JPH0337742U - - Google Patents
Info
- Publication number
- JPH0337742U JPH0337742U JP9804989U JP9804989U JPH0337742U JP H0337742 U JPH0337742 U JP H0337742U JP 9804989 U JP9804989 U JP 9804989U JP 9804989 U JP9804989 U JP 9804989U JP H0337742 U JPH0337742 U JP H0337742U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- ion source
- gas inlet
- buffle
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9804989U JPH0337742U (es) | 1989-08-23 | 1989-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9804989U JPH0337742U (es) | 1989-08-23 | 1989-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0337742U true JPH0337742U (es) | 1991-04-11 |
Family
ID=31647166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9804989U Pending JPH0337742U (es) | 1989-08-23 | 1989-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337742U (es) |
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1989
- 1989-08-23 JP JP9804989U patent/JPH0337742U/ja active Pending