JPH01120148U - - Google Patents
Info
- Publication number
- JPH01120148U JPH01120148U JP1988016037U JP1603788U JPH01120148U JP H01120148 U JPH01120148 U JP H01120148U JP 1988016037 U JP1988016037 U JP 1988016037U JP 1603788 U JP1603788 U JP 1603788U JP H01120148 U JPH01120148 U JP H01120148U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- container
- lid
- frame
- synthetic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims description 2
- 229920003002 synthetic resin Polymers 0.000 claims 3
- 239000000057 synthetic resin Substances 0.000 claims 3
Landscapes
- Packaging Frangible Articles (AREA)
Description
第1図は本考案の一実施例を示した断面図、第
2図はその蓋体を外した状態の平面図である。
1……ペリクル枠、2……ペリクル膜、3……
ペリクル、4……容器本体、5……載置台、6…
…支持体、7……蓋体、10……当接部。
FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a plan view of the device with the lid removed. 1... Pellicle frame, 2... Pellicle membrane, 3...
Pellicle, 4... Container body, 5... Placement stand, 6...
... Support body, 7 ... Lid body, 10 ... Contact portion.
Claims (1)
設したペリクル3を収容する容器であり、容器本
体4の内底部にペリクル枠1に対応して、ペリク
ル枠1を周囲から保持する支持体6を立設し、さ
らに、容器本体4上を蓋体7で開閉自在に覆い、
この蓋体7は、閉蓋時に内底部上に載置されたペ
リクル枠1に当接する当接部10をその内面に有
することを特徴とするペリクル用容器。 (2) 支持体6で囲まれた容器本体4の内底部を
その周囲より高く形成して前記ペリクル枠1を載
置する載置台5としたことを特徴とする特許請求
の範囲第1項記載のペリクル用容器。 (3) アイゾツト衝撃強度が4以上であり、ロツ
クウエル硬度が95以下である合成樹脂で成形さ
れたことを特徴とする特許請求の範囲第1項記載
のペリクル用容器。 (4) 容器本体4が帯電防止性合成樹脂で形成さ
れ、蓋体7が帯電性合成樹脂で形成されたことを
特徴とする特許請求の範囲第1項記載のペリクル
用容器。[Claims for Utility Model Registration] (1) A container for accommodating a pellicle 3 with a pellicle membrane 2 stretched on one side of a pellicle frame 1, and a pellicle attached to the inner bottom of the container body 4 corresponding to the pellicle frame 1. A support body 6 for holding the frame 1 from the periphery is erected, and the container body 4 is further covered with a lid body 7 so as to be openable and closable.
This pellicle container is characterized in that the lid 7 has a contact portion 10 on its inner surface that contacts the pellicle frame 1 placed on the inner bottom when the lid is closed. (2) The inner bottom of the container body 4 surrounded by the support 6 is formed higher than its surroundings to form the mounting table 5 on which the pellicle frame 1 is placed. pellicle container. (3) The pellicle container according to claim 1, which is molded from a synthetic resin having an Izot impact strength of 4 or more and a Rockwell hardness of 95 or less. (4) The pellicle container according to claim 1, wherein the container body 4 is made of antistatic synthetic resin, and the lid 7 is made of electrostatic synthetic resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988016037U JPH0645965Y2 (en) | 1988-02-09 | 1988-02-09 | Pellicle container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988016037U JPH0645965Y2 (en) | 1988-02-09 | 1988-02-09 | Pellicle container |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01120148U true JPH01120148U (en) | 1989-08-15 |
JPH0645965Y2 JPH0645965Y2 (en) | 1994-11-24 |
Family
ID=31228617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988016037U Expired - Lifetime JPH0645965Y2 (en) | 1988-02-09 | 1988-02-09 | Pellicle container |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0645965Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007328226A (en) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | Pellicle storage container and method for manufacturing the same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6243359U (en) * | 1985-09-04 | 1987-03-16 | ||
JPS62143948U (en) * | 1986-03-07 | 1987-09-10 | ||
JPS6322379A (en) * | 1986-05-30 | 1988-01-29 | インコ インダストリアル コ−ポレ−シヨン | Method of packaging optical thin-film assembly and vessel |
JPS63140526U (en) * | 1987-03-06 | 1988-09-16 |
-
1988
- 1988-02-09 JP JP1988016037U patent/JPH0645965Y2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6243359U (en) * | 1985-09-04 | 1987-03-16 | ||
JPS62143948U (en) * | 1986-03-07 | 1987-09-10 | ||
JPS6322379A (en) * | 1986-05-30 | 1988-01-29 | インコ インダストリアル コ−ポレ−シヨン | Method of packaging optical thin-film assembly and vessel |
JPS63140526U (en) * | 1987-03-06 | 1988-09-16 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007328226A (en) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | Pellicle storage container and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPH0645965Y2 (en) | 1994-11-24 |
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