JP7787916B2 - 球状シリカ粉末 - Google Patents

球状シリカ粉末

Info

Publication number
JP7787916B2
JP7787916B2 JP2023580232A JP2023580232A JP7787916B2 JP 7787916 B2 JP7787916 B2 JP 7787916B2 JP 2023580232 A JP2023580232 A JP 2023580232A JP 2023580232 A JP2023580232 A JP 2023580232A JP 7787916 B2 JP7787916 B2 JP 7787916B2
Authority
JP
Japan
Prior art keywords
spherical silica
silica powder
content
particle size
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023580232A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023153355A1 (https=
JPWO2023153355A5 (https=
Inventor
孝明 南川
宏幸 塩月
源太 狩野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denka Co Ltd
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denka Co Ltd, Denki Kagaku Kogyo KK filed Critical Denka Co Ltd
Publication of JPWO2023153355A1 publication Critical patent/JPWO2023153355A1/ja
Publication of JPWO2023153355A5 publication Critical patent/JPWO2023153355A5/ja
Application granted granted Critical
Publication of JP7787916B2 publication Critical patent/JP7787916B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C01B33/187Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by acidic treatment of silicates
    • C01B33/193Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by acidic treatment of silicates of aqueous solutions of silicates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00Use of ingredients characterised by shape
    • C08K7/16Solid spheres
    • C08K7/18Solid spheres inorganic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02Column chromatography
    • G01N30/88Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/96Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation using ion-exchange
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/02Amorphous compounds
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/70Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/30Particle morphology extending in three dimensions
    • C01P2004/32Spheres
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00Specific properties of additives
    • C08K2201/002Physical properties
    • C08K2201/003Additives being defined by their diameter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Silicon Compounds (AREA)
  • Cosmetics (AREA)
JP2023580232A 2022-02-09 2023-02-06 球状シリカ粉末 Active JP7787916B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022018506 2022-02-09
JP2022018506 2022-02-09
PCT/JP2023/003765 WO2023153355A1 (ja) 2022-02-09 2023-02-06 球状シリカ粉末

Publications (3)

Publication Number Publication Date
JPWO2023153355A1 JPWO2023153355A1 (https=) 2023-08-17
JPWO2023153355A5 JPWO2023153355A5 (https=) 2024-09-20
JP7787916B2 true JP7787916B2 (ja) 2025-12-17

Family

ID=87564420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023580232A Active JP7787916B2 (ja) 2022-02-09 2023-02-06 球状シリカ粉末

Country Status (6)

Country Link
US (1) US20250033982A1 (https=)
EP (1) EP4464661A1 (https=)
JP (1) JP7787916B2 (https=)
KR (1) KR20240144977A (https=)
CN (1) CN118742513A (https=)
WO (1) WO2023153355A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000086228A (ja) 1998-09-10 2000-03-28 Denki Kagaku Kogyo Kk 球状シリカ粒子及びその製造方法
JP2002037620A (ja) 2000-07-25 2002-02-06 Ube Nitto Kasei Co Ltd 真球状シリカ粒子集合体、その製造方法およびそれを用いた樹脂組成物
JP2007099548A (ja) 2005-10-03 2007-04-19 Shikoku Res Inst Inc シリカ粉体の製法およびそれによって得られたシリカ粉体
JP2017178703A (ja) 2016-03-30 2017-10-05 日揮触媒化成株式会社 シリカ系複合粒子分散液の製造方法
JP2019081672A (ja) 2017-10-30 2019-05-30 日揮触媒化成株式会社 セリア系複合微粒子分散液、その製造方法及びセリア系複合微粒子分散液を含む研磨用砥粒分散液
WO2019167618A1 (ja) 2018-03-01 2019-09-06 株式会社トクヤマ 溶融球状シリカ粉末およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4030668B2 (ja) 1998-12-25 2008-01-09 株式会社トクヤマ 溶融球状シリカの製造方法
JP7628401B2 (ja) 2020-07-15 2025-02-10 浜松ホトニクス株式会社 半導体部材の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000086228A (ja) 1998-09-10 2000-03-28 Denki Kagaku Kogyo Kk 球状シリカ粒子及びその製造方法
JP2002037620A (ja) 2000-07-25 2002-02-06 Ube Nitto Kasei Co Ltd 真球状シリカ粒子集合体、その製造方法およびそれを用いた樹脂組成物
JP2007099548A (ja) 2005-10-03 2007-04-19 Shikoku Res Inst Inc シリカ粉体の製法およびそれによって得られたシリカ粉体
JP2017178703A (ja) 2016-03-30 2017-10-05 日揮触媒化成株式会社 シリカ系複合粒子分散液の製造方法
JP2019081672A (ja) 2017-10-30 2019-05-30 日揮触媒化成株式会社 セリア系複合微粒子分散液、その製造方法及びセリア系複合微粒子分散液を含む研磨用砥粒分散液
WO2019167618A1 (ja) 2018-03-01 2019-09-06 株式会社トクヤマ 溶融球状シリカ粉末およびその製造方法

Also Published As

Publication number Publication date
JPWO2023153355A1 (https=) 2023-08-17
EP4464661A1 (en) 2024-11-20
US20250033982A1 (en) 2025-01-30
WO2023153355A1 (ja) 2023-08-17
CN118742513A (zh) 2024-10-01
KR20240144977A (ko) 2024-10-04

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