CN120584459A - 压电振动元件、压电振子以及压电振荡器 - Google Patents

压电振动元件、压电振子以及压电振荡器

Info

Publication number
CN120584459A
CN120584459A CN202380091639.2A CN202380091639A CN120584459A CN 120584459 A CN120584459 A CN 120584459A CN 202380091639 A CN202380091639 A CN 202380091639A CN 120584459 A CN120584459 A CN 120584459A
Authority
CN
China
Prior art keywords
excitation electrode
hole
vibration element
har
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380091639.2A
Other languages
English (en)
Chinese (zh)
Inventor
西村俊雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN120584459A publication Critical patent/CN120584459A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202380091639.2A 2023-01-17 2023-08-03 压电振动元件、压电振子以及压电振荡器 Pending CN120584459A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023-004855 2023-01-17
JP2023004855 2023-01-17
PCT/JP2023/028449 WO2024154372A1 (ja) 2023-01-17 2023-08-03 圧電振動素子、圧電振動子及び圧電発振器

Publications (1)

Publication Number Publication Date
CN120584459A true CN120584459A (zh) 2025-09-02

Family

ID=91955808

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380091639.2A Pending CN120584459A (zh) 2023-01-17 2023-08-03 压电振动元件、压电振子以及压电振荡器

Country Status (4)

Country Link
US (1) US20250293665A1 (https=)
JP (1) JP7606679B2 (https=)
CN (1) CN120584459A (https=)
WO (1) WO2024154372A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5537051A (en) * 1978-09-06 1980-03-14 Seikosha Co Ltd Piezoelectric oscillator
JP3235515B2 (ja) * 1996-07-31 2001-12-04 株式会社大真空 圧電振動デバイス
JP2001257560A (ja) * 2000-03-10 2001-09-21 Toyo Commun Equip Co Ltd 超薄板圧電振動素子の電極構造
JP5040654B2 (ja) * 2005-09-15 2012-10-03 株式会社大真空 水晶振動子
US20120181899A1 (en) * 2011-01-18 2012-07-19 Nihon Dempa Kogyo Co., Ltd. Piezoelectric resonator and elastic wave device
JP2014175428A (ja) * 2013-03-07 2014-09-22 Seiko Epson Corp 接合方法、電子素子、発振器、電子機器および移動体
CN116368733A (zh) * 2020-10-13 2023-06-30 株式会社村田制作所 晶体振动元件以及晶体振动器
CN116671005A (zh) * 2020-12-11 2023-08-29 株式会社村田制作所 压电振子、压电振荡器以及压电振子制造方法

Also Published As

Publication number Publication date
WO2024154372A1 (ja) 2024-07-25
JP7606679B2 (ja) 2024-12-26
US20250293665A1 (en) 2025-09-18
JPWO2024154372A1 (https=) 2024-07-25

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