JPH01117301A - 電圧非直線抵抗体 - Google Patents

Info

Publication number

JPH01117301A

JPH01117301A JP62273539A JP27353987A JPH01117301A JP H01117301 A JPH01117301 A JP H01117301A JP 62273539 A JP62273539 A JP 62273539A JP 27353987 A JP27353987 A JP 27353987A JP H01117301 A JPH01117301 A JP H01117301A

Authority

JP

Japan

Prior art keywords

thickness

thin

film

silver

voltage

Prior art date

1987-10-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 14
• 239000004020 conductor Substances 0.000 claims abstract description 8
• 239000011787 zinc oxide Substances 0.000 claims abstract description 7
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 8
• 229910052709 silver Inorganic materials 0.000 abstract description 8
• 239000004332 silver Substances 0.000 abstract description 8
• 238000005498 polishing Methods 0.000 abstract description 5
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 4
• 229910052737 gold Inorganic materials 0.000 abstract description 4
• 239000010931 gold Substances 0.000 abstract description 4
• 239000000654 additive Substances 0.000 abstract description 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 2
• -1 carbon Chemical compound 0.000 abstract description 2
• 229910052799 carbon Inorganic materials 0.000 abstract description 2
• 239000003795 chemical substances by application Substances 0.000 abstract description 2
• 229910003460 diamond Inorganic materials 0.000 abstract description 2
• 239000010432 diamond Substances 0.000 abstract description 2
• 239000007788 liquid Substances 0.000 abstract description 2
• 229910052751 metal Inorganic materials 0.000 abstract description 2
• 239000002184 metal Substances 0.000 abstract description 2
• 238000004544 sputter deposition Methods 0.000 abstract description 2
• 239000000126 substance Substances 0.000 abstract description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
• 239000010409 thin film Substances 0.000 abstract 3
• 239000000463 material Substances 0.000 abstract 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
• 239000007767 bonding agent Substances 0.000 abstract 1
• 229910052593 corundum Inorganic materials 0.000 abstract 1
• 150000002739 metals Chemical class 0.000 abstract 1
• 229910003465 moissanite Inorganic materials 0.000 abstract 1
• 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
• 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
• 239000010410 layer Substances 0.000 description 15
• 238000000465 moulding Methods 0.000 description 5
• 238000007740 vapor deposition Methods 0.000 description 5
• DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 4
• 230000000052 comparative effect Effects 0.000 description 4
• 229910052782 aluminium Inorganic materials 0.000 description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
• 239000011230 binding agent Substances 0.000 description 3
• 239000011247 coating layer Substances 0.000 description 3
• 239000011521 glass Substances 0.000 description 3
• 239000001856 Ethyl cellulose Substances 0.000 description 2
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
• 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
• 230000005684 electric field Effects 0.000 description 2
• 229920001249 ethyl cellulose Polymers 0.000 description 2
• 235000019325 ethyl cellulose Nutrition 0.000 description 2
• 238000010304 firing Methods 0.000 description 2
• 238000000034 method Methods 0.000 description 2
• 239000000843 powder Substances 0.000 description 2
• 239000002994 raw material Substances 0.000 description 2
• 239000004372 Polyvinyl alcohol Substances 0.000 description 1
• 239000007864 aqueous solution Substances 0.000 description 1
• 238000001354 calcination Methods 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 230000006378 damage Effects 0.000 description 1
• 238000000151 deposition Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000005469 granulation Methods 0.000 description 1
• 230000003179 granulation Effects 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 239000012212 insulator Substances 0.000 description 1
• 238000002156 mixing Methods 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 229920002451 polyvinyl alcohol Polymers 0.000 description 1
• 239000007921 spray Substances 0.000 description 1
• 238000005507 spraying Methods 0.000 description 1
• 230000003746 surface roughness Effects 0.000 description 1