JPH01102809U - - Google Patents

Info

Publication number
JPH01102809U
JPH01102809U JP20037687U JP20037687U JPH01102809U JP H01102809 U JPH01102809 U JP H01102809U JP 20037687 U JP20037687 U JP 20037687U JP 20037687 U JP20037687 U JP 20037687U JP H01102809 U JPH01102809 U JP H01102809U
Authority
JP
Japan
Prior art keywords
measurement
beams
parallel
measured
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20037687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20037687U priority Critical patent/JPH01102809U/ja
Publication of JPH01102809U publication Critical patent/JPH01102809U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP20037687U 1987-12-28 1987-12-28 Pending JPH01102809U (tr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20037687U JPH01102809U (tr) 1987-12-28 1987-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20037687U JPH01102809U (tr) 1987-12-28 1987-12-28

Publications (1)

Publication Number Publication Date
JPH01102809U true JPH01102809U (tr) 1989-07-11

Family

ID=31490785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20037687U Pending JPH01102809U (tr) 1987-12-28 1987-12-28

Country Status (1)

Country Link
JP (1) JPH01102809U (tr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012511158A (ja) * 2008-12-08 2012-05-17 アイメック 物体の表面形状を決定するための方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012511158A (ja) * 2008-12-08 2012-05-17 アイメック 物体の表面形状を決定するための方法および装置

Similar Documents

Publication Publication Date Title
US5080491A (en) Laser optical ultarasound detection using two interferometer systems
US4554836A (en) Laser vibrometer
US3904295A (en) Method and apparatus for the no-contact measurement of velocities, changes in relative position, or displacement paths
US4969736A (en) Integrated fiber optic coupled proximity sensor for robotic end effectors and tools
US4902888A (en) Optical fiber sensor
CA1203398A (en) Dual differential interferometer
US3482436A (en) Vibration responsive apparatus
JPH06300520A (ja) 光学式変位測定装置
JPH01167607U (tr)
JP2002213913A (ja) レーザ測長器及びレーザ測長方法
US5541729A (en) Measuring apparatus utilizing diffraction of reflected and transmitted light
JPH10332355A (ja) 干渉測定装置
JPH0339605A (ja) 光学式表面形状測定装置
JPH06174844A (ja) レーザ測距装置
JPH01102809U (tr)
JPH0569161B2 (tr)
JP2000121318A5 (tr)
US4704031A (en) Rotation rate measuring device
JPS6355035B2 (tr)
JPH0222503A (ja) レーザ干渉測定装置
JP2680356B2 (ja) 干渉計
JPH03118477A (ja) ビーム分岐光学系を用いたレーザドップラ振動計
JPH11108614A (ja) 光波干渉測定装置
JP2507790B2 (ja) 半導体レ―ザのfm変調特性測定装置
SU1101672A1 (ru) Устройство дл бесконтактного измерени деформаций