CN119744203A - 涂敷头、涂敷装置以及涂敷方法 - Google Patents

涂敷头、涂敷装置以及涂敷方法 Download PDF

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Publication number
CN119744203A
CN119744203A CN202380061041.9A CN202380061041A CN119744203A CN 119744203 A CN119744203 A CN 119744203A CN 202380061041 A CN202380061041 A CN 202380061041A CN 119744203 A CN119744203 A CN 119744203A
Authority
CN
China
Prior art keywords
coating
coating liquid
head
manifold
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380061041.9A
Other languages
English (en)
Chinese (zh)
Inventor
信田直美
内藤胜之
平冈俊郎
户张智博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Energy Systems and Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Energy Systems and Solutions Corp filed Critical Toshiba Corp
Publication of CN119744203A publication Critical patent/CN119744203A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B05D3/0263—After-treatment with IR heaters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0413—Heating with air

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating Apparatus (AREA)
CN202380061041.9A 2023-03-08 2023-03-08 涂敷头、涂敷装置以及涂敷方法 Pending CN119744203A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/008878 WO2024185089A1 (ja) 2023-03-08 2023-03-08 塗布ヘッド、塗布装置および塗布方法

Publications (1)

Publication Number Publication Date
CN119744203A true CN119744203A (zh) 2025-04-01

Family

ID=92674293

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380061041.9A Pending CN119744203A (zh) 2023-03-08 2023-03-08 涂敷头、涂敷装置以及涂敷方法

Country Status (5)

Country Link
US (1) US20250187034A1 (https=)
EP (1) EP4563242A1 (https=)
JP (1) JP7757567B2 (https=)
CN (1) CN119744203A (https=)
WO (1) WO2024185089A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7813988B2 (ja) * 2020-11-11 2026-02-16 パナソニックＩｐマネジメント株式会社 電極合剤スラリーの塗工装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0871480A (ja) * 1994-08-31 1996-03-19 Sony Corp 塗布装置
JPH1176898A (ja) * 1997-09-11 1999-03-23 Victor Co Of Japan Ltd 塗布装置
JPH11169768A (ja) * 1997-12-17 1999-06-29 Sony Corp 塗布装置
JP4236018B2 (ja) * 1998-07-15 2009-03-11 大日本印刷株式会社 ダイヘッドの洗浄方法
JP2002254009A (ja) * 2001-03-05 2002-09-10 Sony Corp ダイコーティング用ダイヘッド及びダイコーティング装置
JP4315787B2 (ja) * 2003-11-18 2009-08-19 大日本スクリーン製造株式会社 基板処理装置、並びに被充填体における液体充填度および気体混入度判定構造
JP2013215644A (ja) 2012-04-05 2013-10-24 Fujifilm Corp 塗布方法及び塗布装置
JP2017104793A (ja) * 2015-12-08 2017-06-15 三菱マテリアル株式会社 塗布装置および塗布方法

Also Published As

Publication number Publication date
WO2024185089A1 (ja) 2024-09-12
JPWO2024185089A1 (https=) 2024-09-12
US20250187034A1 (en) 2025-06-12
JP7757567B2 (ja) 2025-10-21
EP4563242A1 (en) 2025-06-04

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