JPH01120148U - - Google Patents
Info
- Publication number
- JPH01120148U JPH01120148U JP1988016037U JP1603788U JPH01120148U JP H01120148 U JPH01120148 U JP H01120148U JP 1988016037 U JP1988016037 U JP 1988016037U JP 1603788 U JP1603788 U JP 1603788U JP H01120148 U JPH01120148 U JP H01120148U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- container
- lid
- frame
- synthetic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims description 2
- 229920003002 synthetic resin Polymers 0.000 claims 3
- 239000000057 synthetic resin Substances 0.000 claims 3
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988016037U JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988016037U JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01120148U true JPH01120148U (lt) | 1989-08-15 |
JPH0645965Y2 JPH0645965Y2 (ja) | 1994-11-24 |
Family
ID=31228617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988016037U Expired - Lifetime JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0645965Y2 (lt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007328226A (ja) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | ペリクル収納容器及びその製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6243359U (lt) * | 1985-09-04 | 1987-03-16 | ||
JPS62143948U (lt) * | 1986-03-07 | 1987-09-10 | ||
JPS6322379A (ja) * | 1986-05-30 | 1988-01-29 | インコ インダストリアル コ−ポレ−シヨン | 光学薄膜組立体の梱包方法と容器 |
JPS63140526U (lt) * | 1987-03-06 | 1988-09-16 |
-
1988
- 1988-02-09 JP JP1988016037U patent/JPH0645965Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6243359U (lt) * | 1985-09-04 | 1987-03-16 | ||
JPS62143948U (lt) * | 1986-03-07 | 1987-09-10 | ||
JPS6322379A (ja) * | 1986-05-30 | 1988-01-29 | インコ インダストリアル コ−ポレ−シヨン | 光学薄膜組立体の梱包方法と容器 |
JPS63140526U (lt) * | 1987-03-06 | 1988-09-16 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007328226A (ja) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | ペリクル収納容器及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0645965Y2 (ja) | 1994-11-24 |
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