JP7757567B2 - 塗布ヘッド、塗布装置および塗布方法 - Google Patents

塗布ヘッド、塗布装置および塗布方法

Info

Publication number
JP7757567B2
JP7757567B2 JP2025505002A JP2025505002A JP7757567B2 JP 7757567 B2 JP7757567 B2 JP 7757567B2 JP 2025505002 A JP2025505002 A JP 2025505002A JP 2025505002 A JP2025505002 A JP 2025505002A JP 7757567 B2 JP7757567 B2 JP 7757567B2
Authority
JP
Japan
Prior art keywords
coating
slit
coating liquid
manifold
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2025505002A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024185089A1 (https=
JPWO2024185089A5 (https=
Inventor
直美 信田
勝之 内藤
俊郎 平岡
智博 戸張
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Energy Systems and Solutions Corp filed Critical Toshiba Corp
Publication of JPWO2024185089A1 publication Critical patent/JPWO2024185089A1/ja
Publication of JPWO2024185089A5 publication Critical patent/JPWO2024185089A5/ja
Application granted granted Critical
Publication of JP7757567B2 publication Critical patent/JP7757567B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B05D3/0263—After-treatment with IR heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0413—Heating with air

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating Apparatus (AREA)
JP2025505002A 2023-03-08 2023-03-08 塗布ヘッド、塗布装置および塗布方法 Active JP7757567B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/008878 WO2024185089A1 (ja) 2023-03-08 2023-03-08 塗布ヘッド、塗布装置および塗布方法

Publications (3)

Publication Number Publication Date
JPWO2024185089A1 JPWO2024185089A1 (https=) 2024-09-12
JPWO2024185089A5 JPWO2024185089A5 (https=) 2025-04-18
JP7757567B2 true JP7757567B2 (ja) 2025-10-21

Family

ID=92674293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025505002A Active JP7757567B2 (ja) 2023-03-08 2023-03-08 塗布ヘッド、塗布装置および塗布方法

Country Status (5)

Country Link
US (1) US20250187034A1 (https=)
EP (1) EP4563242A1 (https=)
JP (1) JP7757567B2 (https=)
CN (1) CN119744203A (https=)
WO (1) WO2024185089A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7813988B2 (ja) * 2020-11-11 2026-02-16 パナソニックＩｐマネジメント株式会社 電極合剤スラリーの塗工装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000033313A (ja) 1998-07-15 2000-02-02 Dainippon Printing Co Ltd ダイヘッドの洗浄方法及びそれに使用する着脱式ブロック並びに該洗浄方法を行うためのダイヘッド
JP2002254009A (ja) 2001-03-05 2002-09-10 Sony Corp ダイコーティング用ダイヘッド及びダイコーティング装置
JP2005144376A (ja) 2003-11-18 2005-06-09 Dainippon Screen Mfg Co Ltd 基板処理装置、スリットノズル、被充填体における液体充填度判定構造および気体混入度判定構造
JP2017104793A (ja) 2015-12-08 2017-06-15 三菱マテリアル株式会社 塗布装置および塗布方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0871480A (ja) * 1994-08-31 1996-03-19 Sony Corp 塗布装置
JPH1176898A (ja) * 1997-09-11 1999-03-23 Victor Co Of Japan Ltd 塗布装置
JPH11169768A (ja) * 1997-12-17 1999-06-29 Sony Corp 塗布装置
JP2013215644A (ja) 2012-04-05 2013-10-24 Fujifilm Corp 塗布方法及び塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000033313A (ja) 1998-07-15 2000-02-02 Dainippon Printing Co Ltd ダイヘッドの洗浄方法及びそれに使用する着脱式ブロック並びに該洗浄方法を行うためのダイヘッド
JP2002254009A (ja) 2001-03-05 2002-09-10 Sony Corp ダイコーティング用ダイヘッド及びダイコーティング装置
JP2005144376A (ja) 2003-11-18 2005-06-09 Dainippon Screen Mfg Co Ltd 基板処理装置、スリットノズル、被充填体における液体充填度判定構造および気体混入度判定構造
JP2017104793A (ja) 2015-12-08 2017-06-15 三菱マテリアル株式会社 塗布装置および塗布方法

Also Published As

Publication number Publication date
CN119744203A (zh) 2025-04-01
WO2024185089A1 (ja) 2024-09-12
JPWO2024185089A1 (https=) 2024-09-12
US20250187034A1 (en) 2025-06-12
EP4563242A1 (en) 2025-06-04

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