JPH01116442U - - Google Patents
Info
- Publication number
- JPH01116442U JPH01116442U JP1124488U JP1124488U JPH01116442U JP H01116442 U JPH01116442 U JP H01116442U JP 1124488 U JP1124488 U JP 1124488U JP 1124488 U JP1124488 U JP 1124488U JP H01116442 U JPH01116442 U JP H01116442U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- silicon carbide
- holding device
- wafer holding
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000001465 metallisation Methods 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 238000007751 thermal spraying Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1124488U JPH01116442U (fr) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1124488U JPH01116442U (fr) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116442U true JPH01116442U (fr) | 1989-08-07 |
Family
ID=31219626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1124488U Pending JPH01116442U (fr) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116442U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015226010A (ja) * | 2014-05-29 | 2015-12-14 | 東京エレクトロン株式会社 | 静電吸着装置、静電チャック、及び冷却処理装置 |
-
1988
- 1988-02-01 JP JP1124488U patent/JPH01116442U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015226010A (ja) * | 2014-05-29 | 2015-12-14 | 東京エレクトロン株式会社 | 静電吸着装置、静電チャック、及び冷却処理装置 |
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