JPH01105837U - - Google Patents

Info

Publication number
JPH01105837U
JPH01105837U JP98988U JP98988U JPH01105837U JP H01105837 U JPH01105837 U JP H01105837U JP 98988 U JP98988 U JP 98988U JP 98988 U JP98988 U JP 98988U JP H01105837 U JPH01105837 U JP H01105837U
Authority
JP
Japan
Prior art keywords
glass substrate
support
pressure sensor
thermal expansion
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP98988U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP98988U priority Critical patent/JPH01105837U/ja
Publication of JPH01105837U publication Critical patent/JPH01105837U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は本考案の１実施例の構成を示す縦断面
図、第２図は第１図に示す実施例を作るための手
順を示す説明図第３図は従来の半導体圧力センサ
の構成を示す構成図である。 １……センサチツプ、２……凹部、３……起歪
部、４……固定部、５……剪断形ゲージ、６，１
０……ガラス基板、８，１２……支持台。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ゲージが形成されたセンサチツプがガラ
    ス基板に陽極接合されこのガラス基板が支持台に
    固定された半導体圧力センサにおいて、前記ガラ
    ス基板と前記支持台の熱膨張係数の値を変えて、
    この熱膨脹係数の差により前記ガラス基板を前記
    支持台に固定したことを特徴とする半導体圧力セ
    ンサ。
JP98988U 1988-01-08 1988-01-08 Pending JPH01105837U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP98988U JPH01105837U (ja) 1988-01-08 1988-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP98988U JPH01105837U (ja) 1988-01-08 1988-01-08

Publications (1)

Publication Number Publication Date
JPH01105837U true JPH01105837U (ja) 1989-07-17

Family

ID=31200488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP98988U Pending JPH01105837U (ja) 1988-01-08 1988-01-08

Country Status (1)

Country Link
JP (1) JPH01105837U (ja)

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