KR20230042041A - 공정 트레이스로부터의 장비 고장 모드의 예측 - Google Patents

공정 트레이스로부터의 장비 고장 모드의 예측 Download PDF

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Publication number
KR20230042041A
KR20230042041A KR1020237005035A KR20237005035A KR20230042041A KR 20230042041 A KR20230042041 A KR 20230042041A KR 1020237005035 A KR1020237005035 A KR 1020237005035A KR 20237005035 A KR20237005035 A KR 20237005035A KR 20230042041 A KR20230042041 A KR 20230042041A
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trace data
root cause
database
anomaly
searching
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Korean (ko)
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리차드 버치
카즈키 쿠니토시
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피디에프 솔루션즈, 인코포레이티드
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Publication of KR20230042041A publication Critical patent/KR20230042041A/ko
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0706—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0275—Fault isolation and identification, e.g. classify fault; estimate cause or root of failure
    • G05B23/0278—Qualitative, e.g. if-then rules; Fuzzy logic; Lookup tables; Symptomatic search; FMEA
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0751—Error or fault detection not based on redundancy
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0766—Error or fault reporting or storing
    • G06F11/0778—Dumping, i.e. gathering error/state information after a fault for later diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/079—Root cause analysis, i.e. error or fault diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0793—Remedial or corrective actions
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3452—Performance evaluation by statistical analysis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3466—Performance evaluation by tracing or monitoring
    • G06F11/348—Circuit details, i.e. tracer hardware
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Mathematical Physics (AREA)
  • Automation & Control Theory (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Probability & Statistics with Applications (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • Fuzzy Systems (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Computational Linguistics (AREA)
  • Data Mining & Analysis (AREA)
  • Databases & Information Systems (AREA)
KR1020237005035A 2020-07-23 2021-07-22 공정 트레이스로부터의 장비 고장 모드의 예측 Pending KR20230042041A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063055893P 2020-07-23 2020-07-23
US63/055,893 2020-07-23
PCT/US2021/042842 WO2022020642A1 (en) 2020-07-23 2021-07-22 Predicting equipment fail mode from process trace

Publications (1)

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KR20230042041A true KR20230042041A (ko) 2023-03-27

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Country Status (7)

Country Link
US (1) US11640328B2 (https=)
EP (1) EP4162395A4 (https=)
JP (1) JP7703011B2 (https=)
KR (1) KR20230042041A (https=)
CN (1) CN116113942A (https=)
TW (1) TWI887455B (https=)
WO (1) WO2022020642A1 (https=)

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US12372952B2 (en) * 2022-05-19 2025-07-29 Applied Materials, Inc. Guardbands in substrate processing systems
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CN116629707B (zh) * 2023-07-20 2023-10-20 合肥喆塔科技有限公司 基于分布式并行计算的fdc溯因分析方法及存储介质
US20250157271A1 (en) * 2023-11-14 2025-05-15 Mercedes-Benz Group AG Method, electronic device, and autonomous driving system for error event analysis

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JP2006099249A (ja) * 2004-09-28 2006-04-13 Fujitsu Ltd 障害管理装置および障害管理方法
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Publication number Publication date
EP4162395A1 (en) 2023-04-12
JP7703011B2 (ja) 2025-07-04
JP2023535721A (ja) 2023-08-21
US20220027230A1 (en) 2022-01-27
EP4162395A4 (en) 2024-03-27
WO2022020642A1 (en) 2022-01-27
CN116113942A (zh) 2023-05-12
TW202211341A (zh) 2022-03-16
TWI887455B (zh) 2025-06-21
US11640328B2 (en) 2023-05-02

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