JPH01129259U - - Google Patents
Info
- Publication number
- JPH01129259U JPH01129259U JP2232688U JP2232688U JPH01129259U JP H01129259 U JPH01129259 U JP H01129259U JP 2232688 U JP2232688 U JP 2232688U JP 2232688 U JP2232688 U JP 2232688U JP H01129259 U JPH01129259 U JP H01129259U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- reaction tube
- holding
- substrate
- inclined plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000197 pyrolysis Methods 0.000 claims 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2232688U JPH01129259U (fr) | 1988-02-24 | 1988-02-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2232688U JPH01129259U (fr) | 1988-02-24 | 1988-02-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01129259U true JPH01129259U (fr) | 1989-09-04 |
Family
ID=31240339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2232688U Pending JPH01129259U (fr) | 1988-02-24 | 1988-02-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01129259U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002261021A (ja) * | 2001-02-28 | 2002-09-13 | Japan Pionics Co Ltd | 気相成長装置及び気相成長方法 |
-
1988
- 1988-02-24 JP JP2232688U patent/JPH01129259U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002261021A (ja) * | 2001-02-28 | 2002-09-13 | Japan Pionics Co Ltd | 気相成長装置及び気相成長方法 |