JP7642685B2 - ガス選択性膜を用いた温度依存性ガス検出方法 - Google Patents

ガス選択性膜を用いた温度依存性ガス検出方法 Download PDF

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JP7642685B2
JP7642685B2 JP2022580240A JP2022580240A JP7642685B2 JP 7642685 B2 JP7642685 B2 JP 7642685B2 JP 2022580240 A JP2022580240 A JP 2022580240A JP 2022580240 A JP2022580240 A JP 2022580240A JP 7642685 B2 JP7642685 B2 JP 7642685B2
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temperature
gas
membrane
detecting
value
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JP2023531081A (ja
JP2023531081A5 (cg-RX-API-DMAC7.html
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デッカー・シルヴィオ
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2022580240A 2020-06-24 2021-05-25 ガス選択性膜を用いた温度依存性ガス検出方法 Active JP7642685B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020116660.5 2020-06-24
DE102020116660.5A DE102020116660A1 (de) 2020-06-24 2020-06-24 Verfahren zur temperaturabhängigen Gasdetektion mit einer gasselektiven Membran
PCT/EP2021/063924 WO2021259581A1 (de) 2020-06-24 2021-05-25 Verfahren zur temperaturabhängigen gasdetektion mit einer gasselektiven membran

Publications (3)

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JP2023531081A JP2023531081A (ja) 2023-07-20
JP2023531081A5 JP2023531081A5 (cg-RX-API-DMAC7.html) 2024-01-19
JP7642685B2 true JP7642685B2 (ja) 2025-03-10

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JP2022580240A Active JP7642685B2 (ja) 2020-06-24 2021-05-25 ガス選択性膜を用いた温度依存性ガス検出方法

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US (1) US20230204552A1 (cg-RX-API-DMAC7.html)
EP (1) EP4172618B1 (cg-RX-API-DMAC7.html)
JP (1) JP7642685B2 (cg-RX-API-DMAC7.html)
KR (1) KR20230027064A (cg-RX-API-DMAC7.html)
CN (1) CN115769072B (cg-RX-API-DMAC7.html)
DE (1) DE102020116660A1 (cg-RX-API-DMAC7.html)
WO (1) WO2021259581A1 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7278548B2 (ja) * 2020-03-05 2023-05-22 新東工業株式会社 ガス測定器
EP4775981A1 (en) * 2025-01-10 2026-07-15 Inficon GmbH Gas detection system and method for modulation of a target gas concentration

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002202235A (ja) 2001-01-04 2002-07-19 Horiba Ltd ガス濃度測定装置
JP2008541076A (ja) 2005-05-12 2008-11-20 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング クオーツウィンドウセンサを備えたスニッファ漏れ検知器
JP2009540268A (ja) 2006-06-03 2009-11-19 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 加熱可能なガス選択性透過膜を有するガスセンサ
DE102016200270A1 (de) 2016-01-13 2017-07-13 Robert Bosch Gmbh Vorrichtung und Verfahren zum Detektieren eines Fluids
JP2018179581A (ja) 2017-04-05 2018-11-15 株式会社日立製作所 ガスセンサおよびガス検出方法

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DE1302826B (cg-RX-API-DMAC7.html) * 1962-07-16 Ges Fuer Kernforschung Mbh
DE4326265A1 (de) 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
DE19521275A1 (de) * 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche
DE10000496A1 (de) * 2000-01-08 2001-07-12 Bosch Gmbh Robert Gasströmungs-Bestimmungsverfahren und -vorrichtung
DE10125837B4 (de) * 2001-05-25 2005-02-24 Wma Airsense Analysentechnik Gmbh Gasdetektor zur Erfassung von gasförmigen Verbindungen
DE10220944C1 (de) * 2002-04-29 2003-12-18 Ufz Leipzighalle Gmbh Messverfahren und Messzelle zur Bestimmung der Einzelgaskonzentrationen in einem Fluid
EP1631805B1 (en) * 2003-06-11 2016-07-20 Agilent Technologies, Inc. Methods and apparatus for leak detection by the accumulation method
KR100561908B1 (ko) 2003-12-26 2006-03-20 한국전자통신연구원 센서 구조체 및 그 제조방법
US20060120920A1 (en) * 2004-12-06 2006-06-08 Gas Technology Institute Hydrogen or helium sensor
US7497110B2 (en) 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
US20080202210A1 (en) 2007-02-28 2008-08-28 Varian, Inc. Test gas leak detection using a composite membrane
US7905132B1 (en) * 2007-08-14 2011-03-15 LACO Technologies, Inc. Leak testing using tracer gas permeable membrane
US8555704B2 (en) 2008-10-20 2013-10-15 Agilent Technologies, Inc. Calibration systems and methods for tracer gas leak detection
CN102292631A (zh) * 2008-11-26 2011-12-21 松下电器产业株式会社 氮氧化物检测元件、氮氧化物检测传感器和使用其的氮氧化物浓度测定装置及氮氧化物浓度测定方法
DE102009030180A1 (de) 2009-06-24 2010-12-30 Inficon Gmbh Wasserstoffsensor
DE102009047354A1 (de) * 2009-12-01 2011-06-09 Robert Bosch Gmbh Verfahren und Steuergerät zur Detektion einer Gaskonzentration eines Gases aus einem Gasgemisch
DE102013227014A1 (de) * 2013-12-20 2015-06-25 Robert Bosch Gmbh Fluidsensor zur Detektion von fluiden Medien
US9884269B2 (en) * 2015-12-10 2018-02-06 General Electric Company Methods and systems for selective hydrogen gas extraction for dissolved gas analysis applications

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002202235A (ja) 2001-01-04 2002-07-19 Horiba Ltd ガス濃度測定装置
JP2008541076A (ja) 2005-05-12 2008-11-20 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング クオーツウィンドウセンサを備えたスニッファ漏れ検知器
JP2009540268A (ja) 2006-06-03 2009-11-19 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 加熱可能なガス選択性透過膜を有するガスセンサ
DE102016200270A1 (de) 2016-01-13 2017-07-13 Robert Bosch Gmbh Vorrichtung und Verfahren zum Detektieren eines Fluids
JP2018179581A (ja) 2017-04-05 2018-11-15 株式会社日立製作所 ガスセンサおよびガス検出方法

Also Published As

Publication number Publication date
JP2023531081A (ja) 2023-07-20
CN115769072B (zh) 2025-05-16
EP4172618A1 (de) 2023-05-03
EP4172618B1 (de) 2025-08-27
KR20230027064A (ko) 2023-02-27
DE102020116660A1 (de) 2021-12-30
CN115769072A (zh) 2023-03-07
WO2021259581A1 (de) 2021-12-30
US20230204552A1 (en) 2023-06-29

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