JP7703011B2 - プロセストレースからの装置故障モードの予測 - Google Patents

プロセストレースからの装置故障モードの予測 Download PDF

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JP7703011B2
JP7703011B2 JP2023504511A JP2023504511A JP7703011B2 JP 7703011 B2 JP7703011 B2 JP 7703011B2 JP 2023504511 A JP2023504511 A JP 2023504511A JP 2023504511 A JP2023504511 A JP 2023504511A JP 7703011 B2 JP7703011 B2 JP 7703011B2
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trace data
anomaly
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database
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JP2023535721A (ja
JP2023535721A5 (https=
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バーチ，リチャード
一樹 国俊
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ピーディーエフ ソリューションズ，インコーポレイテッド
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0275—Fault isolation and identification, e.g. classify fault; estimate cause or root of failure
    • G05B23/0278—Qualitative, e.g. if-then rules; Fuzzy logic; Lookup tables; Symptomatic search; FMEA
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0706—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0751—Error or fault detection not based on redundancy
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0766—Error or fault reporting or storing
    • G06F11/0778—Dumping, i.e. gathering error/state information after a fault for later diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/079—Root cause analysis, i.e. error or fault diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0793—Remedial or corrective actions
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3452—Performance evaluation by statistical analysis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3466—Performance evaluation by tracing or monitoring
    • G06F11/348—Circuit details, i.e. tracer hardware
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Mathematical Physics (AREA)
  • Automation & Control Theory (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Probability & Statistics with Applications (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • Fuzzy Systems (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Computational Linguistics (AREA)
  • Data Mining & Analysis (AREA)
  • Databases & Information Systems (AREA)
JP2023504511A 2020-07-23 2021-07-22 プロセストレースからの装置故障モードの予測 Active JP7703011B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063055893P 2020-07-23 2020-07-23
US63/055,893 2020-07-23
PCT/US2021/042842 WO2022020642A1 (en) 2020-07-23 2021-07-22 Predicting equipment fail mode from process trace

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JP2023535721A JP2023535721A (ja) 2023-08-21
JP2023535721A5 JP2023535721A5 (https=) 2024-07-26
JP7703011B2 true JP7703011B2 (ja) 2025-07-04

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US (1) US11640328B2 (https=)
EP (1) EP4162395A4 (https=)
JP (1) JP7703011B2 (https=)
KR (1) KR20230042041A (https=)
CN (1) CN116113942A (https=)
TW (1) TWI887455B (https=)
WO (1) WO2022020642A1 (https=)

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CN114764550B (zh) * 2021-01-12 2025-09-30 联华电子股份有限公司 失效检测与分类模型的运作方法与运作装置
US12372952B2 (en) * 2022-05-19 2025-07-29 Applied Materials, Inc. Guardbands in substrate processing systems
US12019507B2 (en) * 2022-05-19 2024-06-25 Applied Materials, Inc. Guardbands in substrate processing systems
US12566660B2 (en) * 2022-05-19 2026-03-03 Applied Materials, Inc Guardbands in substrate processing systems
US20240169215A1 (en) * 2022-11-21 2024-05-23 Disney Enterprises, Inc. Machine Learning Model-Based Anomaly Prediction and Mitigation
KR20240083695A (ko) * 2022-12-05 2024-06-12 세메스 주식회사 심층 학습 기반 분석 시스템 및 그의 동작 방법
CN116629707B (zh) * 2023-07-20 2023-10-20 合肥喆塔科技有限公司 基于分布式并行计算的fdc溯因分析方法及存储介质
US20250157271A1 (en) * 2023-11-14 2025-05-15 Mercedes-Benz Group AG Method, electronic device, and autonomous driving system for error event analysis

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JP2017207894A (ja) 2016-05-18 2017-11-24 株式会社日立システムズ 統合監視運用システムおよび方法
JP2018178157A (ja) 2017-04-05 2018-11-15 株式会社荏原製作所 半導体製造装置、半導体製造装置の故障予知方法、および半導体製造装置の故障予知プログラム
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JP2017207894A (ja) 2016-05-18 2017-11-24 株式会社日立システムズ 統合監視運用システムおよび方法
JP2018178157A (ja) 2017-04-05 2018-11-15 株式会社荏原製作所 半導体製造装置、半導体製造装置の故障予知方法、および半導体製造装置の故障予知プログラム
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EP4162395A1 (en) 2023-04-12
JP2023535721A (ja) 2023-08-21
US20220027230A1 (en) 2022-01-27
EP4162395A4 (en) 2024-03-27
WO2022020642A1 (en) 2022-01-27
CN116113942A (zh) 2023-05-12
KR20230042041A (ko) 2023-03-27
TW202211341A (zh) 2022-03-16
TWI887455B (zh) 2025-06-21
US11640328B2 (en) 2023-05-02

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