層及び第2層の成分を第2表に示したように配合し
、第1層の厚さ0 、03 m m 、全厚み0 、2
 m mの3層構造のレジノイドボンド切断ブレードを
作製した。
[Example 2] The components of the first layer and the second layer were blended as shown in Table 2, and the thickness of the first layer was 0.03 mm, and the total thickness was 0.2 mm.
A resinoid bond cutting blade having a three-layer structure of mm was prepared.

この3層構造のレジノイドボンド切断ブレードを使用し
てシリコンウェハーを繰り返し切断したところ、実施例
1と同様の結果が得られた。
When silicon wafers were repeatedly cut using this three-layer resinoid bond cutting blade, the same results as in Example 1 were obtained.

〔実施例3〕 第1層及び第2層の成分を第3表に示したように配合し
、第1層の厚さ0 、02 m m 、全厚み0.2m
mの3層構造のレジノイドボンド切断ブレードを作製し
た。
[Example 3] The components of the first layer and the second layer were mixed as shown in Table 3, and the thickness of the first layer was 0.02 mm, and the total thickness was 0.2 m.
A resinoid bond cutting blade with a three-layer structure of m was fabricated.

第  3  表 この3層構造のレジノイドボンド切断ブレードを使用し
てシリコンウェハーを繰り返し切断したところ、第1の
実施例と同様の結果が得られた。
Table 3 When silicon wafers were repeatedly cut using this three-layered resinoid bond cutting blade, the same results as in the first example were obtained.

〔実施例4〕 第1層及び第2層の成分を第4表に示したように配合し
、このうち硬度調整剤としてSiC微粉末とSiCウィ
スカーを使用し、配合比が第1層1:2、第2層が2:
1となるようにした第1層の厚み0.03mm。
[Example 4] The components of the first layer and the second layer were blended as shown in Table 4, of which SiC fine powder and SiC whiskers were used as hardness modifiers, and the blending ratio was 1:1 for the first layer. 2. The second layer is 2:
The thickness of the first layer was 0.03 mm.

全厚み0.2mmの3層構造のレジノイドボンド切断ブ
レードを作製した。
A resinoid bond cutting blade having a three-layer structure with a total thickness of 0.2 mm was manufactured.

第  4  表 この3層構造のレジノイドボンド切断ブレードを使用し
てシリコンウェハーを繰り返し切断したところ、実施例
1と同様の結果が得られた。
Table 4 When silicon wafers were repeatedly cut using this three-layer resinoid bond cutting blade, the same results as in Example 1 were obtained.

本発明による実施例では、すべてレジノイドボンド切断
ブレードについて述べたが、結合剤がニッケル、銅など
の金属であるメタルボンド切断ブレードでも同様な結果
が得られる。
Although all embodiments according to the present invention have been described with respect to resinoid bond cutting blades, similar results can be obtained with metal bond cutting blades in which the binder is a metal such as nickel or copper.

また本発明では、すべて3層構造の切断ブレードについ
て述べたが、複数の薄い層を厚みの中心から徐々に摩耗
しやすい成分の層を重ね合わせていった多層構造の切断
ブレードでも同様な結果が得られる。ただし、この場合
には同一の組成の層を厚さ方向に対称に配置する必要が
ある。
In addition, in the present invention, all three-layer structure cutting blades have been described, but similar results can be obtained with multi-layer structure cutting blades in which multiple thin layers are gradually overlaid with layers of easily worn components starting from the center of the thickness. can get. However, in this case, layers of the same composition must be arranged symmetrically in the thickness direction.

このように、多数の層を積層するのは、各層の厚みが厚
いと、各層内での偏摩耗という問題が起きる可能性があ
るからで、切断ブレードの全厚みが比較的厚い場合には
複数の薄い層を上述のように積層すると特に効果がある
The reason for stacking a large number of layers in this way is that if each layer is thick, uneven wear may occur within each layer, so if the total thickness of the cutting blade is relatively thick, multiple layers may be stacked. It is particularly effective to laminate thin layers of as described above.

〔発明の効果〕〔Effect of the invention〕

以上のように本発明による切断ブレードは偏摩耗を起こ
しに<(、刃先が曲がりにくいため以下のような利点を
有する。
As described above, the cutting blade according to the present invention has the following advantages since uneven wear does not occur and the cutting edge is hard to bend.

■被切断材料の切断面が曲がりに(い。■The cut surface of the material to be cut is curved.

■切断方向における切断面の直進性が良い。■Good straightness of the cut surface in the cutting direction.

■切断面にキズやチッピングを発生しに(い。■Prevents scratches and chipping from occurring on the cut surface.

■切断ブレード刃先の形状修正作業をひんばんに行わな
くて良い。
■No need to constantly modify the shape of the cutting blade tip.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による3層構造を有する代表的な切断ブ
レードの外観図である。 第2図は第1図のA−A’断面図で、本発明を実施した
切断ブレードの切断中の先端摩耗の状態を示す。 第3図は従来の単層の切断ブレードの切断中の先端摩耗
の状態を表す図で、理想的に摩耗した状態を示す。 第4図は従来の単層の切断ブレードの切断中の先端摩耗
の状態を表す図で、偏摩耗した状態を示す。 第5図は、従来の単層の切断ブレードで被切断材料を切
断中の状態を模式的に表した図で、切断中に切断ブレー
ド刃先が曲がっている状態を示す。 1は切断ブレードの第1層 2は切断ブレードの第2層 3は切断ブレードの第3層 4は本発明を実施した3層構造を有する切断ブレード 5は従来の単層の切断ブレード 6は被切断材料
FIG. 1 is an external view of a typical cutting blade having a three-layer structure according to the present invention. FIG. 2 is a cross-sectional view taken along the line AA' in FIG. 1, showing the state of wear at the tip of the cutting blade according to the present invention during cutting. FIG. 3 is a diagram showing the wear state of the tip of a conventional single-layer cutting blade during cutting, and shows the ideal worn state. FIG. 4 is a diagram showing the state of wear of the tip of a conventional single-layer cutting blade during cutting, and shows a state of uneven wear. FIG. 5 is a diagram schematically showing a state in which a material to be cut is being cut with a conventional single-layer cutting blade, and shows a state in which the cutting blade edge is bent during cutting. 1 is a first layer of a cutting blade 2 is a second layer of a cutting blade 3 is a third layer of a cutting blade 4 is a cutting blade 5 having a three-layer structure according to the present invention; cutting material

Claims (4)

【特許請求の範囲】[Claims] (1)切断ブレード厚みの20%以下の厚みの摩耗しに
くい第1層の両側面に、前記第1層に比べ摩耗し易い第
2層を積層した層構造を有することを特徴とする切断ブ
レード。
(1) A cutting blade characterized by having a layered structure in which a second layer that is more easily worn than the first layer is laminated on both sides of a first layer that is less likely to wear and has a thickness of 20% or less of the thickness of the cutting blade. .
(2)切断ブレードの各層中に、硬度調整剤を含む特許
請求の範囲第1項記載の切断ブレード。
(2) The cutting blade according to claim 1, which contains a hardness modifier in each layer of the cutting blade.
(3)第1層中にSiCウィスカーを含む特許請求の範
囲第1項記載の切断ブレード。
(3) The cutting blade according to claim 1, which includes SiC whiskers in the first layer.
(4)第1層と第2層にSiCウィスカーを混入して第
1層と第2層に混入するSiCウィスカーの含有率の差
により、第1層と第2層の摩耗の難易に差をつけた特許
請求の範囲第3項記載の切断ブレード。
(4) By mixing SiC whiskers into the first and second layers, the difference in the content of SiC whiskers between the first and second layers can cause a difference in the ease of wear between the first and second layers. A cutting blade according to claim 3.
JP27984187A 1987-11-05 1987-11-05 Cutting blade Pending JPH01121177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27984187A JPH01121177A (en) 1987-11-05 1987-11-05 Cutting blade

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27984187A JPH01121177A (en) 1987-11-05 1987-11-05 Cutting blade

Publications (1)

Publication Number Publication Date
JPH01121177A true JPH01121177A (en) 1989-05-12

Family

ID=17616675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27984187A Pending JPH01121177A (en) 1987-11-05 1987-11-05 Cutting blade

Country Status (1)

Country Link
JP (1) JPH01121177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107530866A (en) * 2015-04-01 2018-01-02 3M创新有限公司 Abrasive disc with side cover layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107530866A (en) * 2015-04-01 2018-01-02 3M创新有限公司 Abrasive disc with side cover layer
EP3277462A4 (en) * 2015-04-01 2018-11-07 3M Innovative Properties Company Abrasive disc with lateral cover layer

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