JPH01118399U - - Google Patents
Info
- Publication number
- JPH01118399U JPH01118399U JP1233588U JP1233588U JPH01118399U JP H01118399 U JPH01118399 U JP H01118399U JP 1233588 U JP1233588 U JP 1233588U JP 1233588 U JP1233588 U JP 1233588U JP H01118399 U JPH01118399 U JP H01118399U
- Authority
- JP
- Japan
- Prior art keywords
- window
- electron beam
- irradiation device
- window foil
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 239000011888 foil Substances 0.000 claims description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
Description
第１図は本考案の一例を示す非走査型電子線照
射装置の略縦断面図。第２図は第１図の装置に於
て照射窓近傍の拡大断面図。第３図は第２図中の
―断面図。第４図は従来例の非走査型電子線
照射装置の照射窓近傍の縦断面図。第５図は走査
型電子線照射装置に本考案を適用したものを示す
照射窓近傍の断面図。
１……加速チヤンバ、２……カソードフイラメ
ント部、３……カソードシールド、４……照射窓
、５……チヤンバ下底面、６……窓箔、７……窓
箔押えフランジ、８……搬送コンベア、９……被
処理物、１０……窒素吹き出し口、１１……窒素
吸い込み口、１２……たまり、１３……温風逃が
し穴、１４……筐体、１５……Ｘ線遮蔽板、２０
……横桟、２１……冷却水パイプ、２２……走査
管、２３……走査管フランジ。
FIG. 1 is a schematic vertical sectional view of a non-scanning electron beam irradiation device showing an example of the present invention. FIG. 2 is an enlarged sectional view of the vicinity of the irradiation window in the apparatus shown in FIG. 1. Figure 3 is a sectional view of Figure 2. FIG. 4 is a longitudinal sectional view of the vicinity of the irradiation window of a conventional non-scanning electron beam irradiation device. FIG. 5 is a sectional view near the irradiation window showing a scanning electron beam irradiation device to which the present invention is applied. 1...Acceleration chamber, 2...Cathode filament part, 3...Cathode shield, 4...Irradiation window, 5...Bottom surface of chamber, 6...Window foil, 7...Window foil pressing flange, 8...Transportation Conveyor, 9... Workpiece, 10... Nitrogen outlet, 11... Nitrogen suction port, 12... Accumulation, 13... Hot air escape hole, 14... Housing, 15... X-ray shielding plate, 20
...Horizontal beam, 21...Cooling water pipe, 22...Scanning tube, 23...Scanning tube flange.
Claims (1)
４に設けた窓箔６を通して大気圧であつて窒素ガ
ス又は不活性ガス雰囲気中に飛出させ被処理物９
に照射するようにした電子線照射装置において、
窓箔６を照射窓４に固定する窓箔押えフランジ７
に、温風逃がし穴１３を水平方向に穿孔してある
事を特徴とする電子線照射装置。 An electron beam is generated in a vacuum, accelerated, and ejected into a nitrogen gas or inert gas atmosphere at atmospheric pressure through a window foil 6 provided in an irradiation window 4, thereby exposing the object to be treated 9.
In an electron beam irradiation device designed to irradiate
Window foil holding flange 7 that fixes the window foil 6 to the irradiation window 4
An electron beam irradiation device characterized in that hot air escape holes 13 are bored in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988012335U JPH0734399Y2 (en) | 1988-02-01 | 1988-02-01 | Electron beam irradiation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988012335U JPH0734399Y2 (en) | 1988-02-01 | 1988-02-01 | Electron beam irradiation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01118399U true JPH01118399U (en) | 1989-08-10 |
| JPH0734399Y2 JPH0734399Y2 (en) | 1995-08-02 |
Family
ID=31221689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988012335U Expired - Lifetime JPH0734399Y2 (en) | 1988-02-01 | 1988-02-01 | Electron beam irradiation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734399Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3417246B2 (en) | 1996-09-25 | 2003-06-16 | 日本電気株式会社 | Gradation display method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346598A (en) * | 1976-10-07 | 1978-04-26 | Ebara Corp | Cooling system and device of particle accelerator irradiation aperture |
-
1988
- 1988-02-01 JP JP1988012335U patent/JPH0734399Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5346598A (en) * | 1976-10-07 | 1978-04-26 | Ebara Corp | Cooling system and device of particle accelerator irradiation aperture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734399Y2 (en) | 1995-08-02 |
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