JPH0337742U - - Google Patents
Info
- Publication number
- JPH0337742U JPH0337742U JP9804989U JP9804989U JPH0337742U JP H0337742 U JPH0337742 U JP H0337742U JP 9804989 U JP9804989 U JP 9804989U JP 9804989 U JP9804989 U JP 9804989U JP H0337742 U JPH0337742 U JP H0337742U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- ion source
- gas inlet
- buffle
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
を示す断面図である。第２図は、第１図中のバツ
フルを示す斜視図である。第３図は、バツフルの
他の例を示す断面図である。第４図Ａは従来のイ
オン源の一例を示す断面図であり、同図Ｂはその
ビーム強度分布の一例を示す図である。
４……プラズマ生成容器、４１……スリツト、
４２……ガス導入口、６……フイラメント、１０
……ガス、１２……プラズマ、１４……イオンビ
ーム、２０……実施例に係るイオン源、２２……
バツフル、２２１……前面。
FIG. 1 is a sectional view showing an ion source according to an embodiment of this invention. FIG. 2 is a perspective view showing the buttful in FIG. 1. FIG. 3 is a sectional view showing another example of the buttful. FIG. 4A is a sectional view showing an example of a conventional ion source, and FIG. 4B is a diagram showing an example of the beam intensity distribution. 4... Plasma generation container, 41... Slit,
42...Gas inlet, 6...Filament, 10
... Gas, 12 ... Plasma, 14 ... Ion beam, 20 ... Ion source according to the example, 22 ...
Batsuful, 221...front.
Claims (1)
しガス導入口を後面部に有するプラズマ生成容器
内に、そのスリツトに沿つて棒状のフイラメント
を配置した構造のイオン源において、前記プラズ
マ生成容器内の後面部に、前記ガス導入口を覆う
ように、前面が前記スリツトの長手方向に沿つて
中央部が高く両側が次第に低くなつているバツフ
ルを設けたことを特徴とするイオン源。 In an ion source that has a structure in which a rod-shaped filament is arranged along the slit in a plasma generation container that has a slit for extracting the ion beam in the front part and a gas inlet in the rear part, An ion source characterized in that a front surface is provided with a buffle that is high in the center and gradually lowered on both sides along the longitudinal direction of the slit so as to cover the gas inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9804989U JPH0337742U (en) | 1989-08-23 | 1989-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9804989U JPH0337742U (en) | 1989-08-23 | 1989-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0337742U true JPH0337742U (en) | 1991-04-11 |
Family
ID=31647166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9804989U Pending JPH0337742U (en) | 1989-08-23 | 1989-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337742U (en) |
-
1989
- 1989-08-23 JP JP9804989U patent/JPH0337742U/ja active Pending