JPH01109505A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH01109505A JPH01109505A JP26796087A JP26796087A JPH01109505A JP H01109505 A JPH01109505 A JP H01109505A JP 26796087 A JP26796087 A JP 26796087A JP 26796087 A JP26796087 A JP 26796087A JP H01109505 A JPH01109505 A JP H01109505A
- Authority
- JP
- Japan
- Prior art keywords
- ferrite
- intermediate layer
- soft magnetic
- sendust
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 30
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 19
- 239000000696 magnetic material Substances 0.000 claims abstract description 13
- 229910000702 sendust Inorganic materials 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 229910021364 Al-Si alloy Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 abstract description 2
- 238000000926 separation method Methods 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 229910001374 Invar Inorganic materials 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 241000344858 Tiaris Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はＭｎ−Ｚｎフェライト上に軟磁気材料、例えば
Ｆｅ−／１−Ｓｉ系合金（センダスト）の薄膜を形成し
た磁気ヘッドに関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a magnetic head in which a thin film of a soft magnetic material, such as Fe-/1-Si alloy (Sendust) is formed on Mn-Zn ferrite. .
〔従来の技術および発明が解決すべき問題点〕磁気記録
の高密度化のために、媒体は高抗磁力化、高磁束密度化
の方向に准み、それに対応して磁気ヘッド材料としても
、高磁束密度、よりソフトな磁性材料が望まれている。[Prior art and problems to be solved by the invention] In order to increase the density of magnetic recording, media are trending toward higher coercive force and higher magnetic flux density, and in response, magnetic head materials are Higher magnetic flux density and softer magnetic materials are desired.
またヘッド材は狭トラツク、狭ギャップ化の加工が行な
われ、その高精度の薄膜形成技術が重要である。In addition, the head material is processed to have narrow tracks and gaps, and highly accurate thin film formation technology is important.
そこで近年高抗磁ツノ媒体対応の磁気ヘッドとしてフェ
ライトのキャップつき合わせ面に飽和磁束密度の高く、
軟磁気特性の良いアモルフン・スヤセンダストが実用化
され始めている。またこれ等の磁気ヘッドは数百ｍの温
度で熱処理や加工されるため、その熱的安定性が問題と
なる。Therefore, in recent years, magnetic heads compatible with high-resistance horn media have been developed using ferrite caps with high saturation magnetic flux density on the mating surface of the cap.
Amorphun suyasen dust with good soft magnetic properties is beginning to be put into practical use. Furthermore, since these magnetic heads are heat-treated and processed at temperatures of several hundred meters, their thermal stability becomes a problem.
アモルファスは結晶化温度をすぎると、軟磁気特性が悪
くなるため、熱的に安定なセンダストが実用的である。When amorphous material exceeds its crystallization temperature, its soft magnetic properties deteriorate, so sendust, which is thermally stable, is practical.
しかしフェライトと比較してセンダストは熱膨張が大き
く、加エエ稈に大きな歪が発生して軟磁気特性の劣化や
フェライトからの剥離などが発生する。However, compared to ferrite, sendust has a larger thermal expansion, which causes large strain in the processed culm, resulting in deterioration of soft magnetic properties and separation from the ferrite.
これを解決するため、フェライトとセンダストの間に中
間層を設けることが行なわれている。To solve this problem, an intermediate layer is provided between the ferrite and sendust.
この中間層はフェライトとの熱膨張差があまりなく、セ
ラミックスとしてのフェライトへの接合力に富むものが
望ましい。またこの中間層が非磁性層である場合はスペ
ーシングによる記録再生特性に問題が起る。したがって
この中間層も軟磁性材料であることが望ましい。It is desirable that this intermediate layer has little difference in thermal expansion from the ferrite and has strong bonding strength to the ferrite as a ceramic. Furthermore, if this intermediate layer is a nonmagnetic layer, problems arise in recording and reproducing characteristics due to spacing. Therefore, it is desirable that this intermediate layer also be made of a soft magnetic material.
部分的な解決策としてＣｒやパーマロイを中間層として
いる。しかしＣｒは熱膨張差による応力を緩和するが、
ｃｒは手強磁性体であるし、パーマロイは軟磁性材料で
スペーシングはなくなるが、熱応力を緩和することはで
きない。A partial solution is to use Cr or permalloy as an intermediate layer. However, although Cr alleviates the stress caused by the difference in thermal expansion,
Cr is a ferromagnetic material, and permalloy is a soft magnetic material that eliminates spacing, but cannot alleviate thermal stress.
（問題点を解決するための手段）
本発明はこれに鑑み種々検討の結果、フェライトと軟磁
性金属材料との接合に適し、フェライトとの熱膨張の差
が少なく、フェライトとの接合力に富み、軟磁気特性を
有する中間層を設けた磁気ヘッドを開発したものである
。(Means for Solving the Problems) In view of this, as a result of various studies, the present invention is suitable for bonding ferrite and soft magnetic metal materials, has a small difference in thermal expansion with ferrite, and has high bonding strength with ferrite. , developed a magnetic head with an intermediate layer having soft magnetic properties.
即ち本発明は、Ｍｎ−Ｚｎフェライト上に軟磁気材料の
薄膜を形成した磁気ヘッドにおいて、Ｍｎ−Ｚｎフェラ
イト上に（Ｆｅ１−ａＮｉａ ）１−ｂ Ｔ ｉｂ、但
し０．４≦ａ≦０．７、Ｏ≦ｂ≦０．２（原子比）から
なる中間層を設け、その上に軟磁気材料の薄膜を形成し
たことを特徴とするもので、軟磁気材料としてはＦｅ−
Ａｌ−Ｓｉ系合金（センダスト）を用いることが望まし
い。That is, the present invention provides a magnetic head in which a thin film of a soft magnetic material is formed on Mn-Zn ferrite, and (Fe1-aNia)1-bTib, where 0.4≦a≦0.7. , O≦b≦0.2 (atomic ratio), and a thin film of a soft magnetic material is formed on the intermediate layer, and the soft magnetic material is Fe-
It is desirable to use an Al-Si alloy (sendust).
本発明において中間層を（Ｆｅ１−ａ
Ｎｉａ）１−ｂＴｉｂ、但し０．４≦ａ≦０．７、Ｏ≦
ｂ≦０．２（原子比）としたのは、次の理由によるもの
である。In the present invention, the intermediate layer is (Fe1-a Nia)1-bTib, provided that 0.4≦a≦0.7, O≦
The reason why b≦0.2 (atomic ratio) is set is as follows.
熱膨張の小さい合金としてインバーが知られており、こ
の合金はＦｅ６４Ｎ １３６（ａｔ％）付近の組成であ
る。また軟磁性材料としては、パーマロイが知られてお
り、この合金はＦｅ−Ｎｉ系でＦ ｅ ７８．ｓ Ｎ
ｉ ２１．５ （ａｔ％）付近の組成である。そこでこ
れ等の中間組成、例えばＦｅ４ＯＮｉｓｏ（ａｔ％）付
近では線熱膨張係数は３×１０−６程度と低く、初造磁
率は３０００程度と比較的に高い。そこで合金組成を（
Ｆｅ１−ａＮｉａ）、但し０．４≦ａ≦０．１（原子比
）とすることにより、軟磁性材料で熱膨張係数をフェラ
イトとの接合に適した値とすることができる。Invar is known as an alloy with low thermal expansion, and this alloy has a composition near Fe64N136 (at%). Permalloy is also known as a soft magnetic material, and this alloy is Fe-Ni based and has Fe 78. s N
The composition is around i 21.5 (at%). Therefore, in these intermediate compositions, for example around Fe4ONiso (at%), the coefficient of linear thermal expansion is as low as about 3 x 10-6, and the initial magnetic coercivity is relatively high as about 3000. Therefore, the alloy composition (
Fe1-aNia), where 0.4≦a≦0.1 (atomic ratio), the soft magnetic material can have a thermal expansion coefficient suitable for bonding with ferrite.
しかしＮｉ量を増加すると、疑似出力は強くなるが、磁
気特性が多少低下するばかりが、熱膨張差による応力増
加により剥離しゃすくなる。However, when the amount of Ni is increased, the pseudo output becomes stronger, but the magnetic properties are slightly degraded, and the stress increases due to the difference in thermal expansion, making it more likely to peel off.
Ｔｉの添加は、メタライズにおける活性化金属法として
知られているようにフェライトとの接合力を強化するも
のである。しかしてＴｉは非磁性金属なので、磁気特性
を劣化させない程度に添加することが重要であり、（Ｆ
ｅ＞−ａＮｉａ）１−ｂＴｉｂ、但しＯ≦ｂ≦０．２（
原子比）とする。即らＴｉ量を増加させると接合力は強
くなるが磁気特性が劣化する。Addition of Ti strengthens the bonding force with ferrite, as is known as the activated metal method in metallization. However, since Ti is a nonmagnetic metal, it is important to add it to an extent that does not deteriorate the magnetic properties.
e>-aNia)1-bTib, where O≦b≦0.2(
atomic ratio). That is, when the amount of Ti is increased, the bonding force becomes stronger, but the magnetic properties deteriorate.
（実施例）
単結晶Ｍｎ−Ｚｎフェライトより面積１０ｘ １０ｍ１
厚ざ２ｍのチップを面に垂直な方向が（１１０）になる
用に切出し、その一方の面を鏡面仕上げした。このチッ
プについて、ＲＦマグネトロンスパッタにより、先ず鏡
面仕上げした面をスパッターエッチした後、中間層とし
て（Ｆｅ ｊ−ａ Ｎ ｉａ ） ｔ−ｂ Ｔ ｉｂ
、但し０．４≦ａ≦０．７、Ｑ≦ｂ≦０．２（原子比
）を０．１μｍの厚さに被覆し、次にセンダスト（Ｆｅ
−Ａｊ！−Ｓｉ合金）を２０μｍの厚さに被覆した。(Example) Area 10x 10m1 from single crystal Mn-Zn ferrite
A chip with a thickness of 2 m was cut so that the direction perpendicular to the surface was (110), and one surface was mirror-finished. For this chip, first the mirror-finished surface was sputter-etched using RF magnetron sputtering, and then an intermediate layer (Fe ja-a N ia ) t-b T ib
However, 0.4≦a≦0.7, Q≦b≦0.2 (atomic ratio) was coated to a thickness of 0.1 μm, and then sentust (Fe
-Aj! -Si alloy) was coated to a thickness of 20 μm.
尚この被覆工程はクリーンなチャンバー内で行なった。Note that this coating step was performed in a clean chamber.
またセンダストとしては３ ｉ １０．１゜Ａｊ！６．
３ 、 Ｆｅ残部（ｗｔ％）のいわゆる標準センダスト
を用いた。Also, for Sendust, it is 3 i 10.1゜Aj! 6.
3. So-called standard sendust with Fe balance (wt%) was used.
これ等を真空中６００℃で熱処理した後、ダイジングソ
ーによる加工実験を行なった。この実験から、上記範囲
の中間層を用いたものは接合力が強く、磁気特性が優れ
ている。これに対し上記範囲よりＴｉ量を増加させた中
間層を用いたものは、接合力が向上するも、磁気特性が
劣化し、上記範囲よりＮｉｌを増加させた中間層を用い
たものは疑似出力を多少低下するも、熱膨張差による応
力が増大し、剥離しやすくなった。After heat treating these in vacuum at 600° C., processing experiments using a dicing saw were conducted. From this experiment, it was found that the bonding force using the intermediate layer in the above range was strong and the magnetic properties were excellent. On the other hand, those using an intermediate layer with an increased amount of Ti than the above range improve the bonding strength, but the magnetic properties deteriorate, and those using an intermediate layer with an increased Ni content above the above range produce a pseudo output. Although it decreased somewhat, the stress due to the difference in thermal expansion increased, making it easier to peel off.
尚本実験で特に望ましい組成は（Ｆｅ６５Ｎｉ４ｓ）ｓ
Ｔｉｓ （ａｔ％）付近テアリ、例エバＦｅ５４．８
． Ｎ ｉ ４４．８． Ｔｉｏ、ｓ （ａｔ％）
の中間層を０．１μｍの厚さに被覆したものは熱処理後
の保磁力（Ｈａ）０．３６０ｅ、飽和磁束密度（Ｂ ｉ
） １０２００ Ｇとなる。また熱処理後のダイシン
グソーによる加工に十分たえ、５ＭＨ２における初透磁
率は９００程度であった。The particularly desirable composition in this experiment is (Fe65Ni4s)s
Tis (at%) near Tiari, e.g. Eva Fe54.8
．． N i 44.8. Tio,s (at%)
The one coated with an intermediate layer with a thickness of 0.1 μm has a coercive force (Ha) of 0.360e and a saturation magnetic flux density (B i
) 10200G. Further, after sufficient processing with a dicing saw after heat treatment, the initial magnetic permeability at 5MH2 was about 900.
比較のためＦｅ５４Ｎ １３６（ａｔ％）のインバー組
成の中間層を用いたところ中間層の熱膨張が非常に低い
ため、剥離やフェライトにひびが生じた。また（Ｆｅ４
ｏＮ １ｏｏ）ｙｏＴ １３０（ａｔ％）の中間層を用
いたものは、Ｔｉ量が多いため接合力が強すぎ、フェラ
イトとｌｉの反応が進み、非磁性層によるものと思われ
る疑似出力が増大した。For comparison, when an intermediate layer having an invar composition of Fe54N 136 (at%) was used, peeling and cracking of the ferrite occurred because the thermal expansion of the intermediate layer was very low. Also (Fe4
oN 1oo) yoT In the case of using an intermediate layer of 130 (at%), the bonding force was too strong due to the large amount of Ti, the reaction between ferrite and lithium progressed, and the pseudo output increased, which is thought to be due to the nonmagnetic layer. .
このように本発明によれば、６００℃での高温加熱工程
においてもセンダスト膜の剥離を起すことなく、軟磁気
特性もよい磁気ヘッドを提供することができるもので、
工業上顕著な効果を奏するものである。As described above, according to the present invention, it is possible to provide a magnetic head that does not cause peeling of the sendust film even in a high temperature heating process at 600° C. and has good soft magnetic properties.
This has a remarkable industrial effect.
Claims (2)
成した磁気ヘッドにおいて、Ｍｎ−Ｚｎフェライト上に
（Ｆｅ＿１＿−＿ａＮｉ＿ａ）＿１＿−＿ｂＴｉ＿ｂ、
但し０．４≦ａ≦０．７、０≦ｂ≦０．２（原子比）か
らなる中間層を設け、その上に軟磁気材料の薄膜を形成
したことを特徴とする磁気ヘッド。(1) In a magnetic head in which a thin film of soft magnetic material is formed on Mn-Zn ferrite, (Fe_1_-_aNi_a)_1_-_bTi_b,
A magnetic head characterized in that an intermediate layer having atomic ratios of 0.4≦a≦0.7 and 0≦b≦0.2 is provided, and a thin film of a soft magnetic material is formed thereon.
ダスト）を用いる特許請求の範囲第１項記載の磁気ヘッ
ド。(2) A magnetic head according to claim 1, in which a Fe-Al-Si alloy (sendust) is used as the soft magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26796087A JPH01109505A (en) | 1987-10-23 | 1987-10-23 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26796087A JPH01109505A (en) | 1987-10-23 | 1987-10-23 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01109505A true JPH01109505A (en) | 1989-04-26 |
Family
ID=17451985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26796087A Pending JPH01109505A (en) | 1987-10-23 | 1987-10-23 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01109505A (en) |
-
1987
- 1987-10-23 JP JP26796087A patent/JPH01109505A/en active Pending
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