JP7829838B2 - 静電チャック - Google Patents

静電チャック

Info

Publication number
JP7829838B2
JP7829838B2 JP2022154960A JP2022154960A JP7829838B2 JP 7829838 B2 JP7829838 B2 JP 7829838B2 JP 2022154960 A JP2022154960 A JP 2022154960A JP 2022154960 A JP2022154960 A JP 2022154960A JP 7829838 B2 JP7829838 B2 JP 7829838B2
Authority
JP
Japan
Prior art keywords
power supply
supply terminals
heater element
zones
annular portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022154960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023147159A5 (https=
JP2023147159A (ja
Inventor
瑛人 小野
哲朗 糸山
智樹 梅津
淳平 上藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to KR1020230014667A priority Critical patent/KR102716890B1/ko
Priority to US18/121,627 priority patent/US12341050B2/en
Priority to CN202310302696.2A priority patent/CN116895591A/zh
Publication of JP2023147159A publication Critical patent/JP2023147159A/ja
Priority to US19/223,387 priority patent/US20250293071A1/en
Publication of JP2023147159A5 publication Critical patent/JP2023147159A5/ja
Application granted granted Critical
Publication of JP7829838B2 publication Critical patent/JP7829838B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2022154960A 2022-03-29 2022-09-28 静電チャック Active JP7829838B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020230014667A KR102716890B1 (ko) 2022-03-29 2023-02-03 정전 척
US18/121,627 US12341050B2 (en) 2022-03-29 2023-03-15 Electrostatic chuck
CN202310302696.2A CN116895591A (zh) 2022-03-29 2023-03-27 静电吸盘
US19/223,387 US20250293071A1 (en) 2022-03-29 2025-05-30 Electrostatic chuck

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022053876 2022-03-29
JP2022053876 2022-03-29

Publications (3)

Publication Number Publication Date
JP2023147159A JP2023147159A (ja) 2023-10-12
JP2023147159A5 JP2023147159A5 (https=) 2025-07-22
JP7829838B2 true JP7829838B2 (ja) 2026-03-16

Family

ID=88287123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022154960A Active JP7829838B2 (ja) 2022-03-29 2022-09-28 静電チャック

Country Status (1)

Country Link
JP (1) JP7829838B2 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003524885A (ja) 1999-09-29 2003-08-19 東京エレクトロン株式会社 多重領域抵抗ヒータ
JP2016526289A (ja) 2013-05-07 2016-09-01 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 最小限のクロストークで熱的に分離されたゾーンを有する静電チャック
JP2017163157A (ja) 2014-11-20 2017-09-14 住友大阪セメント株式会社 静電チャック装置
JP2018170501A (ja) 2017-03-29 2018-11-01 Toto株式会社 静電チャック

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2844915B2 (ja) * 1990-11-21 1999-01-13 富士電機株式会社 薄膜形成用基板加熱装置
JP7411383B2 (ja) * 2019-11-05 2024-01-11 日本特殊陶業株式会社 加熱装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003524885A (ja) 1999-09-29 2003-08-19 東京エレクトロン株式会社 多重領域抵抗ヒータ
JP2016526289A (ja) 2013-05-07 2016-09-01 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 最小限のクロストークで熱的に分離されたゾーンを有する静電チャック
JP2017163157A (ja) 2014-11-20 2017-09-14 住友大阪セメント株式会社 静電チャック装置
JP2018170501A (ja) 2017-03-29 2018-11-01 Toto株式会社 静電チャック

Also Published As

Publication number Publication date
JP2023147159A (ja) 2023-10-12

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