JP7670752B2 - 可変のホルベック幾何形状を有するホルベックポンプ段を備える真空ポンプ - Google Patents

可変のホルベック幾何形状を有するホルベックポンプ段を備える真空ポンプ Download PDF

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Publication number
JP7670752B2
JP7670752B2 JP2023087729A JP2023087729A JP7670752B2 JP 7670752 B2 JP7670752 B2 JP 7670752B2 JP 2023087729 A JP2023087729 A JP 2023087729A JP 2023087729 A JP2023087729 A JP 2023087729A JP 7670752 B2 JP7670752 B2 JP 7670752B2
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Prior art keywords
thread
holweck
sleeve
stator sleeve
stator
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JP2023087729A
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Japanese (ja)
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JP2024154350A (ja
Inventor
マクシミリアン・ビルケンフェルト
ハイコ・ブリュック
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プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/20—Three-dimensional
    • F05D2250/23—Three-dimensional prismatic
    • F05D2250/232—Three-dimensional prismatic conical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/20—Three-dimensional
    • F05D2250/29—Three-dimensional machined; miscellaneous
    • F05D2250/294—Three-dimensional machined; miscellaneous grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2023087729A 2023-04-18 2023-05-29 可変のホルベック幾何形状を有するホルベックポンプ段を備える真空ポンプ Active JP7670752B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP23168408 2023-04-18
EP23168408.5A EP4194700B1 (de) 2023-04-18 2023-04-18 Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie

Publications (2)

Publication Number Publication Date
JP2024154350A JP2024154350A (ja) 2024-10-30
JP7670752B2 true JP7670752B2 (ja) 2025-04-30

Family

ID=86053797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023087729A Active JP7670752B2 (ja) 2023-04-18 2023-05-29 可変のホルベック幾何形状を有するホルベックポンプ段を備える真空ポンプ

Country Status (2)

Country Link
EP (1) EP4194700B1 (de)
JP (1) JP7670752B2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4474654B1 (de) * 2024-03-11 2026-02-11 Pfeiffer Vacuum Technology AG Turbomolekularvakuumpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5758303B2 (ja) 2009-12-11 2015-08-05 エドワーズ株式会社 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
JP2023050066A (ja) 2021-09-29 2023-04-10 株式会社島津製作所 真空ポンプ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2222886A5 (de) * 1973-03-21 1974-10-18 Cit Alcatel
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel
EP3657021B1 (de) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN115875280A (zh) * 2021-09-29 2023-03-31 株式会社岛津制作所 真空泵

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5758303B2 (ja) 2009-12-11 2015-08-05 エドワーズ株式会社 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
JP2023050066A (ja) 2021-09-29 2023-04-10 株式会社島津製作所 真空ポンプ

Also Published As

Publication number Publication date
EP4194700B1 (de) 2025-02-12
JP2024154350A (ja) 2024-10-30
EP4194700A1 (de) 2023-06-14

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