JP2023535721A5 - - Google Patents
Info
- Publication number
- JP2023535721A5 JP2023535721A5 JP2023504511A JP2023504511A JP2023535721A5 JP 2023535721 A5 JP2023535721 A5 JP 2023535721A5 JP 2023504511 A JP2023504511 A JP 2023504511A JP 2023504511 A JP2023504511 A JP 2023504511A JP 2023535721 A5 JP2023535721 A5 JP 2023535721A5
- Authority
- JP
- Japan
- Prior art keywords
- trace data
- anomaly
- machine learning
- learning model
- root cause
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063055893P | 2020-07-23 | 2020-07-23 | |
| US63/055,893 | 2020-07-23 | ||
| PCT/US2021/042842 WO2022020642A1 (en) | 2020-07-23 | 2021-07-22 | Predicting equipment fail mode from process trace |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023535721A JP2023535721A (ja) | 2023-08-21 |
| JP2023535721A5 true JP2023535721A5 (https=) | 2024-07-26 |
| JP7703011B2 JP7703011B2 (ja) | 2025-07-04 |
Family
ID=79688227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023504511A Active JP7703011B2 (ja) | 2020-07-23 | 2021-07-22 | プロセストレースからの装置故障モードの予測 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11640328B2 (https=) |
| EP (1) | EP4162395A4 (https=) |
| JP (1) | JP7703011B2 (https=) |
| KR (1) | KR20230042041A (https=) |
| CN (1) | CN116113942A (https=) |
| TW (1) | TWI887455B (https=) |
| WO (1) | WO2022020642A1 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11436072B2 (en) * | 2020-02-27 | 2022-09-06 | Hewlett Packard Enterprise Development Lp | System and method for collecting contextual log files from a computing system |
| CN114764550B (zh) * | 2021-01-12 | 2025-09-30 | 联华电子股份有限公司 | 失效检测与分类模型的运作方法与运作装置 |
| US12372952B2 (en) * | 2022-05-19 | 2025-07-29 | Applied Materials, Inc. | Guardbands in substrate processing systems |
| US12019507B2 (en) * | 2022-05-19 | 2024-06-25 | Applied Materials, Inc. | Guardbands in substrate processing systems |
| US12566660B2 (en) * | 2022-05-19 | 2026-03-03 | Applied Materials, Inc | Guardbands in substrate processing systems |
| US20240169215A1 (en) * | 2022-11-21 | 2024-05-23 | Disney Enterprises, Inc. | Machine Learning Model-Based Anomaly Prediction and Mitigation |
| KR20240083695A (ko) * | 2022-12-05 | 2024-06-12 | 세메스 주식회사 | 심층 학습 기반 분석 시스템 및 그의 동작 방법 |
| CN116629707B (zh) * | 2023-07-20 | 2023-10-20 | 合肥喆塔科技有限公司 | 基于分布式并行计算的fdc溯因分析方法及存储介质 |
| US20250157271A1 (en) * | 2023-11-14 | 2025-05-15 | Mercedes-Benz Group AG | Method, electronic device, and autonomous driving system for error event analysis |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160026915A1 (en) * | 2001-01-05 | 2016-01-28 | In-Depth Test Llc | Methods and Apparatus for Data Analysis |
| WO2005054968A1 (en) * | 2003-11-26 | 2005-06-16 | Tokyo Electron Limited | Intelligent system for detection of process status, process fault and preventive maintenance |
| JP2006099249A (ja) * | 2004-09-28 | 2006-04-13 | Fujitsu Ltd | 障害管理装置および障害管理方法 |
| US20080228338A1 (en) * | 2007-03-15 | 2008-09-18 | Honeywell International, Inc. | Automated engine data diagnostic analysis |
| US8046637B2 (en) * | 2009-03-06 | 2011-10-25 | Oracle America, Inc. | Telemetry data filtering through sequential analysis |
| ES2427645B1 (es) * | 2011-11-15 | 2014-09-02 | Telefónica, S.A. | Método para gestionar el rendimiento en aplicaciones de múltiples capas implantadas en una infraestructura de tecnología de información |
| US9298538B2 (en) * | 2012-08-16 | 2016-03-29 | Vmware, Inc. | Methods and systems for abnormality analysis of streamed log data |
| KR102195070B1 (ko) * | 2014-10-10 | 2020-12-24 | 삼성에스디에스 주식회사 | 시계열 데이터의 분석을 통한 이상 감지 및 예측 시스템 및 방법 |
| US10275303B2 (en) * | 2015-10-23 | 2019-04-30 | Oracle International Corporation | Mechanism for running diagnostic rules across multiple nodes |
| TWI797699B (zh) * | 2015-12-22 | 2023-04-01 | 以色列商應用材料以色列公司 | 半導體試樣的基於深度學習之檢查的方法及其系統 |
| JP6847590B2 (ja) * | 2016-05-18 | 2021-03-24 | 株式会社日立システムズ | 統合監視運用システムおよび方法 |
| US10109046B2 (en) | 2016-07-19 | 2018-10-23 | Globalfoundries Inc. | Methods of detecting faults in real-time for semiconductor wafers |
| JP6860406B2 (ja) * | 2017-04-05 | 2021-04-14 | 株式会社荏原製作所 | 半導体製造装置、半導体製造装置の故障予知方法、および半導体製造装置の故障予知プログラム |
| US10546085B2 (en) * | 2017-04-12 | 2020-01-28 | Anchor Semiconductor Inc. | Pattern centric process control |
| SG11202009105YA (en) * | 2018-03-20 | 2020-10-29 | Tokyo Electron Ltd | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same |
| US10685159B2 (en) * | 2018-06-27 | 2020-06-16 | Intel Corporation | Analog functional safety with anomaly detection |
| US11568198B2 (en) * | 2018-09-12 | 2023-01-31 | Applied Materials, Inc. | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools |
| US12067485B2 (en) * | 2018-09-28 | 2024-08-20 | Applied Materials, Inc | Long short-term memory anomaly detection for multi-sensor equipment monitoring |
| US11731232B2 (en) * | 2018-10-30 | 2023-08-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Irregular mechanical motion detection systems and method |
| CN111291096B (zh) * | 2020-03-03 | 2023-07-28 | 腾讯科技（深圳）有限公司 | 数据集构建方法、装置和存储介质及异常指标检测方法 |
| CN111353482B (zh) * | 2020-05-25 | 2020-12-08 | 天津开发区精诺瀚海数据科技有限公司 | 一种基于lstm的疲劳因子隐性异常检测及故障诊断方法 |
-
2021
- 2021-07-22 EP EP21845272.0A patent/EP4162395A4/en active Pending
- 2021-07-22 JP JP2023504511A patent/JP7703011B2/ja active Active
- 2021-07-22 CN CN202180058614.3A patent/CN116113942A/zh active Pending
- 2021-07-22 US US17/383,334 patent/US11640328B2/en active Active
- 2021-07-22 KR KR1020237005035A patent/KR20230042041A/ko active Pending
- 2021-07-22 WO PCT/US2021/042842 patent/WO2022020642A1/en not_active Ceased
- 2021-07-23 TW TW110127131A patent/TWI887455B/zh active
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