JP7634139B1 - 半導体洗浄用薬液および半導体洗浄用薬液の製造方法 - Google Patents

半導体洗浄用薬液および半導体洗浄用薬液の製造方法 Download PDF

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JP7634139B1
JP7634139B1 JP2024551616A JP2024551616A JP7634139B1 JP 7634139 B1 JP7634139 B1 JP 7634139B1 JP 2024551616 A JP2024551616 A JP 2024551616A JP 2024551616 A JP2024551616 A JP 2024551616A JP 7634139 B1 JP7634139 B1 JP 7634139B1
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continuous reactor
alcohol
gas
content
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JPWO2024257504A5 (https=
JPWO2024257504A1 (https=
Inventor
俊輔 保坂
貴史 徳永
義晶 山下
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Tokuyama Corp
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Tokuyama Corp
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    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/261—Alcohols; Phenols
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07B—GENERAL METHODS OF ORGANIC CHEMISTRY; APPARATUS THEREFOR
    • C07B61/00—Other general methods
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
    • C07C29/03—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by addition of hydroxy groups to unsaturated carbon-to-carbon bonds, e.g. with the aid of H2O2
    • C07C29/04—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by addition of hydroxy groups to unsaturated carbon-to-carbon bonds, e.g. with the aid of H2O2 by hydration of carbon-to-carbon double bonds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C31/00—Saturated compounds having hydroxy or O-metal groups bound to acyclic carbon atoms
    • C07C31/02—Monohydroxylic acyclic alcohols
    • C07C31/10—Monohydroxylic acyclic alcohols containing three carbon atoms
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2024551616A 2023-06-13 2024-05-07 半導体洗浄用薬液および半導体洗浄用薬液の製造方法 Active JP7634139B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023096884 2023-06-13
JP2023096884 2023-06-13
PCT/JP2024/016925 WO2024257504A1 (ja) 2023-06-13 2024-05-07 半導体薬液および半導体薬液の製造方法

Publications (3)

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JPWO2024257504A1 JPWO2024257504A1 (https=) 2024-12-19
JP7634139B1 true JP7634139B1 (ja) 2025-02-20
JPWO2024257504A5 JPWO2024257504A5 (https=) 2025-05-27

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JP2024551616A Active JP7634139B1 (ja) 2023-06-13 2024-05-07 半導体洗浄用薬液および半導体洗浄用薬液の製造方法

Country Status (5)

Country Link
JP (1) JP7634139B1 (https=)
KR (1) KR20260021637A (https=)
CN (1) CN121039789A (https=)
TW (1) TW202500541A (https=)
WO (1) WO2024257504A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002121160A (ja) * 2000-10-16 2002-04-23 Mitsui Chemicals Inc イソプロピルアルコールの製造方法
WO2017217279A1 (ja) * 2016-06-17 2017-12-21 株式会社トクヤマ イソプロピルアルコールの製造方法及び不純物が低減されたイソプロピルアルコール
WO2021200936A1 (ja) * 2020-04-02 2021-10-07 株式会社トクヤマ 半導体処理液及びその製造方法
WO2023176192A1 (ja) * 2022-03-16 2023-09-21 株式会社トクヤマ 半導体洗浄液および半導体洗浄液の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002121160A (ja) * 2000-10-16 2002-04-23 Mitsui Chemicals Inc イソプロピルアルコールの製造方法
WO2017217279A1 (ja) * 2016-06-17 2017-12-21 株式会社トクヤマ イソプロピルアルコールの製造方法及び不純物が低減されたイソプロピルアルコール
WO2021200936A1 (ja) * 2020-04-02 2021-10-07 株式会社トクヤマ 半導体処理液及びその製造方法
WO2023176192A1 (ja) * 2022-03-16 2023-09-21 株式会社トクヤマ 半導体洗浄液および半導体洗浄液の製造方法

Also Published As

Publication number Publication date
KR20260021637A (ko) 2026-02-13
TW202500541A (zh) 2025-01-01
CN121039789A (zh) 2025-11-28
WO2024257504A1 (ja) 2024-12-19
JPWO2024257504A1 (https=) 2024-12-19

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