JPH01103248U - - Google Patents
Info
- Publication number
- JPH01103248U JPH01103248U JP19997387U JP19997387U JPH01103248U JP H01103248 U JPH01103248 U JP H01103248U JP 19997387 U JP19997387 U JP 19997387U JP 19997387 U JP19997387 U JP 19997387U JP H01103248 U JPH01103248 U JP H01103248U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- front plate
- ion beam
- beam extraction
- extraction slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19997387U JPH0531798Y2 (es) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19997387U JPH0531798Y2 (es) | 1987-12-28 | 1987-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01103248U true JPH01103248U (es) | 1989-07-12 |
| JPH0531798Y2 JPH0531798Y2 (es) | 1993-08-16 |
Family
ID=31490402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19997387U Expired - Lifetime JPH0531798Y2 (es) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0531798Y2 (es) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03219540A (ja) * | 1989-11-14 | 1991-09-26 | Tokyo Electron Ltd | イオン源 |
| JPH07153417A (ja) * | 1993-11-26 | 1995-06-16 | Tel Varian Ltd | イオン注入装置 |
| JP2021507462A (ja) * | 2017-12-19 | 2021-02-22 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | イオン源の動的温度制御 |
-
1987
- 1987-12-28 JP JP19997387U patent/JPH0531798Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03219540A (ja) * | 1989-11-14 | 1991-09-26 | Tokyo Electron Ltd | イオン源 |
| JPH07153417A (ja) * | 1993-11-26 | 1995-06-16 | Tel Varian Ltd | イオン注入装置 |
| JP2021507462A (ja) * | 2017-12-19 | 2021-02-22 | ヴァリアン セミコンダクター イクイップメント アソシエイツ インコーポレイテッド | イオン源の動的温度制御 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0531798Y2 (es) | 1993-08-16 |