JP7606679B2 - 圧電振動素子、圧電振動子及び圧電発振器 - Google Patents

圧電振動素子、圧電振動子及び圧電発振器 Download PDF

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Publication number
JP7606679B2
JP7606679B2 JP2024511988A JP2024511988A JP7606679B2 JP 7606679 B2 JP7606679 B2 JP 7606679B2 JP 2024511988 A JP2024511988 A JP 2024511988A JP 2024511988 A JP2024511988 A JP 2024511988A JP 7606679 B2 JP7606679 B2 JP 7606679B2
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Prior art keywords
excitation electrode
piezoelectric
hole portion
hole
relationship
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JP2024511988A
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Japanese (ja)
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JPWO2024154372A5 (https=
JPWO2024154372A1 (https=
Inventor
俊雄 西村
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2024511988A 2023-01-17 2023-08-03 圧電振動素子、圧電振動子及び圧電発振器 Active JP7606679B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023004855 2023-01-17
JP2023004855 2023-01-17
PCT/JP2023/028449 WO2024154372A1 (ja) 2023-01-17 2023-08-03 圧電振動素子、圧電振動子及び圧電発振器

Publications (3)

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JPWO2024154372A1 JPWO2024154372A1 (https=) 2024-07-25
JPWO2024154372A5 JPWO2024154372A5 (https=) 2024-12-17
JP7606679B2 true JP7606679B2 (ja) 2024-12-26

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ID=91955808

Family Applications (1)

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JP2024511988A Active JP7606679B2 (ja) 2023-01-17 2023-08-03 圧電振動素子、圧電振動子及び圧電発振器

Country Status (4)

Country Link
US (1) US20250293665A1 (https=)
JP (1) JP7606679B2 (https=)
CN (1) CN120584459A (https=)
WO (1) WO2024154372A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001257560A (ja) 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
WO2007032444A1 (ja) 2005-09-15 2007-03-22 Daishinku Corporation 水晶振動子
JP2012165367A (ja) 2011-01-18 2012-08-30 Nippon Dempa Kogyo Co Ltd 圧電振動子及び弾性波デバイス
JP2014175428A (ja) 2013-03-07 2014-09-22 Seiko Epson Corp 接合方法、電子素子、発振器、電子機器および移動体
WO2022080426A1 (ja) 2020-10-13 2022-04-21 株式会社村田製作所 水晶振動素子および水晶振動子
WO2022123816A1 (ja) 2020-12-11 2022-06-16 株式会社村田製作所 圧電振動子、圧電発振器、及び圧電振動子製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537051A (en) * 1978-09-06 1980-03-14 Seikosha Co Ltd Piezoelectric oscillator
JP3235515B2 (ja) * 1996-07-31 2001-12-04 株式会社大真空 圧電振動デバイス

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001257560A (ja) 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
WO2007032444A1 (ja) 2005-09-15 2007-03-22 Daishinku Corporation 水晶振動子
JP2012165367A (ja) 2011-01-18 2012-08-30 Nippon Dempa Kogyo Co Ltd 圧電振動子及び弾性波デバイス
JP2014175428A (ja) 2013-03-07 2014-09-22 Seiko Epson Corp 接合方法、電子素子、発振器、電子機器および移動体
WO2022080426A1 (ja) 2020-10-13 2022-04-21 株式会社村田製作所 水晶振動素子および水晶振動子
WO2022123816A1 (ja) 2020-12-11 2022-06-16 株式会社村田製作所 圧電振動子、圧電発振器、及び圧電振動子製造方法

Also Published As

Publication number Publication date
WO2024154372A1 (ja) 2024-07-25
CN120584459A (zh) 2025-09-02
US20250293665A1 (en) 2025-09-18
JPWO2024154372A1 (https=) 2024-07-25

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